End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Z DA DDH10 (Hole) DU DC DX DE DO DR DT DS DH DF B W1 DL MGQ CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 10 165 57 11 65 15 85 10 9 17 8 40 52 60 35 +0.058 0 10 10 183 57 35 11 65 18 85 10 9 17 8 40 52 70 +0.070 0 12 MGG 10 196 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 +0.070 0 16 12 235 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 +0.084 0 20 MGC 12 256 93 16.5 100 35.5 130

Series AP3100

Specifications Operating Parameters Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv AP4625 AP4650 AP4657 AP4600 Select compatible materials of construction for the gas Vacuum to 250 psig (1.7 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 1) 0.5 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

VZ3000

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

Speed Controller: Standard Type Series AS In-line Type

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Manifold Specifications

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

A-HEC-OM-J004

4.3.4 Avoidence of Parallel Wiring . 4-10 4.3.5 Incorrect Wiring . 4-10 4.3.6 Removal of Cables . 4-10 4.3.7 Connection of Various Types of Connectors and Power Supply Plugs . 4-11 4.4 Installation . 4-11 Chapter 5 Operation . 5-1 5.1 Start of Operation . 5-1 5.2 Setting of Values . 5-2 5.3 Cautions for Operation Control. 5-2 5.4 Operation of Controller . 5-4 5.4.1 Details of Operation and

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ5-20-03 . 1 set (manifold base) SYJ512-5LZ-M5 . 2 sets (valve) SYJ500-10-1A . 1 set (blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (manifold base) SYJ514R-5G . 2 sets (valve) SYJ500-10-3A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

CS1 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 CS2 50 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Symbol Specifications -XA 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Change of rod end shape -XB5 Oversized rod cylinder 80

Sine Rodless Cylinder Series REBR Direct Mount Type

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

Lubrication Equipment

-l06 to 10 ALD900-l12 to 20 D.P.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

Non-contact Gripper

) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 80 Size: 100 30 50 0.4 (MPa) 0.4 (MPa) 25 40 0.3 (MPa) 0.3 (MPa) Lifting force (N) Lifting force (N) 20 30 0.2 (MPa) 15 0.2 (MPa) 20 10 0.1 (MPa) 0.1 (MPa) 10 5 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 738 Non-contact Gripper XT661 Series Lifting ForceDistance

LEC-OM032xx

LED display.31 9. 1 LED display.31 9. 2 Controller IF communication status and LED display.32 10. Mode.33 10. 1 Outline.33 10. 2 Step data input mode .33 10. 3 Numerical data input mode.33 10. 4 Data writing mode.35 11. Memory map .36 11.1 Memory assignment.36 11.2 Controller IF flagIN Data.40 11.3 Gateway unit status flagIN Data.40 11.4 Gateway unit control flagOUT Data.42 12.

K35-OMW0031

Cal Pos set to 20mA 7 Rod friction count 10%-30% Cal Pos set to 4mA 30%-50% 50%-70% 125 8 Movement area 9 Cal select status 70%-90% 160 10 Cal type 90%-95% 200 more than 95% 250 total 320 400 ON Setting error OFF (Default) It depends on DIP-SW or Rotary-SW Retracted end Automatic Calibration position Manual Stay 0 (Slow) 1 2 3 4 5 6 7 8 9 (Fast) (B) 1 E-Stop off OFF (Default) 2 Calibration

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.