End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Mounting same side MG D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 MGP 15+45( n2 ) (n=2, 4, 6) 2 60+45(n2) 60 15 10 MGQ 15+50( n2 ) (n=2, 4, 6) MGG 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 MGC 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL MGF 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 MGZ D-B59W 75 20 D-A3A D-G39A D-K39A D-A44A CY 10 100

CRQ2

CAT.ES20-147 A Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

Stopper Cylinder

1 i o w Mounting e Bore size r Port thread type t Cylinder stroke [mm] q With auto switch 12 12 mm 16 16 mm 20 20 mm 32 32 mm 40 40 mm 50 50 mm B Through-hole A Both ends tapped Nil M thread 12, 16 Rc 20 to 50 TN NPT TF G F Built-in One-touch fittings*2 Nil Without magnet for switch*1 12 10 16 10, 15 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 D With auto switch (Built-in magnet

VZ100/300/500

Ambient and fluid temperature (C) Response time (ms) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 15 or less Applicable for vacuum use 100 kPa Max. operating frequency (Hz) 15 Flow Characteristics Refer to the table below.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm 40: 37mm 2 auto

Environment

600 LEC Speed [mm/s] Speed [mm/s] LEC S For Servo Motor (24 VDC) LECA6 LEC SS-T LEC Y Horizontal Vertical LEY25Am LEY25m Motorless 40 15 LAT Lead 3: LEY25AC Horizontal work load [kg] Lead 3: LEY25C Vertical work load [kg] 30 11 LZ 10 LC3F2 20 Lead 6: LEY25AB Lead 6: LEY25B 15 5 10 Lead 12: LEY25AA Lead 12: LEY25A 7 2 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed

HRX-OM-O021

20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40

HRL

Cooling Capacity HRL100-Am-40 (CH1)*1 HRL200-Am-40 (CH1)*1 30 14 12 Ambient temperature 32C 25 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 4 Ambient temperature 45C Ambient temperature 45C 5 2 0 0 5 20 10 15 25 30 35 5 20 10 15 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRL300-Am-40 (CH1)*1 HRL100/200/300-Am-40 (CH2

CP95

113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19

CP95

5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

/

3 7.9 3.0 0.61 4.5 15 3/8 (10A) 6 1.10 26 8 1.60 38 1.0 10 2.20 53 1/2 (15A) 10 2.20 53 Note) Weight of grommet type.

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

Low Friction Cylinders Series MQ

I NA D J A F N2 N1 MM S + Stroke F H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc 1/8 13 NPT 1/8 25 G 1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc 1/8 13

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

L9 L9 [mm] L9 [mm] L9 [mm] L9 [mm] 600 600 1000 1000 Z m Me 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 1000 800 1500 L10 [mm] L10 [mm] 600 1000 Y 400 500 m Me 200 0 0 0 2 8 10 4 6 0 10 15 5 20 L10 Vertical Work load [kg] Work load [kg] 2000 1000 800 1500 L11 [mm

58

with rod boot on both sides) ZZ + 2 x strokes (mm) Bore size (mm) 125 140 160 Stroke range (mm) B A AL B C D E F FD FT FX FY FZ J W V KA M G K Up to 1000 15 50 47 143 145 115 32 71 43 19 14 190 100 230 M14 x 1.5 17 27 13 15 15 Up to 1000 15 50 47 157 160 128 32 71 43 19 20 212 112 255 M14 x 1.5 17 27 13 15 15 Up to 1200 15 56 53 177 180 144 38 78.5 42 19 20 236 118 275 M16 x 1.5 20 34 15

SFOD-OMT0005CN

Word Bit 9 0-15 *1 1% Word10 Word Bit 10 0-15 *1 1 mm/s Word11 Word Bit 11 0-15 *1 1% Word12,131 Word Bit 12 0-15 1() (-)(+)*1 *2 0.01 mm 13 0-15 1() Word14,152 Word Bit 14 0-15 2() (-)(+)*1 *2 0.01 mm 15 0-15 2() Word16,17 Word Bit 16 0-15 () *1 *2 0.01 mm 17 0-15 () *1 *2 20(P.83) -40- 10 () EtherNet/IP 4.3 EtherNet/IP (P.22) 2 () * () () 3 10.1 12 64 ()() Acceleratio