Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

R.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

XM, XY

Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310

RB/RBL/RBQ

Operating condition Impacting object weight Collision speed Dropping height Angle speed Distance between axis of cylinder and impact point Bore size Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Symbol m h r d p F T n t Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh m RHC R m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S m Nm C m/s kg

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Material Rolled steel plate Rolled steel plate Carbon steel Rolled steel plate Carbon steel Steel wire Urethane Cast iron Lead-bronze casted Carbon steel Carbon steel Rolled steel No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MLGP

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Connection thread size R 1/8 R 1/4 R 3/8 CNA Caution CNS 1. Be sure to connect the load to the plate section with the lock in an unlocked condition.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Atex: 55- (ATEX category 2 - II 2GDc), Body Size: 3 (3/8 Standard), Body Material: 2 (SCS14, Stainless Steel), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 0 (Automatically Operated), Thread: N (NPT), Port Size: 03 [3/8 (10A)], Option: N (w/Silencer)

Atex: 56- (ATEX category 3 - II 3GD), Body Size: 3 (3/8 Standard), Body Material: 2 (SCS14, Stainless Steel), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 0 (Automatically Operated), Thread: N (NPT), Port Size: 03 [3/8 (10A)], Option: N (w/Silencer)

Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 03 (3/8), I/O Specifications: A3 (IN1: 0-10 VDC, IN2: External Control Input, OUT1: 0-10 VDC), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: N (None), Operation Manual: Y (None)

Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: JT (OUT1: Analogue 1 to 5 V - OUT2: Analogue 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket: R

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: JT (OUT1: Analogue 1 to 5 V - OUT2: Analogue 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: JT (OUT1: Analogue 1 to 5 V - OUT2: Analogue 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket: R

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 2 (Metal Bowl), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: N

Body Size: 30, Thread: N (NPT), Port: 03 (3/8), Drain: None, Flow Direction: Left to Right, Pressure Gauge, Bracket: C (Round Type Pressure Gauge, w/o Limit Indicator, w/Bracket)

Body Size: 30, Thread: N (NPT), Port: 03 (3/8), Drain: None, Flow Direction: Left to Right

Body Size: 30, Thread: N (NPT), Port: 03 (3/8), Drain: None, Flow Direction: Left to Right, Pressure Gauge, Bracket: B (w/Bracket)