ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

1.1

With Communications Function (RS-232C) P.11 High-lift Pump P.12 With DI Control Kit P.12 Optional Accessories Dustproof Filter Set P.13 By-pass Piping Set P.13 DI (Deionized Water) Filter P.14 Insulating Material for DI (Deionized Water) Filter P.14 Specific Product Precautions P.15 to 17 Safety Instructions Back cover Front matter 1 Series HRGC Model Selection Guide to Model Selection

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

CLQ

Applicable bore size (mm) 32, 40 11 60 22 6.5 12 YB-05 50, 63 120 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-03 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-05 14 75 28 8.5 16 YB-08 80 230 M16 x 2 80 24.8 23 13 90 9 22 8 20 YU-08 18 90 36 10.5 18 YB-10 100 455 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 YU-10 18 For details on each auto switch, refer to pages starting with 5.3-2 of "Best Pneumatics

Compact Cylinder with Lock Series CLQ

Applicable bore size (mm) 32, 40 11 60 22 6.5 12 YB-05 50, 63 120 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-03 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-05 14 75 28 8.5 16 YB-08 80 230 M16 x 2 80 24.8 23 13 90 9 22 8 20 YU-08 18 90 36 10.5 18 YB-10 100 455 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 YU-10 18 Series CLQ Auto Switch Specifications Applicable Auto Switches Auto switch model Electrical

Square Tube Type Air Cylinder Series MB1

(Refer to Rod boot/Air cushion on page 11.)

mb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

70astamb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

A_HEC-OM-K001

11 7.4.9 Setting of control operation mode (without writing EEPROM) . 7-12 7.4.10 Reading of control operation mode . 7-12 7.4.11 Setting of PB range (without writing EEPROM) . 7-13 7.4.12 Reading of PB range . 7-13 7.4.13 Setting of ARW range (without writing EEPROM) . 7-14 7.4.14 Reading of ARW range . 7-14 7.4.15 Setting of I constant (without writing EEPROM). 7-15 7.4.16 Reading of I

IDX-OM-W011

M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W011 i

Servo Motor Controller (24 VDC)

Product Specifications .11 3.1 Basic specifications .11 3.2 Parts description .12 3.3 Outside dimension diagram .13 (1) Screw mount type (LECA6-).13 (2) DIN rail mount type (LECA6D-) .13 3.4 How to install .14 (1) How to install .14 (2) Ground wire connection .14 (3) Installation location.15 4.

RQ

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) YB-05 50, 63 11 60 120 22 6.5 12 YU-03 32, 40 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YB-08 80 14 75 230 28 8.5 16 YU-08 80 M16 x 2 24.8 23 13 90 9 22 8 20 YB-10 100 18 90 455 36 10.5 18 YU-10 100 M20 x 2.5 29.8 28 14 160 11 26 10 26 7-7-15 15 Series RQ Proper Auto Switch Mounting Position (Detection

JXCx-OMX0009

F to 0 Address 11 F to 0 Area 1 12 F to 0 DATA(H) 12 F to 0 Occupation (always 0) area 13 F to 0 DATA(L) 13 F to 0 Area 2 14 F to 0 Occupation 14 F to 0 area 15 F to 0 15 F to 0 In position *5) Set always OFF(0) 120 - 23.

•

(Different surlaces., P-Z1O 15 ' OS 11 0 11 5 ~~ Stune sulface) With 1 pc. 2 l'O+40~ 11 5 +40 ) o.Y7.P With n pcs. 15 + 401 n 221 , , D-Y590 105+40(0 4) , 1n 4 (n =4, 8, 12. 16) .Y7OW r D'-''-'=~__'_-r_' (,,"~=_=2 . 4. 6. 8..) (n = 4. 8. '2" ,-,-'6 ",.","),-__",( " :..: = ",4 ",.-,, 8!

Vacuum Unit Ejector / Vacuum Pump System

selection function Note 12) NPN 2 outputs F SI unit only Note 13) -100 to 100 H PNP Unit selection function Note 12) 2 outputs J SI unit only Note 13) K Unit selection function Note 12) NPN Pressure switch for 1 output Q SI unit only Note 13) -100 to 100 vacuum with energy R PNP Unit selection function Note 12) saving function Note 11) 1 output S SI unit only Note 13) N Without pressure

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13