Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Digital Flow Switches, Series PF2A, Series PF2W

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse

FGX-OM-K003_e

Air flow capacityNote 1) 100L/min(ANR) 500L/min(ANR) Filtration rating 0.0199.99 MAX Operating pressure 1.0MPa (0.99MPa for Nitrogenat 20 Operating temp. 5 to 45 Initial pressure oss 0.03MPa or less (at primary pressure of 0.7MPa and max. air flow capacity) Clean room (class 100) Note 1) The air flow capacity is the flow rate at a primary pressure of 0.7MPa.

Environment

11 20 10 LZ Lead 16: LEY32A 10 0 0 LC3F2 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY40m LEY40m 100 60 Lead 4: LEY40C 53 Horizontal work load [kg] 80 Vertical work load [kg] 40 Lead 4: LEY40C 60 Lead 8: LEY40B Lead 8: LEY40B 27 40 20 30 Lead 16: LEY40A 13 20 Lead 16: LEY40A 0 0 0 300 400 500 200 100 600 0 300 400 500 200 100 600 Speed [mm/s] Speed [mm

Slider Type Ball Screw Drive/11-LEFS Series

Model L A B n D E Without lock With lock 11-LEFS40ll-150l 564.5 594.5 156 328 4 150 11-LEFS40ll-200l 614.5 644.5 206 378 6 2 300 11-LEFS40ll-250l 664.5 694.5 256 428 6 2 300 11-LEFS40ll-300l 714.5 744.5 306 478 6 2 300 11-LEFS40ll-350l 764.5 794.5 356 528 8 3 450 11-LEFS40ll-400l 814.5 844.5 406 578 8 3 450 11-LEFS40ll-450l 864.5 894.5 456 628 8 3 450 11-LEFS40ll-500l 914.5 944.5 506 678

PFxx-OMP0001CN

CERoHS Rc1/2NPT1/2G1/2 Rc3/4NPT3/4G3/4 ADCPPSSUS304HNBR 100 g 155 g +35 g +25 g +30 g -63No.PF-OMP0001CN-F 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10 (ZS-33-D) AWG26 1.00 mm +0.10 3.5 -0.25 -64No.PF-OMP0001CN-F A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7501 5 L/min 500 L/min PFMB7102 10 L/min 1000 L/min PFMB7202 20 L/min 2000 L/min PFMB7501(500L

Low Maintenance Filter Series FN1

Filtration Note) Only 5m of filtration is available. 005 020 5m (Cylindrical type, Step type) 20m (Cylindrical type) Element length 1 250mm 2 500mm Element material S Stainless steel SUS304 Seal material Port size N NBR V FPM 10 Rc 1 Specifications Filter FN1101 FN1 FN1102 FN1112 Model Element dimension Fluid Operating pressure 65 x 250l Cleaning solvent, Coolant MAX. 1.0MPa MAX. 80C 65 x 500l

Bacteria Removal Filter

Specifications Port size Rc1/4, NPT1/4, G1/4, Rc3/8, NPT3/8, G3/8 Fluid Air, Nitrogen, Carbon dioxide gas(gas) Rated flow 500L/min (ANR)*1 Nominal filtration rating*2 0.01m (99.99%)*5 Operating pressure range*3 -100kPa to 1.0MPa (For nitrogen, Carbon dioxide gas: 0.99MPa) Operating temperature 5 to 45oC Initial pressure drop 0.03MPa(Inlet pressure 0.7MPa, at max. flow rate) Element proof

LEY-OM007

. -45- 6 /250km /500 1. 2. 3. 2 LEY16*A 2,000km LEY25*A 2,500km LEY32A 4,000km LEY16*B 1,000km LEY25*B 1,200km LEY32B 2,000km LEY16*C 500km LEY25*C 600km LEY32C 1,000km a. b. c. d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

AMP

1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) Viewing the graph: When using AMP320 at a flow rate of 500l

Exhaust Cleaner for Clean Rooms AMP Series

from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l

AMPSeries

from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Model L A B n D E F LEFS25lll-50l 210.5 56 160 4 20 LEFS25lll-100l 260.5 106 210 4 LEFS25lll-150l 310.5 156 260 4 LEFS25lll-200l 360.5 206 310 6 2 240 LEFS25lll-250l 410.5 256 360 6 2 240 LEFS25lll-300l 460.5 306 410 8 3 360 LEFS25lll-350l 510.5 356 460 8 3 360 LEFS25lll-400l 560.5 406 510 8 3 360 LEFS25lll-450l 610.5 456 560 10 4 480 LEFS25lll-500l 660.5 506 610 10 4 480 LEFS25lll-

JXCx-OMU0004

300 12 300 7 300 2 36 400 18 400 9 400 3 48 500 24 500 12 500 4 60 600 30 600 15 600 5 72 700 36 700 18 700 6 84 800 42 800 21 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY32A

VCA

Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

ITV

Count Pressure characteristics Flow rate characteristics Set pressure: 20kPa Supply pressure: 100kPa Flow characteristics measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR) Maximum flow rate: 132l/min (ANR) (with upstream VAC. pressure at 39kPa) 10 Set point 20 0.5

Proposals for Energy Saving

Digital Flow Switch for Air Digital Flow Switch for Water Series PFA Series PFA Series PFW Series PFW New New 12000l 6000l 3000l Flow rate 40l 500l Photo Flow rate Photo 200l 100l 16l 50l Photo 4l Photo 10l Size (port size)) Size (port size) Maximum Flow Rate 3000, 6000, 12000l/min The addition of the high flow rate types supports energy saving measures.

Thermo-dryer

(0.5 MPa) 1.16 0.88 Outlet air set temperature Outlet air set temperature 68F (20C) 77F (25C) Check the coefficient. 3 Correction factor = 1.36 1.07 0.50 1.16 = 0.84 Correction factor = 1.11 1 0.67 0.88 = 0.65 Calculate the corrected air flow capacity. 4 Corrected air flow capacity = 10.6 scfm (300L/m) 0.84 = 12.6 scfm (355 L/min [ANR]) Corrected air flow capacity = 17.7 scfm (500L

48

LEL25MT-100l-l LEL25MT-200l-l LEL25MT-300l-l LEL25MT-400l-l LEL25MT-500l-l LEL25MT-600l-l LEL25MT-700l-l LEL25MT-800l-l LEL25MT-900l-l LEL25MT-1000l-l LEL25LT-100l-l LEL25LT-200l-l LEL25LT-300l-l LEL25LT-400l-l LEL25LT-500l-l LEL25LT-600l-l LEL25LT-700l-l LEL25LT-800l-l LEL25LT-900l-l LEL25LT-1000l-l With motor cover 272.5 372.5 472.5 572.5 672.5 772.5 872.5 972.5 1072.5 1172.5 292.5 392.5

15

In-line) 70 Lead 3: LEY25C 60 Lead 6: LEY25B LEF 50 Work load [kg] 40 LEJ LEL Lead 12: LEY25A 20 LEM 0 LEY 0 200 600 1000 1400 Speed [mm/s] LES LEY32l (Motor mounting position: Top/Parallel) LEY32D (Motor mounting position: In-line) LEPY LEPS 80 80 Lead 5: LEY32C Lead 10: LEY32B Lead 4: LEY32DC LER 60 60 Lead 8: LEY32DB Work load [kg] Work load [kg] LEH 40 40 Lead 16: LEY32DA Lead 20: LEY32A