CJ5-S

13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41

CJ5-S

13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41

MGP

7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5

51

Switch bracket Auto switch b Switch holder d Auto switch mounting screw c Auto switch mounting band D-X Technical Data 375 CG3 Series Operating Range (mm) Auto switch model Bore size 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-M9A(V) 4.5 5.0 4.5 5.5 5.0 5.5 D-A9 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C D-B5/B64 D-B59W D-H7/H7W D-H7NF/H7BA 9 8 10 10 10 11 8 10 9 10 10 11 11 11 13 13 14 14 14

HRX-OM-X010

HRZ Series 3.3 Procedure for Installation 3-13 3-13 HRX-OM-X010 Chapter 3 Transporting and Installation 11. Connect the communication cables with P1 and P2.

JXCx-OMT0002

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, and Alarm check 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Alarm check . 13 3.6 Parameters and Step data

VFR

Cable Color List of Each Terminal No. 3 5 7 Red 9 Blue 11 13 2 4 6 8 Red Yes 10 Blue Yes 12 1 Terminal no. Lead wire color Dot marking 1 9 Gray 10 11 12 2 3 Red 4 5 6 Pink 7 Blue 8 Terminal no.

ZPT/ZPX

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Modular F.R.L. Unit

77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.

JXCx-OMU0026

JXC-OMU0026 4.3 Parts Description Detail of the controller parts. (9) (10) (1) (11) (12) (2) (13) (3) (14) (4) (5) (6) (15) (7) (16) (8) No.

Prevents Micro-Bubbles

10 11 12 13 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class Body class Tubing size Plug Tubing size Plug LVC 6 1/4" 6 1/4" LVA Base type 2 2 8 8 A Stacking type LVH 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" LVD 02 2 stations 3 3 12 1/2" 12 1/2" LVQ 05 5 stations 12 1/2" 12 1/2" LQ 4 4 19, 3/4" 19, 3/4" LVN TI/ TIL How to Order Valve PA LVH 2 0 S07 A PAX Body class

CNG

K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M5 x 0.8 depth 8 169 (178

Cylinder with Lock Series CNG

K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M10 x 1.25

JXCx-OMT0001CN

No.JXC-OMT0001CN-C 4 TM) (EtherNet / IP // JXC93 Series 1. . 5 2. . 7 2.1. . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 1 . 11 (2) . 12 (3) . 13 3.6 . 14 1 . 14 (2). 17 (3) . 19 3.7 JOG . 20 (1) . 20 2 . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 3 . 24 (4) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26

CNG

rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 11 11 M6 x 0.75 3 12 40 193 (201) 30 17 62 215 (223) M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Operating Range (mm) Auto switch model Bore size 32 40 50 63 80 100 125 D-A9/A9V 7 7.5 8.5 9.5 9.5 10.5 12 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4 4.5 5 6 6 6 7 D-Z7/Z80 D-A5/A6 D-A59W D-A3/A44 7.5 8.5 7.5 9.5 9.5 10.5 13 9 9 10 11 11 11 10 13 13 13 14 14 15 17 9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 7 D-F5/J5 D-F5W/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5

•

) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

IDX-OM-W014

R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75