Body/Exhaust Type: A (Single Unit - Silencer Exhaust), Nominal Nozzle Size: 07 (ø0.7), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (Without Pressure Sensor / Digital Pressure Switch for Vacuum), Connector: L3 [L-type Plug Connector - w/o Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07

07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: D [With Individual Release Pressure Supply (PD) Port Type]

for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

Body/Exhaust Type: B (Single Unit - Port Exhaust), Nominal Nozzle Size: 07 (ø0.7), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L2 [L-type Plug Connector - w/ Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07

Body/Exhaust Type: G (Single Unit - High-noise Reduction Silencer Exhaust), Nominal Nozzle Size: 07 (ø0.7), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 6 (12 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 07 [ø1

Body/Exhaust Type: B (Single Unit - Port Exhaust), Nominal Nozzle Size: 07 (ø0.7), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: K (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / NPN 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch

Body/Exhaust Type: A (Single Unit - Silencer Exhaust), Nominal Nozzle Size: 07 (ø0.7), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: K (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / NPN 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 07 [ø1/4 One-touch Fitting

Clean Room Regulator/Fluoro Resin Type Series SRF30

(inch size) 11 3/8 SRF30T 11 Tubing SRF30S 07 Integral fittings Pilot port thread type Applicable tube size Inch size (Tubing size regulator port) Metric size (Tubing size regulator port) Nil N Rc1/8 NPT1/8 07 11 1/4 x 5/32 (with plug-in reducer) 3/8 x 1/4 (standard size) 6 x 4 (with plug-in reducer) 8 x 6 (with plug-in reducer) 10 x 8 (standard size) 06 08 10 Note)The reducer method allows

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-05 48 7.5 19.7 Block separation lever B B B B 111.4 118 102.9 100.4 91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300.

Series SV

A B A B COM PWR A A A A B B B B Cable with M12 connectors EX500-ACP. 15 Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc. A B A B COM PWR A A A A B B B B Cable with M12 connectors EX500-ACP. 15 Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc.

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

A

O R E T Y P E S I D E S U P P O R T B: T H R E A D E D T H R O U G H H O L E Part No Cylinder Side Support A Side Support B A B C D E F G H J MY-S16A/B MY1C16 MY-S16A MY-S16B 61 71.6 15 26 4.9 3 6.5 3.4 M4X0.7 MY-S20A/B MY1C20 MY-S20A MY-S20B 67 79.6 25 38 6.4 4 8 4.5 M5X0.8 MY-S25A/B MY1C25 MY-S25A MY-S25B 81 95 35 50 8 5 9.5 5.5 M6X1 MY-S32A/B MY1C32 MY-S32A MY-S32B 100 118 45 64 11.7 6

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16

7.5

(16.3) 10 (7) 5.5 20.8 56.2 35 17.2 PE X DIN rail B A B A B A B A B A B A 9.9 Manual override (Locking type: Press, then rotate.)

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN

Rubber seal 5 Port Solenoid Valve Series SYJ5000

B B B B 43.9 24 24 44 23 A A A A A 10.5 0.5 (DIN 1.7) 33 10.4 15.9 ( DIN 17.1) 1/4 (P, R port) 1/4 (P, R port) (Pitch) P = 17 24.5 (Station n) (Station 1) (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) (Light/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 33 (Pitch

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

0.55

2 4(A) (B) (A) (B) (A) 2 4 2 4 B (EB)3 5(EA) 1 (P) VF3000 VF5000 = 2(B) (A)4 5 1 3 1 5 3 (EA) (P) (EB) (P) (EA) (EB) (EA)5 1 3(EB) ; B (P) 2-position double Symbol @ = : 2-position single > > : @; VF1000 4(A) (B)2 (A) (B) (B) (A) 4 2 2 4 5(EA) 1 (EB)3 (P) VF3000 VF5000 2(B) (A)4 5 1 3 3 1 5 = (EA) (P) (EB) (EB) (P) (EA) (EA)5 1 3(EB) ; (P) 3-position closed center/exhaust center/pressure