VBA-OM-S007

4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Rc1/4 477 429.8 527 479.8 481 531 206 674 520 256 824 570 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 2010 SMC Corporation All Rights Reserve IN (I) URL http://www.smcworld.com VBAT20S1 VBA40A VBA42A VBAT38S1 VBA40A VBA42A VBA20A VBA22A VBA20A VBA22A VBA4 VBA2 2 () OUT OUT OUT IN OUT IN :VBA2 8VBA4 8 10 O : IN VBA2 22~24Nm(R3

VBA-OM-P018

VBAT-M35C () () 1 1 1 1 SMC ( 3 ) VBA2 VBA1 () 30 IN 1.5MPa VBA1A 2MPa, O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT 4 11 () 1 VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3

VBA-OM-S006

Chiyoda-ku, Tokyo 101-0021 JAPAN 417 367 VBA11A 391 328 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 180 460 454 2010 SMC Corporation All Rights Reserve Rc1/4 URL http://www.smcworld.com Rc3/8 VBAT05S1 VBA10A VBAT10S1 VBA20A VBA22A VBA10A VBAT10S1-VBA2 IN OUT VBA2 VBAT05S1VBAT10S1VBA2 OUT VBA1 2 () VBA1 IN OUT OUT OUT VBA1 OUT IN IN :VBA1 4VBA2 8 O : VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3

Thermo-dryer

Given an ambient temperature at 86F (30C) and a relative humidity 60%. 1. Trace the arrow mark from the point A at an ambient temperature 86F (30C) to obtain the intersection B on the curved line for the relative humidity 60%. 2. Trace the arrow mark from the intersection B to obtain the intersection D on the pressure characteristic line for 102psi (0.7 MPa). 3.

Exhaust Cleaner for Vacuum Pump AMV Series

/8 AMV15, AMV37: R1/2 AMV75, AMV160: R3/4 Replacement Parts AMV3 AMV6 AMV15 AMV75 1 AMV37 AMV160 2 No Description Material Part no.

S Couplers Series KKH

Male thread type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7 25.4 1/4 KKH4S-03MS R3

VCHN

How to Order VCHN 06 3 Option Port size Nil None Symbol VCHN4 VCHN3 Port size F With freeze reduction 06 10 12 14 R3/4 Symbol R1 Body size R11/4 3 4 R11/2 608 5.0 MPa Silencer Series VCHN Specifications Model VCHNF4 VCHN4 VCHNF3 VCHN3 Fluid Air, Insert gas Max. operating pressure (MPa) 5.0 (Solenoid valve inlet pressure) Relief valve unlocking pressure (MPa) 1.8 R3/4 R1 R3/4 R1 R1 R11/4 R11

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

KQ2-G

connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3

Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

The intersection E is the dew point under pressure 0.7 MPa with the ambient temperature of 30C and the relative humidity of 60%. Value for E is at 62C. 5. Trace the intersection E upward, and C leftward to obtain the intersection D. 6. The intersection C is the amount of water included in the compressed air 1 m3 at 0.7 MPa with the pressure dew point of 62C.

IDX-OM-Z004

/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4 R3/4 IDF100F150F-W 6 5 IDX-OM-Z004 6 6.4 IDF100/125F/150F-30-W R R GFCI PE TB1 THR MC1 CM OLR MC1 HM PRR SWL PLC TB2 Y0 1 MC1 COM0 2 Y3 3 COM3 4 MC1 Y1 X4 5 () PRR () COM1 X0 6 THR X1 PRS2 PRS3 X3 L P P N 24V EDV PE CM OLR V V MC1 THR TB1,2 SWL PRR PRS1 PRS2 PRS3 PLC HM GFCI EDV IDF100F150F-W 6 6 IDX-OM-Z004

Information

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) Number of needle rotations 10 turns

Stainless Steel 316

(mm) Model R3/8 4 6 8 10 12 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union Y Union Y Applicable tubing O.D. (mm) Model Applicable tubing O.D.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

HAW

(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 45 48.5 52 45 41 43 45.5 34.5 35.5 36 39 40 42.5 15000 18000 20 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. 16

KB

L2 A L1 D Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 17.8 28.5 33.8 57.1 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 28.0 33.5 38.5 39.0 14 17 19 24 13.6 17.6 25.2 27.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 Kl Ml Hl Dl MS Tl 2.1-78 Series KB 3 Other Piping Material Nipple: KBN Weight (g) Part No.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3