MLGC

13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N

ZP

With buffer With buffer Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Vacuum Entry Port Female thread Common Page 13-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on

AIR SLIDE TABLE

Side mounting Body tapped Maximum tightening Thread depth: Max. thread depth: Model Bolt L1(mm) L2(mm) torque MXQ6 M40.7 2.1 5 8 MXQ8 M40.7 2.1 8 11 MXQ12 M50.8 4.4 11 15 MXQ16 M61 7.4 14 19 MXQ20 M61 7.4 9 MXQ25 M81.25 18 12 MXQ6A M40.7 2.1 8 11 MXQ8A M40.7 2.1 8 11 MXQ12A M50.8 4.4 8 12 MXQ16A M61 7.4 12 17 MXQ20A M61 7.4 9 MXQ25A M81.25 18 12 MXQ6B M40.7 2.1 5 8 MXQ8B M50.8 4.4 4 9 MXQ12B

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

VZS

61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 34 Series VZS3000 Manifold Non plug-in type VV5ZS3-51Station 1Port size Grommet (G) 2-4.5 mounting hole 2n-Rc 1/8, 1/4 Manual override U side (n) (2) (1) Stations D side Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

CE

CC RB J D-X 20Data 10-12-11 11 Series CEP1 Dimensions: 12 Direct mounting, rod side tapped style: CEP1B12 Stroke 4 depth 4 (Positioning pin hole) Cable end + 0.05 + 0.02 17 40 4 depth 4 Without connector + 0.05 + 0.02 (Positioning pin hole) 4 45 4-M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5

CE

Bore size (mm) Stroke (mm) Bore size (mm) Manufacturable stroke range Applicable auto switch Note D25 50 100 75 125 150 175 200 250 300 400 500 12 25 to 150 D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-F7V D-F7/J79 D-J79C D-F7WV D-F7W/J79W D-F7BAL/F7BAVL D-F79F/F7NTL Switch mounting screw (M3 x 0.5 x 8l ) Square nut 12 20 -X BQ-1 20 25 to 300 32 2025 to 400 40 25 to 600 32 40 50 63 Switch

MU

148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Rear flange MUG25SMU25, #4 (#1+#4+#11) MUG32SMU32, #4 (#1+#4+#11) MUG40SMU40, #4 (#1+#4+#11) MUG50SMU50, #4 (#1+#4+#11) MUG63SMU63, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50

MX-OMP0051

MXQ16B 0.2 MXQ20(A) 0.2 MXQ20B 0.2 MXQ25(A) 0.2 5 2. 2-1 ,2 L1 L2 (Nm) (mm) (mm) MXQ6 M40.7 2.1 5 8 MXQ8 M40.7 2.1 8 11 MXQ12 M50.8 4.4 11 15 MXQ16 M61 7.4 14 19 MXQ20 M61 7.4 9 MXQ25 M81.25 18 12 MXQ6A M40.7 2.1 8 11 MXQ8A M40.7 2.1 8 11 MXQ12A M50.8 4.4 8 12 MXQ16A M61 7.4 12 17 MXQ20A M61 7.4 9 MXQ25A M81.25 18 12 MXQ6B M40.7 2.1 5 8 MXQ8B M50.8 4.4 4 9 MXQ12B M61 7.4 7 12 MXQ16B M61

Electric Actuator / Low profile slider type

Note 10) A reference value for correcting an error in reciprocal operation. -10- (3) LEMH (Linear guide single axis type) / LEMHT (Linear guide double axis type) Model LEMH25/LEMHT25 LEMH32/LEMHT32 50, 100, 150, 100, 150, 200, 250, 300, Stroke (mm) Note 1) 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) 350, 400, 450, 500, 550, 600, (700), (800), (900

EX500

M12 connector (for socket), 10 pcs. 4 3 Socket connector pin arrangement 11 14 Terminal no.

AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

Manifold Specifications

L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 333.5 325 312 12 16 360.5 350 328 16.5 17 373 362.5 344 14.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 20 25 32 40 50 63 80 100

CRBU

11-3-4.

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

EXxx-OMZ0016

External terminals (including the FE terminal) and enclosure screws Insulation resistance 10 M or more 500 VDC External terminals (including the FE terminal) and enclosure screws EN61131-2 compliant 5f<8.4 Hz 3.5 mm Vibration resistance 8.4f<150 Hz 9.8 m/s2 Impact resistance EN61131-2 compliant, 147 m/s2, 11 ms Mounting Through hole for M4 screw (2 pcs.)

Micro Mechanical Valve Series VM1000

, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F. 3 x 4.5 mounting hole 5 x Rc 1 4 Roller plunger VFM250-02-06 VFM250-02-06S Panel mounting hole 15 polyacetal or head steel roller M18 x 1 Hexagon nut thick 11, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port

CLA

1 14 40 " 56.5 15 25 SO 226 a 11 6 13.5 18 150 92 180 72 315 80 15 Series eLA Dimensions Rear Flange Type/CLAG Name plate \0 indICate locl