Fieldbus system (PROFIBUS DP compliant)

Memory map of output data Data (2 byte) Output area Branch connector (OUTPUT) MSB LSB MSB LSB 15 8 7 0 byte (d) byte (d+1) Word(c) COM A byte (d+2) byte (d+3) Word(c+1) COM B byte (d+4) byte (d+5) Word(c+2) COM C byte (d+6) byte (d+7) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

SFOD-OMT0011CN

4.8 (1),I/O (2), (3) (1) 4 OUT0-OUT3 ALARM OUT0 OUT1 OUT2 OUT3 B OFF OFF ON OFF OFF C OFF OFF OFF ON OFF D OFF OFF OFF OFF ON E OFF OFF OFF OFF OFF *ALARM (2) I/O SVRESETON SVRE SETON B RESET C RESET D OFF RESET E OFF OFF 43 No.SFOD-OMT0011CN-A (3) (3-1) code <> OFF OFF (0-098) C RESET <> ON SVRE ON <> <> DRIVE ON(0-099) C RESET <> (0-149) RESET SVON <> D <> <> (0-901) E

3

CK1 Mounting bolt CLK2 CLKG Flat washer C D CKQ CLKQ Note) Be sure to use a flat washer to mount cylinders via through-holes. CK CLK Spanner C D Mounting bolt part no.

21

C D d H B Part no. SN-020B SN-032B SN-040B Applicable bore size 20 25, 32 40 26 30 25.5 M20 x 1.5 8 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 Trunnion Nut (mm) Pivoting Clevis Bracket Pin (For CM3E) (mm) Material: Iron Material: Iron H B d D m m l C D t t L d C D d H B Part no.

REC

D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

VXP21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 AC VXP21 DC 50 45 20 60 40 15 AC VXP22 DC 50 60 25 60 50 20 AC VXP23 DC Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C ) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (D) (S) 99 100 183

Floating Joint

(mm) d: Nominal thread size Model M22 x 1.5 M26 x 1.5 H 13 16 32 41 B C 37 47.3 Order no.

Electric Actuators

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length(L)[m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

Mechanically Jointed Rodless Cylinders

Refer to front matter 6 for details. 22 Mechanically Jointed Rodless Cylinders Series MY3M Side Support Side support A MY-SA 2 x G E F 2 x H B A D C Side support B MY-SB 2 x J E B A C D (mm) B C 15 25 35 G 6.5 8 9.5 H 3.4 4.5 5.5 J M4 x 0.7 M5 x 0.8 M6 x 1 D 26 38 50 E 4.9 6.4 8 F 3 4 5 A 53 65 77 97 112 138 160 Model Applicable cylinder MY3A16MY3B16 MY3A20MY3B20 MY3A25MY3B25 MY3A32MY3B32

Vacuum Unit Ejector / Vacuum Pump System

Single unit / Manifold: Option (D) Manifold: Option (P) C Vacuum pump system PE port female thread specification(M3) Note 18) D With individual release pressure supply (PD) port(M3) Note 19) Use when supply pressure for vacuum release is individually requested.

Fieldbus system EtherNet/IP compatible SI Unit

, dual-side D code Plug, Straight 5 m EX9-AC100EN-PSPS: Cable with M12 connector, dual-side D code Plug, Straight 10 m EX9-AC005EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 0.5 m EX9-AC010EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 1 m EX9-AC020EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 2 m EX9-AC030EN-PAPA: Cable with M12 connector

VS 8-2/VS 8-4

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

Refrigerated Air Dryer

B IDFB4E to 15E A Power cable outlet 0.7 [17 mm] Grommet with membrane Signal cable outlet 0.7 [17 mm] Terminal block (Wire diameter 0.4 [9 to 11mm]) Grommet with membrane Power cable outlet 0.7 [17 mm] IDFB4E to 11E_Terminal block C D A B Terminal block Dimensions Unit: inch [mm] A B C D Model B B 9.0 [230] 2.6 [67] 7.0 [179] 1.3 [32] IDFB4E, 6E, 8E, 11E A Power cable outlet 0.7 [17 mm]

S070

32 Connection Barb fitting Applicable tubing 3.18/2 Coil voltage 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Electrical entry G Grommet C Plug lead with light/ surge voltage suppressor Power consumption Pressure specification Flow rate Power consumption (W) Maximum operating pressure (MPa) 0.1 0.3 0.3 0.5 0.1 0.3 Cv factor Symbol 0.021 0.011 0.021 0.011 0.011 0.006 A B C D E Note) 0.35

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

+ , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

1008 1075 VCC-G-D-1 (Applicable fitting VCK ) VCC-G-D-1 2 13 Width across flats: 19 25.5 14 60 VCC-G-D-2 (Applicable fitting VCK ) 0806 0604 9 Width across flats: 17 20.5 14 50 For extending the socket VCC-G-D-1 VCC-G-D-1 113 VCC-G-D-1 VCC-G-D-2 97 17 VCC Series Disassembly/Assembly/ Maintenance Procedure Cleaning Valve Element Special tool part no.: VCC-G-C VCC13-00 (3 port valve) VCC12-

60

d it it e e h h c c la la o o u u p p t t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Rated voltage DC specifications of type D and DO are only available with 12 and 24 VDC.