C MS-5AU-3 MS-5AU-4 4.5 5 11.5 12 1.7 2.1 1.4 1.5 1.6 1.8 MS-5AU-6 7 2.5 14 4.0 1.7 Barb elbow for soft nylon: MS-5ALHU-3, -4, -6 Effective orifice(mm 2) Weight (g) MS-5ALHU-3, -4 D L Part No. C A MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 11.8 12.6 1.1 1.4 3.0 3.1 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective orifice(mm 2) Weight (g) F E Part No.
Description AR40K-B / AR40K-06-B / AR50K-B / AR60K-B Aluminium die cast Urban white 1 Body AR40K-B / AR40K-06-B Polyacetal AR50K-B / AR60K-B Aluminium die cast Urban white 1 Bonnet Option / Replacement Parts No. Description Thread Type Option Material Part No.
D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186
Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.
Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214
-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A
Nil C Thread type Nil N F Rc NPT G The cable and connector are shipped unassembled. Lead wire (Refer to page 322.)
Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no.
(C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.
1 P, S, T PC23 *COP2 Function selection C-2 S PC24 *COP3 Function selection C-3 S PC25 *COP4 Function selection C-4 P, S PC26 ALDT Detailed setting of overload tough drive P PC27 OSCL Detailed setting of vibration tough drive P, S PC28 CVAT Detailed setting of instantaneous P, S power failure tough drive PC29 *COP5 Function selection C-5 P, S, T PC30 *COP6 Function selection C-6 S PC31 SC4
Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30
(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
D-sub connector conforming to MIL-C-24308 (Refer to page 39.) Dedicated connector (Refer to page 39.) D-sub connector conforming to MIL-C-24308 (Refer to page 39.)
set (Supplied with product) SRF Connected to VBA20A, 40A Connected to VBA22A, 42A ITV Tank IN port Rc1/2 IC Booster regulator IN port Booster regulator IN port C C ITVH ITVX EXH: C EXH: C (A) (A) D PVQ (B) (B) OUT OUT 355 Tank OUT port Rc3/4 VY1 256 256 205 4 x 13 4 x 13 VBA VBAT VBA VBAT 50 50 Drain valve Drain port Rc1/4 150 150 AP100 500 250 250 824 Booster regulator model A B C D VBA20A
BAF-08 BAF-10 BT-04 BT-04 BT-06 BT-08 BT-08 D-A3<C/A44C D-G39C/K39C D-Z7C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 types.
Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size
Applicable piping size Applicable tubing size (inch) 2 2 2 2 2 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A B C D E A B C A B C D A B C A B C A 1 2 3 4 5 1 2 3 4 5 6 7 8 1 2 3 4 1 2 3 1 2 3 13.7 x 9 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 13.7 x 9 21.3 x 15.4 26.7 x 20.5 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 33.4 x
Refer to page 926 for details. (5) Digital vacuum switch unit 21 C 0X ZSE3 D 06 ZZX1 R B Unit for replacement Piping specifications Stations Supply port location 01 1 Thread type Left side Right side R L B Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector Nil L C CL CN 1 8 Nil F T G Rc 08 8 Both sides NPTF System for external vacuum (3) Adsorption confirmation
Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output