3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread

Magnetically Coupled Rodless Cylinder

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

VQC

B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

70pvpump

Diaphragm material 1 VXA PTFE (Fluoro resin) JIS Symbol Style VN Port size 1 3 Built-in solenoid valve Air operated LVC 01 1/8 (6A) FLUID OUT AIR SUP AIR EXH LVA Thread type FLUID IN Nil T Rc NPTF G NPT LVH Built-in solenoid valve F LVD N T, F, N are options.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Bit line Bit Details 7 6 5 4 3 2 1 0 Time base Multiplier Bit 0 to 5: Multiplier (0 to 1) Bit 6 to 7: time base (00, 01, 10) Calculation condition Time base Time base value Calculation Cycle time 00 0.1 ms Multiplier x Time base 0.4 ms to 6.3 ms 01 0.4 ms 6.4 ms + multiplier x Time base 6.4 ms to 31.6 ms 10 1.6 ms 32.0 ms + multiplier x Time base 32.0 ms to 132.8 ms -78No.EX-OMX1011 Data

PF-OMN0011_C

V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C () () UP SET DOWN OUT1OUT2 ON UP ON/OFF SET DOWN ON/OFF -12No.PF-OMN0011CN-C

Quick Exhaust Valve Series AQ 1

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Serial Transmission System Series EX250 Series EX500

1 station N R S T Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.

Air Catch Sensor

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

COQ2BP

Siit:;, ,; f'I":1' Reed Switch White o--~~c:O::T--~o Black ~ $ 't. " I CDQ2 J>;,:: 9 9 10 U Response Range The range where auto SWitch turns on. 6SIIIC 11 Series CDQ2BP High Magll8tic Field Resistance Hs D-P7 P8 Auto Switch Mounting Position Minimum Allowable Stroke c MInimum No. of Auto swilehes . oetup pooIIion Symbol _(mml . 063 e80 I 060 1 pc

Low Maintenance Filter Series FN1

Drain valve: Open 5 3 Raises the cylinder to compress the element. q Cylinder driving valve: OFF t Drain valve Open Close 1 2 3 4 5 Stops pressure feed. w Air supply valve: Close t Drain valve: Open r OUT side valve: Open e IN side valve: Open Back flushing switch OFF ON The M/C stop signal and a signal for element clogging (differential signal switch) are used to start back flushing.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

PA3000/5000/PAX1000

Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.