240

4 8 Bearing stopper Size 6: Aluminum alloy Size 10: Carbon steel 9 Motor plate Aluminum alloy Anodized 10 Guide ring Aluminum alloy Size 10 only 11 Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper !2 e w i !1 t !

MXF

A2 10 11 12 17 Model A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 Graph (2) Allowable Moment Coefficient: Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Allowable Moment Coefficient: Note) 16 mm for MXF8-10 only. 0.7 Stroke (mm) Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model 10 0.56 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98

MQQ

x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

17.4H9 10.8 19 M3 x 0.5 29.5 6.5 M4 x 0.7 4.5 M4 x 0.7 8 3.4 3H9 3 1.5 M4 x 0.7 8 MHZ2-20D 22.4H9 12 23 M4 x 0.7 39.8 8.3 M5 x 0.8 8 M5 x 0.8 10 4.3 4H9 4 2 M5 x 0.8 10 MHZ2-25D 13 37 49.7 10.8 M6 x 1 10 M6 x 1 12 5.1 4H9 4 27.4H9 3 M6 x 1 12 M5 x 0.8 AM AL AN AP AQ AR AS AT AU AV AW AX AY AZ Model 1122112211221122+2.2 0 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 0.2 +0.5 0.2 +0.5 0.2 +

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5 x 0.8 thread depth 10 MDHR2-30E Port Location P .C.D.43 (Mounting thread) MHZ 80 MHF 120 MHL MHR

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

port is either M5 or 10-32UNF thread, it is not available with seal.

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

2 x 9 counterbore M5 x 0.8 effective depth 7 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x M6 x 1.0 effective depth 10 Note 2) 2 x 5.4 through 47 25.5 10 36 1 Flat washer 8 10 7 7 25.5 39.5 + Stroke 4.5 36 44 + Stroke Lead wire minimum bending radius 10 Auto switch 25 19 5.5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x 9 counterbore M6 x 1.0 effective depth

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

MHY2/MHW2

9 Seal Kit NBR MHW20-PS MHW25-PS MHW32-PS MHW40-PS MHW50-PS 2.8-18 180 Angular Gripper Series MHW2 Dimensions MHW2-20D Flat finger (Standard) 20 2-M5 X 0.8 Depth 7 (Mounting thread) 17 60 4-M5 X 0.8 Depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2-M5 X 0.8 Depth 10 (Mounting thread) 35 23 27 36 26 18 23 7 21H9 +0.052 Depth 3 0 MHZ2 +0.2 +0.1 12 2 16 36 26 MHZJ2

3 Port Air Operated Valve Series SYJA300 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A,

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 528 Series AS Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions AS-FE KE Reference dimensions Note 1) Dimension for AS1000-M5

Series IDG

Port size: Rc 1/8, 1/4 (NPT, PF threads not available) Drain Drain Purge air discharge tubing port for dehumidification Applicable tube O.D.: 8 M5 x 0.8 24 Series IDG Membrane Air Dryer Dimensions (mm) (M Type) 1in = 25.4mm IDG10M, 20M G 0 , 0 IDG10HM, 20HM Port size 1/4, 3/8 71 A Purge air for dew point indicator 41 64 59 11 14 22 OUT IN 10 35 129 B 7 Purge air for dehumidification Purge

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

BDL (108.5) 10 4.6 10 34.3 101 74.5 35 5.5 28.1 12.7 ADDRESS No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PPS PTFE PFA N Pilot port thread type Symbol Nil 2 Body class 6 one-touch fitting M5 x 0.8 Tubing O.D. Body class 2 3 4 5 Tubing O.D. Symbol Metric sizes 06 10 12 19 6 10 12 19 Inch sizes 07 11 13 19 1/4 3/8 1/2 3/4 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C.

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

VKF300

(PT) 1/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65

Plug-in Unit

B (+) () () (+) 10 10 When using a standard commercial connector, use a type 26P connector conforming to MIL-C-83503 or a type 20P with strain relief. Cannot be used for transfer wiring. SOL. A SOL. A (+) () () (+) 11 11 Station 6 Station 6 SOL. B SOL. B (+) () () (+) 12 12 SOL. A SOL. A (+) () () (+) 13 13 Station 7 Station 7 SOL. B SOL.

MQQ

10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 28 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 With rod end male thread: MQQDM Rod end nut H1 Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5