Silencers/Exhaust Cleaner Series AN
/Series AMC 1

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model D-M9W D-M9A Bore size (mm) D-A9 D-A9V D-M9 D-M9V D-M9WV D-M9AV D-P3DW No. of auto switch mounted 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 10 10 10 10 10 10 10 5 10 10 10 5 10 5 10 5 10 5 10 5 15 15 10 10 10 10 10 5 15 15 15 15 15 15 15 15 15 15 15 15 5 5 5 5 5 5 5 5 5 5 10 5 10 5 10 5 10 5 10 5 10 10 10 10

Thermo-chiller

/Japanese 1 pc.), Anchor bolt fixing brackets 2 pcs.(including four M8 bolts), Cable accessory 1 pc. (For communication cable) Weight*10 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Stainless Steel One-touch Fittings Series KG

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

Card Motor

Pushing force 0.9 0.9 Pushing force Pushing force 0.9 4 4 4 Thrust setting value: 3 Thrust setting value: 2.8 Thrust setting value: 2.6 0.7 0.7 0.7 3 3 3 0.4 0.4 0.4 2 2 2 Thrust setting value: 1 Thrust setting value: 1 Thrust setting value: 1 0.2 0.2 0.2 1 1 1 0 0 0 0 0 0 0 2 4 6 8 10 Pushing position [mm] 0 5 10 15 20 Pushing position [mm] 0 5 10 15 20 25 30 Pushing position [mm] Pushing

Series KG Stainless Steel One-touch Fittings

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Ported/SS5YJ3-41Stations -M5, [ ]: AC (Lead wire length) 91.7 [96.1] Approx. 300 C4 N3 For (Built-in one-touch fitting) Grommet (G) For M5 (Pitch) P = 10.5 16 1/8 (P port) 10 Manual override 1/8 (P port) 36.4 10 10 61.7 [63.9] 60.9 [63.1] 21.4 78.8 [83.2] R R B B B B B 7.8 39.5 38.7 36.5 11.5 18 4.3 21.5 (4.4) P A A A A A 3 1/8 (R port) (Station n) (Station 1) 2-4.5 (For mounting) L1 L2

Pressure Gauge Guide

Model (Standard) Pressure range Note) Indication unit Connection thread Note MPa G46-2-01/ 02 G46-4-01/ 02 G46-7-01/ 02 G46-10-01/ 02 G46-2-01 to 02M G46-4-01 to 02M G46-7-01 to 02M G46-10-01 to 02M GA46-10-01 to 02 Model 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.0 8 1 R , 4 1 MPa 8 1 R , 4 1 M5 (Female thread) 8 1 R , 4 1 Note) Do not apply pressure

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

VDW

VVDW 2 0 4A VVDW 0 2 C 1 01 2 Series Series VX2 1 2 1 2 10 20 10 20 Thread type Rc G NPT Nil F N VXD Material C S Brass (C37) Stainless steel VXZ Series 30 OUT port size VVCW20-4A Stations VXE Symbol M5 01 Port size M5 1/8 (6A) 1 2 For 2 stations For 3 stations VXP Series 10 is available with M5 only.

REC

20 42.5 40 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 209 219 22 40 51 M32 x 2 53 Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

Booster Regulator/Air Tank

Inlet pressure (MPa) 0 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 0 0.5 0.4 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) Charge Characteristics Charge Characteristics Charge Characteristics 60 12 5 11 50 10 Charge time per 10 L t (s) Charge time per 10 L t (s) Charge time per 10 L t (s) 4 9 40 8 3 7 30 6 5 2 20 4 3 1 10 2 1 0 0 0 1.0 1.2 1.4 1.6 1.8 2.0 Pressure increase ratio P2/P1 1.0 1.1

Plate Cylinder

M8 x 1.25 depth 11 M10 x 1.5 depth 15 M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5 GY 5 5.5 7 8 10 H 36 40 45 53 56 K 5.5 5.5 6 7 7 KA 10 12 14 18 18 Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 (mm) (mm) Rod End Female Thread P TN TF NY NX NS NE ND NC N MM Model S ZZ MM M6 x 1 depth 12 ZZ 74 77 85 102 106

LEF-OM006xx

LEC / (LEC ) () ID 1 164 1 IO 1: 64 1 S 0 +23) +2 10 -23) -2 -10 / 3000 3000 LEFS 0.5 LEFB 1 LEFS 0.5 LEFB 1 4) 0.00 CCW:-10+[] 9 CW-9+10-[] 1: /1:+2: SW 2 /1:2 W 1 0.00 W 2 0.00 0.00 1 2 (1-052) 2mm 3 CCW CW (+2 4) P29 -27- LEC / (LEC ) () 1) 2:CCW 1CW 2CCW 1 LEF 100 LEF16A 150 LEF25A 250 LEFS 200 LEFB 200 LEFS 30 LEFB 60 1000 LEFS 30 LEFB 60 0 1

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size With One-touch fitting 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 727. Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 x 0.8 10-32 UNF 1/8 1/4 N Made to Order Lubricant: Vaseline X12 Ex.)

Digital Flow Switches Series PF2A

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

MY1

10 1.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF