Manifold Specifications

L4 2 148 137.5 116 16 3 160.5 150 135 13 4 185.5 175 154 16 5 198 187.5 173 12.5 6 223 212.5 192 15.5 7 235.5 225 211 12.5 8 260.5 250 230 15.5 9 273 262.5 249 12 10 298 287.5 268 15 (mm) Stations L1 L2 L3 L4 11 310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401 11 18 448 437.5 420 14 19 473 462.5

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 D3 L4 Max. Min. Max. Min.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

VPA4

356 464 572 680 788 896 1004 L4 = 108 x n + 140 L3 = 108 x n + 90 306 414 522 630 738 846 954 VVPA460 ( ) for VVPA460 5-3-30

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Inch Size Applicable tubing O.D. d Applicable tubing O.D. d T D1 D2 D3 L1 L2 L3 M1 L4 (3) A (2) D1 D2 L1 L2 L3 L4 (3) A (2) Weight (g) H (1) Weight (g) H (1) T M1 Model Model Min.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

KF

Swivel Extended Elbow: KFW H1 (width across flats) H2 (width across flats) H3 (width across flats) H4 (width across flats) Applicable tubing (mm) Connection thread R Effective area (mm 2) Weight (g) L2 L3 L4 A Model L1 M d I.D.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Note 1 Body A PBT 2 Elbow body PBT 3 Body B Brass Electroless nickel plating 4 Knob POM 5 Needle PBT 6 Needle guide Brass Electroless nickel plating 7 U-seal HNBR 8 O-ring NBR 9 O-ring NBR 10 O-ring NBR 11 Cassette 12 Seal NBR 13 Spacer Note) 14 Gasket NBR/Stainless steel Note) Used only for the AS22l1F-U01-23A. 627 AS Series Dimensions/ Elbow type D3 Applicable tubing O.D. d D1 L3 A L4

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

H(1) A(2) D1 D2 L1 L2 L3 L4 T M1 Weight (g) Model Model Min.

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

Digital Flow Switch

Wide range of flow measurement with one product 6000 10 12000 Applicable flow range [L/min] Port size 30 60 120 500 1000 3000 30 3000 3000 L type PF3A703H 1 60 6000 6000 L type PF3A706H 1 1/2 120 12000 12000 L type PF3A712H 2 Pressure loss: 75% reduction*1 Improved drainage and resistance to foreign matter (20 kPa / 5 kPa) *1 Compared with the current model (PF2A7H/Large flow type).

0.4

VV5Q21 (n-1) x 16 L1 L5 = 16n + 108 L6 = L3 + 25 L7 = L4 + 25 L11 = L4 + 50 L10 = L3 + 50 82 L9 = 16n + 131 34.5 1 SERIAL UNIT x 1 x 10 STATION NO. FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) ERR. RD SD RUN POWER 120 80 10.6 4 46.2 ERR T/R RUN MODEL SB (SI No.EX124-SMB1) 0 1 DIP SW. L8 = 16n + 118.5 100 Drawing shows a SC case.

MHx-OMY0001

7.1 17.5 17 MHM-25D1 *2 *2 *2 43.6 MHM-25D2 14.6 14.6 10.1 9.5 4.6 2.6 2.8 14.3 6 4 MHM-32D 19 19 39.8 3.8 14.5 35.3 6.3 22.5 23 MHM-32D1 *2 *2 *2 51.8 MHM-32D2 19 19 14.5 MHM-50D 27.2 27.2 54.2 1.2 22.7 49.7 3.7 31.5 38 MHM-50D1 *2 *2 *2 66.2 MHM-50D2 27.2 27.2 22.7 -11- *1 1mm *2 A *3 MHM-16DD-M9(W,A)V D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4

Pneumatic Purification

Auto Drain Float Type Model NAD600-N10 Minimum operating pressure 45psi. Maximum operating pressure 145psi. 1 NPT top entry. (N10), 3/4 NPT (N06) Model NAD402-N04 (N04 = 1/2 NPT) Minimum operating pressure 22psi. Maximum operating pressure 145psi.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 position closed center (A) 4 (B) 2 3 VQZ 1 (P) 5 (R1) 3 (R2) Port plug mounting port VQD 3 position exhaust center (A) 4 (B) 2 Nil A B 4 None Port 4(A) 1 (P) 5 (R1) 3 (R2) Port 2(B) 3 position pressure center (A) 4 (B) 2 5 Cylinder port 1 (P) 5 (R1) 3 (R2) C3 C4 C6 M5 L3 L4