MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket (Option) B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model Port size Rc 4 1 63 63 80 85 90 100 141 164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2

AMR3000 to 6000

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

ZMA

diameter C C CN Lead wire length 0.6 m Lead wire length 3 m No lead wire 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm ZL Refer to Table (2) for lead wire with 4-wire connecor.

NGIP seies

PSI (7kgf/cm,) 150 PSI (9.gkglicm,) 40 140"F (5 -60"C) Nose mount, Flange mount, Foot mount, Clevis mount, Trunnion mount Series NCJP BrackeklPartNo.

FEP Tubing (Fluoropolymer)

Min. bending radius (mm) 15 Note 3) 20 35 60 95 100 130 Air, Inert gas: -20 to 200C Water: 0 to 100C (No freezing) Operating temperature Material FEP (Fluorinated Ethylene Propylene Resin) Note 1) When using a fluid in liquid form, the surge pressure must not exceed the maximum operating pressure.

ZSE80/ISE80

For positive pressure 80 ISE 02 N M For vacuum/ compound pressure M 80 ZSE 02 N Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English

Industrial Filter FGD Series

Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website (http://www.smcworld.com). 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 Made to Order 20 40 60 80 100 0 90 LQ1 series fluoropolymer fittings mounting type is also available. Refer to page 392. Fluid temperature [C] 382 A

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

10 to 50 Fluid temperature (C) 1 to 50 (No freezing) Location without corrosive or explosive gases Environment Valve leakage (cm3/min) 0 (with water pressure) 1 or less (Air) Unrestricted Mounting orientation Vibration/Impact (m/s2) Note 4) 30/150 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC, 100 VAC, 110 VAC, 200 VAC, 220 VAC (50/60 Hz) Rated voltage 10% of rated voltage Allowable voltage fluctuation

AD402/600

0: 201016 14-20-49 5.27 AIR PREPARATION AUTO DRAINS AUTO DRAIN SERIES (N)AD Port Sizes 14~1 Float Type Automatic Drain Valve T E C H N I C A L SPECIFICATIONS Type (N)AD402 (N)AD600 Operating Pressure 1.5~9.9 Bar 3~9.9 Bar 22~145PSI 45~145PSI Max Supply Pressure 15 Bar / 220PSI Max Operating Pressure 9.9 Bar / 145PSI Ambient & Fluid Temperature 5 ~ 60C / 40~140F Port Size 1/2 3/4, 1 Drain

E-P HYREG ® Series VY1

Applicable wire Cord external diameter: 4 to 6.5 c.f. 0.5 mm2 3 core wire (JIS C 3306 equivalent) F.R.L.

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, Standard stroke range *: 5 to 100, Port threads: M *; Rc, NPT or G *, Auto switch capable, BASE CYLINDER, ACTUATOR, CQ2-Z COMPACT CYLINDER, LD

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, Standard stroke range *: 5 to 100, Port threads: M *; Rc, NPT or G *, Auto switch capable, CYLINDER, ACTUATOR, CQ2-Z COMPACT CYLINDER, MD, 40MM

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, Standard stroke range *: 5 to 100, Port threads: M *; Rc, NPT or G *, Auto switch capable, CYLINDER, ACTUATOR, CQ2-Z COMPACT CYLINDER, LD, 32MM

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, Standard stroke range *: 5 to 100, Port threads: M *; Rc, NPT or G *, Auto switch capable, BASE CYLINDER, ACTUATOR, CQ2-Z COMPACT CYLINDER, LD

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, Standard stroke range *: 5 to 100, Port threads: M *; Rc, NPT or G *, Auto switch capable, BASE CYLINDER, ACTUATOR, CQ2-Z COMPACT CYLINDER, LD

The VC enclosure is IP65 equivalent.Fluid: heated water (99°C or less), Max. operating pressure (MPa): 3.0, Effective area (Cv): 0.16 to 2.1, Coil rated voltage: 100, 110, 200, 220, 230VAC (50/60Hz), Ambient temp: -20° to 100°C, Fluid temp: 99°C or less, "VALVE, 2 PORT VALVE

The VC enclosure is IP65 equivalent.Fluid: heated water (99°C or less), Max. operating pressure (MPa): 3.0, Effective area (Cv): 0.16 to 2.1, Coil rated voltage: 100, 110, 200, 220, 230VAC (50/60Hz), Ambient temp: -20° to 100°C, Fluid temp: 99°C or less, "VALVE, 2 PORT VALVE