HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-R005

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-Q026

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

DOC1003626

load current AC/DC 800mA or less 1 etc. 2 Minimum load current DC5V 10mA Output voltage range 0V to +10V Circulating fluid Maximum output current 10mA discharge temperature Analog output signal 1,2 Circulating fluid Maximum accuracy 0.4%F.S. or less electric conductivity 3 DC24V output voltage DC24V10% 200mA MAX 1 (It can not be used for inductive load.) 1 The total load current must be 800

HRX-OM-W069

load current DC5V 10mA Output voltage range 0V to +10V CH1 Circulating fluid Maximum output current 10mA discharge temperature Analog output signal 1,2 CH2 Circulating fluid discharge temperature Maximum accuracy 1.0%F.S. or less CH2 Circulating fluid electric conductivity DC24V output voltage DC24V10% 200mA MAX 1 (It can not be used for inductive load.) 1 : The total load current must be 800

HRX-OM-Y120

to +10V CH1 Circulating fluid Maximum output current 10mA discharge temperature CH1 Circulating fluid Analog output signal 1,2 electric conductivity 3 CH2 Circulating fluid Maximum accuracy 1.0%F.S. or less discharge temperature CH2 Circulating fluid electric conductivity DC24V output voltage DC24V10% 200mA MAX 1 (It can not be used for inductive load.) 1 : The total load current must be 800

HEC_W-E

Table 3-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (S/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

A-HEC-OM-J004

Table 4-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (s/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

XLDV Series

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

RS2H-OM0045P

. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -1-1.(RS2H50) -1-2.(RS2H63 -1-3.

MHS

32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

. -3- 1Specification High performance Battery-less absolute encoder LESYH*(D,R,L)G* LESYH LESYH LESYH LESYH LESYH LESYH LESYH Model 8*GA 8*GB 8*GC 16*GA 16*GB 25*GA 25*GB Stroke[mm] 50,75 50,100 50,100,150 Max.work load[kg] 2 8 12 Horizontal Vertical 1.5 3 6 6 12 10 20 note1)note3) Pushing Force 18~36 37~74 69~138 70~140 135~270 197~395 382~765 note1)note3) 20~800 10~400 5~200 20800 10400

JXCx-OMT0005CN

(DC24V) DC24V10% 100mA A/B 800 / EEPROM LED PWR LED ALM MS NS 20m 040 90%RH ) 50MDC500V 210g() 230g(DIN ) DeviceNet DeviceNet CT-27 Volume1Common Insustrial Protocol(CIP) Edition3.14 Volume3DeviceNet Adaption of CIP Edition 1.13 063 / Data Rate 125/250/500 kbps / Group 2 Only Server EDS 4122036Byte 4 Byte 41020Byte 4 Byte ID 07hSMC Corporation 43h(Generic Device) DDh

SFOD-OMT0005CN

(DC24V) : DC24V10% 130mA () A/B (800 /) EEPROM LED L/A1 1 L/A2 2 LED PWR ALM MS NS 20m 0 oC40 oC() 90%RH () 50M(DC500V) 210g() 230g(DIN ) [EtherNet/IP ] EtherNet/IP TM(CT-12) 10/100Mbps() Ethernet (CAT5 100BASE-TX) /() EDS 36 /36 IP 192.168.1.1254 DHCP ID 7h(SMC Corporation) 2Bh(Generic Device) D1h -12- 3.2 1 LED 2 P1P2 EtherNet/IP 3 IP IP X1X10X100 EtherNet

LECA6_C

(DC24V) DC24V10 (1) 3A 10A 2 3 11 () 13 () A/B 800 //Z RS485 Modbus EEPROM LED LED/1 I/O 5m 20m 0~40 90%RH ) -10~60 35%85 ()-FG 50MDC500V 150g() 170g(DIN ) 1 2 3UL ,UL1310 Class2 11 - 3.2. () SV1.00 ASL8500099 ()"SV1.00" ON/ ()/ 1 PWR LED() (LED()) () 2 ALM LED() ON/ 3 CN5 I/O (26 ) I/O PLC (11 COM 13 COM ) 4 CN4 I/O (8 ) 5 CN3 (16 ) 6 CN2 (4 ) (DC24V) 7 CN1