PF2D Deionized Water and Chemicals Series PF2D How to Order PF2D5 13 20 1 Remote type Sensor unit Output specifications Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19 Port size (inch) 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min Note 1) Output for the display units of PF2D 300/301 04
Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part
Ll 3.66 (93) 4.96 n26) (tss) (1e2) 8.86 (225) t0.t6 (258) 11.46 (2er ) 12.76 (324) 14.06 (357) < ):3 position n:with indicator light and surge voltage suppreseor L, 315 (80) 4.45 (fl3) 7.O5 (17e) 8.35 (a2) 9.O5 (245) r0.94 (2781 12.24 (3t1) 13.54 (344) Series VFSOOO Series NVFSOO Sub-Base Mounted/Dimensions inch(mm) NVF5144 Grcmmet/NVF5144-OG clommt Terminal/ilvF5l/t4-OE ( ):NVF5i44-OG-04
HOI|T Matorial M5 x0.8 Plunqer VM.OsD vM-05c Roller Plunoer In Line Acetal VM.06D vM-06c Roller Plunger In Line Steel VM.O6DS VM.O6CS Tooqle Lever vM-080 VM.O8C Push Button-MushroomvM-30c vM-:J{r(; Push Button-Extended' vM-32C vM-32C Push Butlon-Flush. vM-33C Selector, 90" Turn' vM-34C vM-34C Selector Kev Lock vM-36C vM-36C (black, red, lo-*rl, 31@4.5mm _\ F O F ' 3.s3lbs. (1 6 Kq) P,T. 0 04
When reusing the tubing, cut off the previously installed portion of the tubing to avoid possible leakage and/or disconnection of the tubing. 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 2 Barb fitting: M-3AU-2, M-5AU-2 Series M Applicable tubing O.D. x I.D.
Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.
Note 2) Fixed unit For vacuum/compound pressure: kPa For positive pressure: MPa One-touch fitting type One-touch fitting None Applicable tubing material Applicable tubing size Symbol None None Nil Nylon Soft nylon Polyurethane 04 4 (mm size) KJH04-M5 06 6 (mm size) KJH06-M5 Specifications Model PPA100 for high press.
Output mode Hysteresis mode, Window comparator mode, Error output, Output OFF Switch operation Normal output, Reversed output Max. load current 80 mA Switch output (SIO mode) Max. applied voltage (NPN only) 30 VDC Internal voltage drop (Residual voltage) 1.5 V or less (at load current of 80 mA) Delay time3 5 ms or less, variable from 0 to 60 s/0.01 s increments Hysteresis Variable from 04
5 . 2 ( 1 5 . 5 ) 5 . 4 ( 2 9 . 9 t e k c a r B P 4 2 B P 5 2 B e g u a G 5 2 O R A N . d t S ) g i s p 0 6 1 ~ 0 ( n o i t p O K50A-MP1.0-N02M K50A-MP2.0-N02M 5 3 O R A N . d t S ) g i s p 0 3 ~ 0 ( How To Order N R NAR 4 25 02 B Body size Option 4 1/2 6 1 8 11/2 9 2 Nil None R IN-OUT Reversal (RightLeft) Pressure regulating range 25 7~120 psig 35 3~30 psig Pipe size (NPT) 02 1/4 04
Compact and lightweight design The square covers are made of an aluminum die-casting and provide a lower cost, lighterweight product. 6-15-2 6-15-3 3 NFPA Interchangeable Cylinder: Standard Type Double Acting, Single Rod (Medium Duty) Series NCA1 Inch size: 1.5", 2", 2.5", 3.25", 4" How to Order NC D A1 B 150 04 00 A54 XB5 Option Built-in magnet Oversized rod High temperature Low temperature
Cushion seal is not included for XB6, XB5B6, XB7, and XB5B7 over 5" bore Piston gasket NBR 1 10 2 Cushion valve seal 2 Grease pack 1 Loctite 243 Magnet (1) 11 Piston seal NBR 1 12 Wear ring Resin 1 13 Nickel plating Jam nut Rolled steel 1 14 Anodized Gland Aluminum alloy 1 15 Bushing Composite 1 16 Hard anodized Cylinder tube Aluminum alloy 1 17 Nickel plated Tie rod nut Rolled steel 8 18 04
Improved durability under a high pressure environment with a polyurethane elastomer poppet How to Order Valve type 1 D G VCH410 06 Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) Voltage 1 2 3 4 5 6 100 VAC 200 VAC Port size 110 VAC 04 06 10 1/2 1 220 VAC 3 3/4 24 VDC 1 1 2 12 VDC Consult with SMC for other voltages.
I M E N S I O N S NZM VA C U U M E J E C T O R M A N I F O L D 1 10 Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04
Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.
(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 N S NBR Silicon rubber 13 13 ZM 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 50 50 20 or large are manufactured upon receipt
(Up to 22 solenoids possible) Specified layout Note 2) (Up to 21 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable connector (20 pins) PH: Flat ribbon cable connector (10 pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04
For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc. Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.
Indicator set Note) Adsorbent and adsorption tube filter for one air dryer (two adsorption tubes), set of O-rings How to Order ID400 ID 20 02 0 Semi-standard (option) ID200 Basic size Description Bracket Symbol Nil B Z 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04
How to Order KJ H M3 02 Model Male connector Straight union Different diameter straight Port size H M3 M5 00 23 04 M3 M5 Same diameter tubing 3.2 4 S L W Hexagon socket head male connector Male elbow Extended male elbow Male branch tee Union tee Male run tee Union "Y" Different diameter union "Y" Plug-in reducer Bulkhead union Note 1) Note 1) Note 1) Different diameter tubing O.D.
Moisture control tube effective length Symbol 02 04 06 O.D. 2 mm 4 mm 6 mm Effective length 100 mm 200 mm Symbol 100 200 Dimensions Unit: mm Model Full length L Nominal effective length X L O.D. x I.D.