)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Lateral Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Vertical Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Vertical Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb

)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

VNB Series

Assemble so that the O-ring of the plate is not caught during maintenance. 12 13 Check for signs of external force having been applied to the pilot valve. External force was applied to the pilot valve. Do not apply external force to the pilot valve. 14 SMC will investigate. The following information is required for investigation, so please send it to your sales representatives.

KFx-OMV0011

Applicable Fluid List 12-13 2 - KFG2 Series Stainless Steel 316 Insert Fitting Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

03-mk-e

2 13 !4 @2 @3 @4 Hexagon socket head set screw Chromium molybdenum steel Sharp end section: 90 Set of left nos. @2, @3, @4 CQSB16-PS Guide pin Stainless steel Nitriding MK20Z-PS O-ring NBR MK25Z-PS Round R-type retaining ring Carbon tool steel Except 12, 16 MK32Z-PS Set of left nos. !

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

ZS-32-A Length: 2 m (With rubber cover) Note Lead wire with connector Mist separator regulator AWM20/AWM30/AWM40 For ISE35--A (AR/AW series) Mounting thread (M3 x 7L, 2 pcs.), adapter, lock pin, O-ring are attached ZS-32-C Mounting option Micro mist separator regulator AWD20/AWD30/AWD40 For ISE35--B (ARM10/11 series) Mounting thread (M3 x 13, 2 pcs.), adapter, lock pin, O-ring are attached

Ionizer Nozzle type IZN10 Series IZS

When using piping materials prepared by the customer, secure a sectional area of a 4 mm inside diameter (approx. 13 mm3 or more) for the air passage of the piping, and if using tubing, ensure a minimum bending radius.

Series AP500

Vespel is a registered trademark of DuPont. 13 Delivery of sub-atmospheric pressure Single Stage Regulator for Ultra High Purity Series AP1100 For UHP gas delivery Sub-atmospheric to low positive pressure delivery Flow capacity : to 0.5 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AP11 S FV4 FV4 01 2PW

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DXT083-13-1 Qty. 1 pc. Hexagon socket head screw DXT083-19-1 2 pcs.

Compact and

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

Color Symbol Symbol Color Black White Red Color Blue Yellow Green BU Y G B W R 15-6-13 Series TRBU Installation on One-touch Fittings Caution Lengths of tubes to be inserted into One-touch fittings are indicated on the outer layer of TRBU tubes.

S

Model End Plate Mounted Housing Mounted NCX2H15 * 0.2 ~ 2in/sec NCX2H25 0.2 ~ 1.6in/sec 0.2 ~ 4in/sec Deflection x 10-3 inch Stroke (Inch) Stroke Inch Model Load (lb) Model Load (lb) 2 4 6 8 4 8 NCX2N10 2 2.8 NCX2N10 0.5 2.4 11.8 NCX2N15 6 3.2 11 NCX2N15 1 3.5 8.7 14.7 39.4 NCX2N25 13 0.8 3.2 H O W T O O R D E R NCX2 S E R I E S S L I D E U N I T NCX2N25 2 12 3.5 6.3 9.8 Note) Values are

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.