XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

ZP

Size 10, 13, 16 Size 40, 50 Flat Deep: ZPY40D only Flat Deep: ZPY10D/16D only Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 8 Hexagon width across flats 8 Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width

ZP

P Hexagon width across flats 8 Hexagon width across flats 7 ZU Flat with ribs Elliptic ZL e ZY c a Deep: ZPR10D, 16D only ZQ d b ZF Hexagon width across flats 10 ZP Flat ZCU H: M4 x 0.7 H: M5 x 0.8 Model A B C Y 1.2 D D Applicable tubing O.D.

ZP

Size Size 40, 50 10, 13, 16 Flat Deep: ZPT10D/16D only Flat Deep: ZPT40D only Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 8 Hexagon width across flats 8 Hexagon width across flats 8 Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 8 Flat with ribs Flat with ribs Flat/Flat with Ribs Flat

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2