CYP

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1999 D-SMC.L.A. P-80 (D)

FQ1

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) All specifications in this catalog are subject to change without notice. This catalog is printed on recycled paper with concern for the global environment.

SRP

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

VP3145/3165/3185

vacuum/low pressure T VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03

VP4

Conduit terminal DIN terminal VQ7 Conduit terminal with indicator light DL DIN terminal with indicator light Piping Option EVS 0 Bottom ported 1 Side ported Port size Rated voltage VFN 4 Without sub-plate Applicable valve model Port size 1 100 VAC, 50/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: Rc, Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: Rc, Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 03 (3/8)

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 03 (3/8)

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Regulator AR30 to 60

Regulator AR30 to 60 Related Equipment How to Order AR 30 BE F 1N 03 Optional specifications Regulator Contents 0.02 to 0.2MPa setting Non-relieving Flow direction: Right to left Symbol 1 N R Z Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 60 Note 1) Body size 30 40 50 60 1 3 8 1 2 3 4 Display units for product name plate and pressure gauge: PSI, F.

Modular Type Lubricator Series AL

Modular Type Lubricator Series AL Lubricator Series AL Model Accessory Port size AL10 M5 x 0.8 1/8, 1/4 AL20 1/4, 3/8 AL30 AL40 1/4, 3/8, 1/2 Bracket AL40-06 3/4 AL50 3/4, 1 AL60 Pages 50 through 54 1 49 Lubricator AL10 to 60 How to Order AL 2R 30 03 B F Optional specifications Lubricator Symbol 1 10 11 2 3 6 8 C R 3W Z Description 1000cm3 tank 1000cm3 tank with level switch (lowest limit

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Filter Regulator AW30, 40

Filter Regulator AW30, 40 Related Equipment How to Order Integration of a filter and regulator allows simple wiring. 03 BE 30 1N AW F Optional specifications Filter regulator Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(Example) NVV3J1-S41-03-M5 NVJ114-5M2.. . 2 VJ100-19-1A .. . 1 a lt is impossibie to mount NVJ | 14O and NVJ124O together on the same manitold base. . In cas of NVJ124O manifold type, supply air to "R" port of manifold base, "P" port of maniiold base will be lhe exhaust Dort.

Process Pump <Fluororesin Type> Series PA3000

Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.