Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

2-M2 x 0.4 depth 3 For magnet mounting 4.7 2.5 6-M3 x 0.5 depth 4 15 15 L (mm) N MXP10-10 MXP10-20 SMXP10#1 (#1 + #3) SMXP10#2 (#2 + #4) L K J V H S Z G M W Model 20 20 52.4 44 32 10 60 8 21 6.5 40 MXP10-10 36 36 82.4 74 50 20 90 20 39 7.5 65 MXP10-20 9 Precision Air Slide Table Series MXP Dimensions MXP10/With Shock Absorber Z 3 2-M3 x 0.5 depth 5 V K 5 N M Stroke: S Max. 19 MXP10-10B

Series MXP Precision Air Slide Table

10 4 3 5 12 "O" ring NBR 13 Piston seal NBR Replaceable parts list (Seal kit) Bore size (mm) Part no.

CYP

Y59A Y69A 3 wire (NPN) IC circuit 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) Y59B Y69B 12V 2 wire Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) Y7BW Y7BWV 12V 2 wire Lead wire length symbols: 0.5m .

Pressure Gauge Guide

Note) Use M5 female thread when piping onto a panel. 14-11-10 10 Pressure Gauge Guide Pressure Gauge for Clean Series (10-series) O.D: 44 G49 Installation of a filter on the breathing hole (filtration 3 m) enables an unit to curb particle generation from the pressure gauge inside. Standard Specifications G49 Back side thread R Air 3% F.S.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

position Types R, U Types S, Z Maximum 50 12 or less 12 or less 15 or less 2 position single 2 position single/double 10 5 5 Max. operating frequency Hz 10 or less 10 or less 13 or less 2 position double 3 position 3 3 3 15 or less 16 or less 20 or less 3 position Non-locking push type, Slotted locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/

A_HEC-OM-I009

alarm -9-2 Table 9-3 Alarm code list -9-2 Table 9-4 Troubleshooting -9-4 Table 10-1 Signal and style of connectors -10-1 Table 10-2 Power Supply Cable -10-2 Abbreviations Abbreviation (The order of ABC) Meaning AC Alternating Current AT Auto Tuning Chap.

EXxx-OMN0029CN

-3No.EX-OMN0029CN-D / 1 1.5 *3) *3)1 1 -4No.EX-OMN0029CN-D () () () () -5No.EX-OMN0029CN-D / () * UL UL1310 Class2 0V -6No.EX-OMN0029CN-D * IP67 / *() SI SI () ()SI SI * IP67 M12(M8) ( ) () -7No.EX-OMN0029CN-D CE * (20 ) PLC PLC * -8No.EX-OMN0029CN-D SI 1 SI 32 10 (SI ) U SI D SI ON/OFF PNP NPN PNP NPN PNP NPN EX600 D -9No.EX-OMN0029CN-D AD 16 10 16 10 DIN

HRS100/150

SMC Thermo-chiller Variations HECR HEC Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HEB HED HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HEA IDH HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V

Ionizer

Note 2) Use standard power cables for 3 m and 10 m lengths.

JXCx-OMY0004

Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Wiring and Connection 10 (4) Supply of power 10 (5) Configuration 11 (6) Setup of the operation parameters 11 (7) Test run 11 3.

Fieldbus system Ethernet POWERLINK compatible SI unit

Parameter Definition Item Content Default setting 0: -10..10 V 1: -5..5 V 2: -20..20 mA 3: 0..10 V 5 Analog Range Set the analog input range per channel. Selects the analog input range. 0..10 V 4: 0..5 V 5: 1..5 V 6: 0..20 mA 7: 4..20 mA 0: None None 6 Analog Filter Sets analog input filtering time per channel.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 19.2 20 3.5 0.3 3 4 x M2.5 x 0.45 thread depth 2.5 6.5 12.5 K M 21 3 x M3 x 0.5 thread depth 5 2 N 1 x F 3 depth 2.5 +0.03 0 9 27 F 4 4 x M2.5 x 0.45 thread depth 3.5 6 (Extension end adjuster) 1.5 13.5 3.5 5.5 12 15 10 14 27 20 31 0.5 Retraction end adjuster 4 Extension end adjuster 5.5 3 N x M3 x 0.5 thread depth 4 Note 1) Note 2) 3 depth 2.5

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

L dimensions n (stations) Dimensions 3 8 9 2 6 10 4 7 5 L1 66 176 198 44 132 220 88 154 110 L2 75 185 207 53 141 229 97 163 119 L3 84 194 216 62 150 238 106 172 128 Manifold composition 3 stns. x 1 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 1 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns.

Precautions 1

Indicator light Load voltage Lead wire length (m) Applicable load Pre-wired connector Auto switch model Type Special function Electrical entry Wiring (Output) 0.5 (Nil) 3 (L) 1 (M) 5 (Z) None (N) DC AC M9N M9P M9B H7C M9NW M9PW M9BW H7NF 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Reed switch Solid state switch Grommet 2-wire 12 V Connector Relay, PLC 24 V Yes 3-wire (NPN) 3-wire

Digital Flow Switch (Integrated display type)

2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 Flow CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Setting/display flow range 0 to 9 ft3 x10-1 Accumulated flow Min. setting/display unit 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/pulse ft3 x 10-2/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse

VCL

3/8: 0.40 1/2: 0.49 1/4 ( 8A) 3/8 (10A) 1/2 (15A) VCS3 1.0 3 5 0.5 19 0.80 7 0.2 33 1.4 10 0.1 50 2.1 3 1.0 8.4 0.35 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 1/4 ( 8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 4 1.0 14 0.60 VCS4 1.0 4 5 0.7 20 0.85 7 0.3 33 1.4 10 0.12 50 2.1 Note 1) Refer to page 339 in model selection regarding port size and orifice diameter combinations.

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

IZx-OMX0087

/ Length Power supply cable layout direction / Length Symbol Layout direction Length (m) Symbol Layout direction Length (m) 3 3 N None N None 5 5 E 0.5 J 3 10 10 G 1 K 5 Straight 15 15 H 2 M 10 Straight N None J 3 S 3 To use AC adapter, specify "N", and select AC adapter with the option number.

IDX-OM-W028

instructions . 10 1 10 2 Specifications of the GFCI . 10 1 10 3 How to connect the power supply . 10 1 10 4 Cautions for handling the GFCI . 10 3 10 5 Electric circuit . 10 3 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable . 11 2 11 5 How to re-start the operation