CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 12 57 35 65 18 85 10 9 17 8 40 52 70 10 261 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 57 35 65 18 85 10 9 17 8 40 52 70 10 261 12 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 20 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

MXQ

NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2

Cylinder with Lock

D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4

VZS

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Stopper Cylinder

7.5 7.5 2 x (Rc, NPT, G) 1/8 Z 20 24.5 8 T 0 0.1 E M J R38 25 14 28 B + Stroke 4 x N through 8 x O counterbore E M 100 + Stroke A + 2 stroke RSQ RSQ Mounting: Both ends tapped RSQA RSG RS2H O1 thread [mm] RSH Bore size B O1 R 32 48 M6 x 1 10 40 52.5 M6 x 1 10 50 54 M8 x 1.25 14 MIW MIS B + Stroke R R * Dimensions other than those shown above are the same as the drawings above.

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Size: 1/8, Port Size: 1/4, Size 20, Accessories: None, Handle Orientation: Handle Down

Size: 1/8, Port Size: 1/4, Size 20, Accessories: Mounting Bracket, Handle Orientation: Handle Down

Size: 1/8, Port Size: 1/4, Size 20, Accessories: Panel Mount Nut, Handle Orientation: Handle Down

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 20, Reverse Flow: No, Thread: NPT, Port Size: 01 [1/8 (Size 20)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Nameplate/Caution Plate for Bowl in Imperial Units

Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 20, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Nameplate/Caution Plate for Bowl in Imperial Units

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 20, Reverse Flow: No, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 20, Reverse Flow: No, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Size: 20 (1/8), Port Size: 02 (1/4, Size 20), Accessories: B (Mounting Bracket), Handle Orientation: Handle Down

Regulator, Pressure Boosting Valve: -, Regulator Type: -, Shape: -, Operating Environment: -, Compatible Fluid: -, Exhaust Mechanism (Air Bleed): -, Reverse Flow Function (Relief): -, Supply Side Connection Type: -, Supply Side, Connection Diameter: -, Flow Direction: -, Control Side Connection Type: -, Control Side, Connection Diameter: -, Pressure Gauge: -, Size of Body: -, Accessory: -