DOC1013639

Within -0.2 mm -10- 6.

VFR2000 Series

(VFR2 00) (VFR2 10) Indicator light and surge suppressor Indicator light and surge suppressor surge suppressor Indicator light and Plug position B port A port Type of actuation N.C N.O Table 1.

Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

K 20 m roll 100 m reel Model TRB0604 TRB0806 TRB1075 TRB1209 M 6 8 10 12 Inner tubing O.D. (mm) Inner tubing I.D.

AW20-B to AW60-B

Note 2) Drain guide is NPT1/8 (applicable to the AW20(K)-B) and NPT1/4 (applicable to the AW30(K)-B to AW60(K)-B). The auto drain port comes with 3/8" One-touch fitting (applicable to the AW30(K)-B to AW60(K)-B). Note 3) Drain guide is G1/8 (applicable to the AW20(K)-B) and G1/4 (applicable to the AW30(K)-B to AW60(K)-B).

Digital Flow Switch (Remote type sensor unit)

C 10 100 PF2A521 D 20 200 PF2A551 E 50 500 Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range [L/min] Model Min.

High Vacuum L Type Valve

Step 6 Bolt b 3 Tightening torque of bolt b Nm 1 2 Valve Tightening 4 size torque Handle assembly XLH-16 0.7 -25 1.5 -40 2.5 -50 6 Tightening torque of bolt a Nm Bolt a Valve Tightening size torque Body All sizes 0.3 Cover Heater Tighten Bolt b in numerical order to assemble the Body and the Handle assembly with the valve opened a little in numerical order.

HEAVY DUTY STOPPER CYLINDER

B Sealant tape Expose approx. 1 thread Figure-3 3-3.

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

Process Pump

When pilot valve B is pushed, the air which was acting upon the switching valve is exhausted, and drive chamber B once again switches to a supply state. A continuous reciprocal motion is generated by this repetition. 1. When air enters drive chamber B, the fluid in pump chamber B is forced out, and at the same time Drive unit fluid is sucked into pump chamber A. 2.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Electric Slide Table / High Precision Type 《 AC servo motor 》

-V5 LECYU2-V5 V6 AC servo motor 100 16 L Left side parallel V7 200 25 LECYM2-V7 LECYU2-V7 (Absolute encoder) (6)Motor option (5)Storke [mm] (4)Lead [mm] Size Size Nil Without option 16 25 16 25 * B With lock 50 12 16 (20) 100 6 8 (10) 150 *The values shown in ( ) are the lead for size 25 parallel mounting types.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics (1) Response time (ms) (2) Weight (kg) (3) Max. operating cycle (CPM) Port size Rc VZ Model Type of

1

Special electrical entry direction Symbol Electrical entry direction 90 90 IN OUT A 180 180 IN OUT B 270 270 IN OUT C Replacement Parts Gasket Part No. for DIN Connector VCW20-1-29-1 (For Class B Coil) DIN Connector Part No. B Coil> Electrical option Rated voltage Connector part no. 24 VDC Lead Wire Assembly for Flat Terminal (Set of 2 pcs.)

SY3000/5000/7000 Series Plug-in Type

Applicable Fittings: Series KQ2H, KQ2S Series KJH, KJS 16 SY3000V-OMM0002-B Valve Construction 17 No.SY3000V-OMM0002-B 18 No.SY3000V-OMM0002-B 19 No.SY3000V-OMM0002-B TROUBLESHOOTING Should any trouble be found during operation, trace the source of the trouble in the following order and take corrective action.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

R 3/8 R 1/2 10-32 UNF NPT 1/8 0 1 Meter-out Meter-in Be sure to read before handling.

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

PSE100

ZSE6 ISE6 8 10 ZSE3 ISE3 l50 l45 l48 56 70 4.5 (MAX.8) 35.5 12.5 GS PS ISA 9 8 7 6 10 ZSE1 ISE1 17 10-M3 ZSE2 ISE2 11 23 6 38 50 ZSP 48 (54) ISl ZSM DIN rail L PFl 7.5 10 25 5 IFl 4.5 35 27 Material: Aluminum Part number of DIN rail Part number ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L 105 140 175 210 245 280 315 3.1-14

FREE MOUNT CYLINDER

Operating pressure Mpa Pressure receiving area(mm2) Operating direction 0. 3 0. 5 0. 7 (mm) (mm) OUT 28. 3 8.49 14.2 19.8 6 3 IN 21. 2 6.36 10.6 14.8 OUT 78. 5 23.6 39.3 55 10 4 .2 IN 66. 0 19.8 33 46 OUT 201 60.3 101 141 16 6 IN 172 51.6 86 121 OUT 314 94.2 157 220 20 8 IN 264 79.2 132 185 OUT 491 147 246 344 25 10 IN 412 124 206 288 OUT 804 241 402 563 32 12 IN 691 207 346 454 5/10 b) Double