Series SV

+ BS 24V 0V BDH BDL BS+ BS 24V 0V BDH BDL CANH V+ 24V 0V V CANL CANH FG V+ Slave unit 75 Slave unit 03 Slave unit 01 Master unit With terminal resistor connector S2 S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

5-Port Solenoid Valve

With Residual Pressure Release Valve Pilot, Silencer/Piping type Symbol Pilot type Built-in silencer Piping direction Internal External Nil V Side S V V R V V V Top RV V VP V V*1 B V Bottom BS V V BR V Vacuum Release Valve with Restrictor BSUP/EXH end block assembly (Includes a) A-e aTension bolt ( ) Tightening torque: 0.8 Nm SY3000: 2 pcs.

Electric Actuator with Integrated Guide

JOG JOG operation mode HOLD /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear. ALM Alarm reset mode Key Functions Moves upward for item selections. Also used to increase values for data entry. In combination with L/R keys, this key drives the actuator at high speed during a JOG operation.

OMU0023

(a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

15

BS Bumper bolt (resin tipped): Plate B side or C side Shock absorber Applicable Auto Switches/Refer to pages 1575 to 1701 for further information on auto switches.

Modular F.R.L. Units

EXH Flow Rate Characteristics Model Port size Flow rate characteristics Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH

Compact Rotary Actuator

Then, piston A moves right , and the magnet goes into switch Bs operation range to turn on switch B. 7Cushions a) Rotary actuator is not adjusted so that the cushions work during shipment. Adjust the cushion valve attached to the cover depending on rotation time and load inertia moment.See Fig 15 b)Rotating the cushion valve reduces the orifice diameter and increases cushion effect.

Low-Speed Rotary Actuator

Then, piston A moves right, and the magnet goes into switch Bs operation range to turn on switch B. Mounting of auto switch When tightening the auto switch mounting screw, use a precision screwdriver with a handle of 5 to 6 mm in diameter. Table 8 shows the recommended tightening torque. Use the designated slotted set screw (M2.54L) to mount the auto switch. Table 8.

Table of Contents

(This is not applicable to VHS40 and VHS50) Body size Applicable model AC20 AC25/30 AC40 AC50, AC60 Note) Symbol 20 30 40 50 Effective area (mm2) 5 5 Model VHS20 VHS30 Note) When the valve is mounted on AC60, the flow rate may decrease depending upon the mounting position.

Magnetically Coupled Rodless Cylinder

2 t r @2 @1 #3 #4 #1 @9 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 No.

Secondary Batteries

Nil S n 90 91 Material restriction With lub-retainer Port thread type Auto switch Nil Without auto switch (Built-in magnet) 16 M thread Rc NPT G Nii *For the applicable auto switch models, refer to the table below. 20, 25 TN TF Adjuster option Symmetric type Nil AS AT A BS Without adjuster Adjuster on extension end Adjuster on retraction end Adjuster on both ends Absorber on extension end

Compact

$Ic" ComRatt Ehutnh Afluilons $enies D( Acl[Nl0F P|'0silli0||$ Bs $m to mil lolom haltdliltl l \ l\ uanger ACaution 1. Do not operate until conlirming whether equipment can function properly. ACaution 1.A protective cover should be used for installations which could present danger to the operator.

Title not found

+$rt Bs[ bushing beadngs and slide bearings are standard for all series Dftnen6ions lor bsll bushing beaing snd sllde batlng6 ana lho sam6. A Adjustable str0ke mnge: 0 to -Smrn reduction: Reduction of more than 6dB is possible.

•

:N6 (Nylon tuBe. f>6 / 4) 16.5 7 2.5 U4 (Urethane tube, 94/ 2.5 ) 14.5 5 1.8 ':06 Urethane tu bS. ~/4) ~. " 16.5 7 2.5 35 Vacuum Pad/Components Vacuum Pad/Components Assembly Configuration Series ZPT Series ZPR Series ZPY ~ .. , ,. O Buffer O BLJffer .~! 4 ~ @Adaptor_ ~ , QLock nng eLO'~""L..~ .Pad --~~ ~Pad ~ , Main Parts No1 Parts Material Note 0 Pad NBR Silicon rubber.

Slide Unit Series CX2/CXWM/CXWL

(-XB11) BS With shock absorber (1 pc.) Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches. Load voltage Auto switch part no. Electrical entry Housing mounting Plate mounting Applicable cylinder size Lead wire length (m) Indicator light Applicable Auto Switch/Refer to page pages 1719 to 1827 for further information on auto switches.

Slide Unit Series CX2/CXWM/CXWL

(-XB11) BS With shock absorber (1 pc.) Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches. Load voltage Auto switch part no. Electrical entry Housing mounting Plate mounting Applicable cylinder size Lead wire length (m) Indicator light Applicable Auto Switch/Refer to page pages 1719 to 1827 for further information on auto switches.

Table of Contents

JOG JOG operation mode HOLD Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear.

Electric Actuators

JOG JOG operation mode HOLD /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear. ALM Alarm reset mode For the operation of each mode, refer to the product's instruction manual. Key Functions Moves upward for item selections. Also used to increase values for data entry.

Table of Contents

BS With shock absorber (1 pc. on port side) The adjusting bolt is installed even when B or BS is selected. (Except 10) Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.