Slide Tables MX Series

OUT port (on both sides) OUT OUT port IN Table 1 (mm) d 5 5 10 15 L 21 25 35 47 Bore size (mm) MXH6 MXH10 MXH16 MXH20 IN port IN port (on both sides) d L Operating Precautions Stroke Direction Backlash Caution Caution Since the connection between the piston rod and table is a floating structure, there is a maximum table backlash of 0.15mm in the stroke direction.

Process Pump <Fluororesin Type> Series PA3000

0.3 150 0.4MPa 10 0.4MPa 0.3MPa SUP = 0.5MPa 0.3MPa 0.2 100 0.2MPa 0.3MPa 0.2MPa 5 50 0.1 0.2MPa 00 50 100 150 00 5 10 00 5 10 Air consumption (l/min [ANR]) Flow rate (l/min) Operating cycle (Hz) PAP3313-T13: Flow rate characteristics (2.5Hz)* PAP3313-T13: Flow rate characteristics (5Hz)* PAP3310-T13: Flow rate characteristics 0.4 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa)

LZ-OM004xx

F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.

AHC System Series MA

24.5 31 20.8 6 16.8 Bottom hole dia. 2.6 through 4 x M3 x 0.5 depth 5 Not possible to use a through-hole when using an auto switch.

Directional Control Driver for Electric Cylinder

A3 A5 DC motor (cylinder size 3) DC motor (cylinder size 5) Option Cable for power supply terminal LC3F2 1 C1 02 1 CN1 Power Supply Terminal Table 2 3 1 Optional cable color Terminal Function Pin number Cable type Cable length 01 02 1 m 2 m Yellow/Green FG Frame ground 1 Cable for CN1 power supply terminal C1 Cable length 60 5 60 5 2 Brown DC (+) Driver power supply (+24 V) Cable for

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

x , ) 12 38 4 x 9 mounting hole ( ) 34 (11) 5 x , 12 38 ( , 1) 34 ( ): Value for Rc 1 VPA4250--, VPA4350--, VPA4450-18 8 x pilot port 220 (For 3 position) 96 (For 3 position) 88 (For 3 position) 1780 Series VPA470 5 Port Air Operated Valve Dimensions VPA4170Bottom ported 12 14 3 x pilot port 14 (5 x 1 , 1 ) 1 2 14 4 x 13 mounting hole 5 x 1 , 1 12 14 VPA427012 14 SYA SYJA VZA 6 x pilot port

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

1

to 60 Rated voltage *5 100/110/200/220/230/240/24/48 VAC 12/24 VDC Power consumption W *6 DC 4.5 7 10.5 Apparent power VA *6 AC 7 9.5 12 Coil temperature rise C *7 DC 50 55 65 AC 60 70 70 Allowable voltage fluctuation 10% or less of the rated voltage Allowable leakage voltage DC 2% or less of the rated voltage AC 5% or less of the rated voltage Coil insulation type Class B Weight kg *8 Face

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Filtration degree should be 5 m or less. ( ): VHS500 1943 1944

RQ

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 7-7-5 5 Series RQ Weight Basic Weight Additional Weight (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196 50 14 6 53 32 243 373 348 393

EX250-SCA1A_eng

Solenoid on side B 1 3 5 7 9 17 29 31 5 FE Ground Bit No. 1 1 1 3 7 5 7 5 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2017 SMC Corporation All Rights Reserved. Example of connection cable: EX9-AC050-1 etc. Valve manihold EX-OMP0009-A

Fieldbus system IO-Link Master Unit

Green 5 (DevCom) 0x1800 flashing P24 power supply reduction Power supply reduction of class B type Pin No. 2-5 is diagnosed. OFF (P24) 0x180E 1: Under the mapping error, all of the process data input and output are zero. 2: When Device disconnected is detected at port, all of the process data input is zero.

Air cooled Thermo-con (Compact type)

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + + 1 1 1 2 2 2 9 9 9 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XL-OMY0002

) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5 () 510% O 0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16

MX-OMP0051

MXQ8(A,C) MXQ6B M30.5 0.9 5 MXQ12(A,C) MXQ8B M30.5 0.9 5 MXQ16(A) MXQ12B M40.7 2.1 6 MXQ20(A) MXQ16B M50.8 4.4 7 MXQ25(A) MXQ20B M61 7.4 9 2 (mm) (Nm) Max Min MXQ6(A) M30.5 1.1 4.1 2.1 MXQ8(A,C) MXQ6B M30.5 1.1 4.1 2.1 MXQ12(A,C) MXQ8B M0. 2.7 5.7 2.7 MXQ16(A) MXQ12B M0. 5.4 7.3 3.3 MXQ20(A) MXQ16B M50.8 5.4 7.3 3.3 MXQ25(A) MXQ20B M61 9.2 9 4 0.5mm , ,,, 8 3 0.02mm 2-2 5 [] 9 2-3 1.52

MHx-OMY0005

() 2. 5 3. 4. 5 10 2-5 1.

Ｖ cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L 8 Fig 6. Position for application of grease Table 7. Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 16 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig 6, ) Pay attention to the mounting direction of the seal.

Precision Regulator

Specifications 4~5 2. Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8. Assembly drawing 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.