REA/REB

NB NB T N K W N S + Stroke F NA F R ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80

Digital Flow Switch (Remote type monitor unit)

mA Max. applied voltage 30 VDC (NPN output) Internal voltage drop NPN output: 1 V or less (at 80 mA) PNP output: 1.5 V or less (at 80 mA) Switch output Response time 1 s or less Repeatability 5 1%F.S. max.

JXCx-OMT0023

80 0 0 1 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 -500 2000 60 70 1000 1 Position 5 1000 2000 80 80 0 0 control 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 Position command creation USB I/F CN1 CN3 D I/O con trol Personal Servo-on Start Failure, etc. computer USB Note 1.

XMA/XYA Series

Specifications Model Note 1 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Normally closed (Pressurize to open , spring seal) Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

SYJ3000/5000/7000

Model SYJ3000 SYJ5000 SYJ7000 Thread size Tightening torque 0.12 Nm 0.45 Nm 0.8 Nm M1.7 M2.5 M3 1-5-79 80 Series SYJ3000/5000/7000 Specific Product Precautions 7 Be sure to read before handling. Replacement of Pilot Valve Interface Regulator Caution Note 1) Set the pressure within the operating pressure range of the solenoid valve.

VFS

Besides, as lubricant for compressors, Faircoal A-80 (Nippon Mitsubishi Oil Corp.), Dafney CS55, CS49 (Idemitsu Kosan Co., Ltd), etc. are commercially available on the market. 2. When the foreign matters from air source adhere to the spool and sleeve, disassemble the adapter plate section and end plate section (return spring insert section).

CJ2X/CUX/CQSX/CQ2X/CM2X

Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

VQC

P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Multistage Ejector Series ZL112/212 1

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

Rotary Table/

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125, 150 20 to 63 Theoretical Output OUT IN 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125 80, 100 Unit: N Manufacture of Intermediate Stroke Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 Dealing with the stroke by the 1 mm interval by using an exclusive

155

operating pressure 1 MPa Flange: JIS 10KFF 25 to 15 D (1B to 6B) Max. 80 Features Large flow suspended type (MAX. 3800 l/min) FGC Industrial Filter (Vessel type) Temperature (C) Port size Series Maximum operating pressure 1, 2, 4 MPa Flange: JIS 10KFF 25 to 15 D (1B to 6B) FGC Max. 80 Features High pressure and low flow rate type (MAX. 80 l/min) FGF Bag Filter Temperature (C) Port size

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ4 Power source connector: Series 723 (made by Franz Binder GmbH) 5 pins (72309-0115-80-05) Cable side connector example: Franz Binder GmbH 72309-0114-70-15, etc. VQ5 Din type 5 pins.

5 Port Solenoid Valve

N.O. 5 (R1) 3 (R2) Main valve 1 (P) Slim Compact Plug-in Manifold Bar Base Height Slim compact plug-in manifold Plug-in manifold stacking base Reduced by 20 mm (Compared with plug-in manifold stacking base) 60 40 80 72 85.7 116.5 (mm) Footprint Reduced by 45% (4-station manifold) 2Types of Manifold Pitch Are Selectable.

LEC-OM07605CN

(L) W E L d 11 25 11. 11.9 (1) ACPWM 30cm 10 {Ig1 + Ign + Iga + K (Ig2 + Igm)} [mA] (11.1) K NV M NV-SP NV-SW NV-CP NV-CW NV-HW 1 Ig1 Iga Ig2 Igm Ign BV-C1 NFB 3 NV-L Ig1: (11.5) Ig2: (11.5) Ign: (FR-BIF14.4mA) Iga: (11.3) Igm: (11.2) 120 10 0 [mA] 80 60 40 20 0 2 5.5 14 38 100 3.5 8 22 60 15 0 80 30 [mm] 11.7 CV1km(lg1lg2) 11 26 11. 11.2 (Igm) [W] [mA] 50750 0.1 11.3 (Iga

ZQ-OM01301

25 -80 Vacuum pressure [kPa] Vacuum pressure [kPa] 20 -60 -60 15 Air consumption -40 -40 10 Suction flow rate -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 Supply pressure[MPa] Suction flow rate [L/min (AMR) ] ZQ07A Exhaust Characteristics Flow Rate Characteristics Supply pressure0.43MPa -100 40 -100 35 Air consumption [L/min (AMR) ] -80 Vacuum pressure [kPa] -80 Suction flow rate [L/min

IDX-OM-X011

IDF60/70/80/90 Series 9.1 Safety instructions for use 9-1 IDX-OM-X011 Chapter 9 Option M 9.2 Specifications Motor type auto drain (ADM200) is installed instead of the float type auto drain (standard). Table 1.

Sine Rodless Cylinder Series REA/REB

Fn (N) Recommended driving force Fn (N) Recommended driving force Fn (N) 500 100 300 20 30 40 50 200 Usable range 100 Usable range 10 REA 50 40 30 5 REB 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 REC 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY Distance from cylinder shaft center Lo (cm) 63 CX REA63 100 80

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25