Compact Manifold Regulator Series ARM5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 VEF VEP Manifold stations Dimensions by the Number of Stations 10 Model Symbol VER 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VEA ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 VY2 L1 592 537 482 427 372 317 262 207 152 ARM3000 L2 578 523 468 413 358 303 248 193 138 VBA VBAT L3 550
Double rod type Series CXSW 6, 10, 15, 20, 25, 32 CXS Clean Series Clean Series D1112CXSJ Series/6, 10 -X Type Series Bearing type Vacuum specifications Slide bearing Ball bushing bearing 11-CXSJ Individual -X Relieving type Special treatment 12-CXSJ Ball bushing bearing 537 Series CXSJ Model Selection Caution Theoretical output must be confirmed separately, referring to the table on page 550
17 27 59 13 12 MBX 1.25 7 85.5 MtOXL2S 7 106.5 M12X l .75 11 125.5 M12X1.75 11 139.5 -600 20600 32 35 101 8' 115 V, 750 20-750 37 40 119 102 129 y, 'f. 64 20 40 10 102 17 2' '7 18 15 V, 78 25 52 14 113 21 30 72 23 17 .FO FT FX FY FZ wltnout boot WI1h boof H ZZ .. , h 1 ZZ 750 20 750 37 40 133 11 6 140 V, Yo 92 30 52 14 124 21 31 76 25 19 MM N P PG PH PL PW S W FV XIUS Bore aize (mm) 40 550
1.6 (40) 1.6 (40) Fan l3.1 (8.0) 15.9 (404) OUT Air RADIATING WATER 14.2 (361) IN 12.8 (326) Communication connector Alarm output connector HEC 11.0 (281) OUT 17.6 (448) 17.3 (440) Facility water inlet Rc1/2 RECIRCULATING H FLUID RS-232C 7.8 (198) 6.6 (168) L External temperature sensor connector IN ALARM 6.5 (165) EXT.SENSOR 5.0 (128) AC 2.6 (67) Power connector DRAIN 1.1 (28.5) 21.7 (550
Model Connection Effective area Model Connection R Max. air flow Effective area mm2 R mm2 l/min AMC310 300 3 8 AN110 35 1 8 16 55 165 330 550 AN200 35 1 4 AMC510 1,000 3 4 AMC610 AMC810 AMC910 AN300 60 3 8 3,000 1 1 6,000 10,000 AN400 90 1 2 1 2 2 AN500 160 3 4 AN600 270 1 1 1 99.9% of oil mist removal. Over 35 dB noise reduction.
107 Series SQ1000/2000 SQ2000 D-sub connector kit (F kit) For single wiring SSQ1000 F 40A 250 L Symbol (Dimension L) Station Symbol (Dimension L) Station 430 190 Station 2 Station 14 450 210 Station 3 Station 15 A C B A C B A C B A C B 470 230 Station 4 Station 16 490 250 Station 5 Station 17 510 270 Station 6 Station 18 For double wiring SSQ1000 F 41A 350 530 290 Station 7 Station 19 550
Note1) Applicable model HRR012/018-A/W-10-T/MT HRR012/018/024/030-A/W-20-T HRR012/018/024/030-A/W-20-MT Rated flow50/60Hz Note23 L/min 7(0.36MPa)/10(0.42MPa) 10(0.42MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Maximum pumphead 50/60Hz m 50 50 50 Pump Output W 320 550 Circuit protector A 15 15A10A for standard Recommended earth leakage breaker capacity A 15 Cooling capacity Note 4 W The cooling
Cylinder stroke (mm) Suffix for stroke adjusting unit Nil S 50, 100, 150, 200 250, 300, 350, 400 450, 500, 550, 600 16, 20 25, 32, 40 Both ends One end Note) S is applicable for stroke adjusting units L and H.
AIR OUTLET PORT SIZE AIR INLET A (G) B (D) E SWITCH EVAPORATION WITH LAMP THERMOMETER VENTILATION VENTILATION DRAFT AIR OUTLET BALL VALVE (F) AUTO DRAIN C DRAIN TUBE TERMINAL LENGTH:1m) (O.D.10, BLOCK J P K L2 N1 M 13 4x POWER SUPPLY ENTRY 911)[OPPOSITON] (WIRE H measuremm Model Port size A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 123 5 279 46 50 13 353 85 600 379 1258 64 550
Mass (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308 550
45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592 537 482 427 372 317 262 207 152 ARM3000 L2 578 523 468 413 358 303 248 193 138 L3 550
260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5 448 16 313 432 450 460.5 17 329 448 462.5 473 18 345 464 487.5 498 19 361 480 500 510.5 20 377 496 512.5 523 21 393 512 537.5 548 22 409 528 550
45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592 537 482 427 372 317 262 207 152 ARM3000 L2 578 523 468 413 358 303 248 193 138 L3 550
(Note1) (Petroleum,Water-glycol, Emulsion,Phosphoric ester) Applicable model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 INOUT Port size (Rc) 3/4B 1B 1 1/4B 1 1/2B 2B 2 1/2B 3B Drain port size M162 Rated flow Paper 50 80 120 160 260 450 600 rate Micromesh 60 100 150 200 300 550 700 (L/min) Operating pressure 1.0MPa Operating temperature 80oC Nominal filtration 1.
For 10SYJ5000, refer to page 529, and for 10-SYJ7000, refer to page 550. A, B port P port 493 Series 10-SYJ3000 Rubber seal 4/5 port solenoid valve Specifications Fluid Air 2 position single 0.15 to 0.7 2 position double Operating pressure range (MPa) 0.1 to 0.7 3 position 0.2 to 0.7 Ambient and fluid temperature (C) 10 to 50 (with no freezing.
For 10SYJ5000, refer to page 529, and for 10-SYJ7000, refer to page 550. A, B port P port 493 Series 10-SYJ3000 Rubber seal 4/5 port solenoid valve Specifications Fluid Air 2 position single 0.15 to 0.7 2 position double Operating pressure range (MPa) 0.1 to 0.7 3 position 0.2 to 0.7 Ambient and fluid temperature (C) 10 to 50 (with no freezing.
2.01 3.14 4.91 8.04 12.6 19.6 Calculation/ Example 650' 1.77 2.78 4.34 7.11 11.1 17.3 '-60a 1.64 2.56 4.00 6.56 10.2 16.01 Conditions Ejector / size ZH10B$ 01-06 Effective pressure . ,63% '550 1.50 2.34 3.67 6.01 9 .35 14.7 Mc~~rli . -500 1.37 2.1 3 3.34 5.47 8.54 13.3 PreSsure 45E' 123 1.92 3.00 4.92 7 69 12.0 , mmFlg 4OE , 1.09 1.71 10.7 2.67 4.37 6.83 .. (Max.
5[ l(orTond( 16.0 250.0 2,m0 550 163,850 Cololog l{0. (t$odel) Danpiig Dire(lion (ololog llo.
HEC006 HEC012 HEC006 HEC012 Model No. label Model No. label Fig.4-1 Position of Model No. label Fig.4-2 Legend of Model No. label 4-2 Unit Overview 4.4 Appearance 4.4.1 HEC006 (C) 4xG D E A B F A B C D E F G HEC006 240 390 497 214 458 482 7 Unit: mm Fig.4-3 Outside drawings of HEC006 4-3 Unit Overview 4.4.2 HEC012 (C) 4xG D E A B F A B C D E F G HEC012 300 448 565 190 526 550 7 Unit: mm Fig
175 190 75 75 75 90 120 120 100 170 140 230 175 265 190 265 IDU-FL210 220 IDU8E 310 375 340 375 440 420 550 720 610 IDU-FL211 IDU11E 195 IDU-FL212 IDU15E1 265 370 315 365 400 560 IDU-FL215 IDU22E IDU-FL216 IDU37E IDU-FL217 IDU55E A filter set for the IDF-FL200 to 214 consists of 1 filter.