MNB

19.5 4 Up to 500 14 1/8 30 97 46 32.5 83 8.5 13 45.5 22 17 10 12 13 12 -X 40 14 8 14 27 4 Up to 500 14 63 1/8 35 104 52 38 91 10 16.5 52.5 30 22 10 16 13 12 50 15.5 11 18 32 5 Up to 600 20 75 1/4 40 120.5 65 46.5 104.5 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 32 18 9 Up to 600 90 1/4 20 45 134.5 75 56.5 119.5 17.5 23 68 35 27 14 20 14 12 80 19 13 37 22 11.5 Up to 750 102 1/4 30 45 169

MNB

19.5 4 Up to 500 14 1/8 30 97 32.5 83 46 8.5 13 45.5 22 17 10 12 13 12 -X 40 14 8 14 27 4 Up to 500 14 63 1/8 35 104 38 91 52 10 16.5 52.5 30 22 10 16 13 12 50 15.5 11 18 32 5 Up to 600 75 1/4 20 40 120.5 46.5 104.5 65 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 18 32 9 Up to 600 90 1/4 20 45 134.5 56.5 119.5 75 17.5 23 68 35 27 14 20 14 12 80 19 13 22 37 11.5 Up to 750 30 102 1/4 45 169

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

Pad diameter (mm) 10 10 Vacuum entry port (Refer to Table (1) for applications.)

CXWM/CXWL

Note 1) Only type E (Reed switch) is applicable as an auto switch when mounting a housing of 10.

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

Slider Type/Ball Bushing Bearing

6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

RSQ

For detailed specifications, refer to page 10-20-1.

reduces flow setting time

0.3 Note 1) 10-32UNF has the same specification as M5.

ZX

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch unit E C ZX1 1 10 Ejector unit Filter unit F ZX1 1 10 Ejector unit PV/V port size Ejector unit nozzle dia.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 8, 10 Metric size 6, 8, 10 3.2, 4 4 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8" 5/32" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 230 180 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 3.5 2.7 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

Prevents Micro-Bubbles

8, 3/16, 1/4 LVC3 8 6, 8, 10 1/4, 3/8 LVC4 10 10, 12 3/8, 1/2 LVC5 16 12, 19 1/2, 3/4 LVC6 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

Fieldbus System

(For M12: 0.07 lbfft (0.1 Nm) 14 EX9 AW TS 14 Connector type M12 x 1 10.2 TS For M12 connector socket (10 pcs.)

EXxx-OMZ0016

Note that frequencies 2446-2468 [MHz] correspond to (1) W-LAN Channel: CH.10 above.

Pilot Operated

COM. 2 to 10 10 to 25 1.5 to 4 N.C./N.O. 1/8 to 1/2 N.C.

AZ1000

H 2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

44

25.9 26.0 27.5 27.9 28 29.5 10 15 10 15 15 19 20 25 28 39 42 52 48 51 61 1/8" (3.18) 0.086" (2.18) Applicable tubing 1.1 10 8 13.5 5 1.5 L1 M KDM 0.098" (2.5) 5/32" (4) H1 1.6 10 8 13.5 5 1.8 d KB 1/4" (6.35) 5/32" (3.95) 6 10 3.3 12 15.2 6 A L2 12 KR H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 Connection thread 16 KA 13 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 18 30 KQG2 1/2" (12.7) 3/