Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3 25.5 13 9 25 8 22.2 11.2 R1/8 13.8 35.5 30.5 15.5 14.6 12 32.4 27.4 26.6 33.9 17.2 15.5 28.7 38.5 R1/4 17 40.3 35.3 19.5 34.8 29.8 18.6 18.2 34.5 32.7 33.3 32.7 33.3 44.3 44.9 45.5 44.9 45.5 R1/4 19 48.3 43.3 18.2 24.3 42.8 37.8 21 R3

HRX-OM-K003

This system Your system Communication data TEMP PV 30C TEMP PV TEMP PV 30C TEMP SP 30C External communication 30C Discharge temp: OFFSET 1C 31C dissipation: Heat 1C Circulating fluid temp. in your system: 30C Figure 8-7 When MODE3 is selected HRW Series 8.4 Offset Function 8-11 HRX-OM-K003 Chapter 8 Appendix 8.5 BAND/READY function Sets BAND to TEMP SP value, and notifies TEMP PV value reaches

Thermo-con

Cool from 30C (303 K) to 20C (293 K). : Clear water Density : 1 x 103 kg/m3 Specific heat C: 4.2 x 103 J/(kgK) Water bath Refer to the information shown below for the typical physical property values by circulating fluid.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Leakage rate is measured at room temperature (20 to 30C). Gas permeation This is leakage caused by diffusion through the elastic body seal material. As temperature increases, the diffusion rate increases, and in many cases, becomes greater than surface leakage.

Peltier-type Chiller Thermo-con/ Compact Type

Cool from 30C (303 K) to 20C (293 K). Circulating fluid : Tap water Density : 1 x 103 kg/m3 Specific heat C : 4.2 x 103 J/(kgK) Refer to the information shown below for the typical physical property values by circulating fluid. Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

33

1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 35C 1.01 3.91 x 103 1.01 0.94 x 103 40C 0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x 103 1.01 0.94 x 103 Note) The above shown are reference values.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

. + 4 x (n pcs. 1) 36 360.3 4 x R3 or less 4 x R3 or less 67 or more 739 Series ZSE80/ISE80 Dimensions Panel mount (Bottom ported) 50 40 24.2 7.5 51.2 71.1 38.6 Panel-cut dimensions 360.3 36 x n pcs. + 4 x (n pcs. 1) 360.3 36 4 x R3 or less 4 x R3 or less 740 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids F in brackets stand for the function codes.

K35-OMX0029

P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

S Couplers

/8 R3/8 R1/2 R1/2 NPT1/8 NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT3/8 NPT1/2 NPT1/2 Refer to the how to order on page 1 for the sleeve lock mechanism provided type.

155

/8 R3/8 R1/2 R1/2 R3/4 R3/4 R1 D H1 A L1 Reference dimension of "R" thread after installation.

VBA-OM-S002

VBA2: Tightening torque: 22 to 24 Nm (R3/8) VBA4: Tightening torque: 28 to 30 Nm (R1/2) (3) Change of the booster regulator OUT port plug VBA2, 4: Tightening torque: 24 Nm (M10) booster regulator by applying the seal tape. with a monkey spanner. Booster regulator Air tank Groove O-ring (4) O-ring

VBA-OM-S009

VBA2: Tightening torque: 22 to 24 Nm (R3/8) VBA4: Tightening torque: 28 to 30 Nm (R1/2) (3) Change of the booster regulator OUT port plug VBA2, 4: Tightening torque: 24 Nm (M10) booster regulator by applying the seal tape. with a monkey spanner. Booster regulator Air tank Groove O-ring (4) O-ring

Finger Valve

Replacement parts Model One-touch fitting Applicable tube O.D. 10 or more 1(P)Male thread / 2(A)Male thread port R3/8 or larger One-touch fitting Applicable tube O.D. 8 or less Description Component No.

VBA-OM-S001

OUT port Mounting VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) Drain port Rc1/4 (4) O-ring : Mount the O-ring in the groove on the joint of the tank at the back of the booster regulator.

VBA-OM-S008

There should be no damage or dust for VBA1 is with nominal size 4 and 6, for VBA2 with : Tighten the optional safety valve and drain (3) (2) (1) (4) Booster regulator VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) VBA1 VBA2 (3) Change of the booster regulator OUT port plug valve with a monkey spanner. booster regulator by applying the seal tape

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7 LQ3T4A-R8 LQ3T4A-R9 LQ3T5A-R1 LQ3T5A-R2 LQ3T5A-R3 LQ3T5A-R5 LQ3T5A-R6 LQ3T5A-R7 LQ3T5A-R9 LQ3T5A-R10 LQ3T5A-R11 LQ3T5A-R12 LQ3T6A-R1 LQ3T6A-R2 LQ3T6A-R3 LQ3T6A-R4 LQ3T6A-R5 LQ3T6A-R6 LQ3T6A-R7 LQ3T6A-R9 LQ3T6A-R10 LQ3T6A-R12 LQ3T6A-R13 LQ3T6A-R14 Applicable tubing O.D. 1

XM, XY

part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3