Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: PF (G 1/2 Port Exhaust), Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm)

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm)

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2", Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: -, Manual Override: -, Vacuum Pressure Sensor: -, Output Specifications

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: G 1/2 Port Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: -, Manual Override: -, Vacuum Pressure Sensor: -, Output Specifications:

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: -, Manual Override: -, Vacuum Pressure Sensor: -, Output Specifications: -

Exhaust: Built-in Silencer, Exhaust Port Thread: Rc1/2 (or No EXH Thread in the Case of Built-in Silencer), Supply, Release Valve: w/Supply & Release Valves, Voltage: 24VDC, Electrical Entry: M Plug Connector, Lead Wire Length 0.3m, Light & Surge Suppressor: -, Manual Override: -, Vacuum Pressure Sensor: -, Output Specification: -, Unit Specification: -, Lead Wire: -, Exhaust Type: -, EXH

Exhaust: Port Exhaust, Exhaust Port Thread: Rc1/2 (or No EXH Thread in the Case of Built-in Silencer), Supply, Release Valve: w/Supply & Release Valves, Voltage: 24VDC, Electrical Entry: M Plug Connector, Lead Wire Length 0.3m, Light & Surge Suppressor: -, Manual Override: -, Vacuum Pressure Sensor: -, Output Specification: -, Unit Specification: -, Lead Wire: -, Exhaust Type: -, EXH Thread

Exhaust: Port Exhaust, Exhaust Port Thread: 1/2-14 NPT, Supply, Release Valve: w/Supply & Release Valves, Voltage: 24VDC, Electrical Entry: M Plug Connector, Lead Wire Length 0.3m, Light & Surge Suppressor: -, Manual Override: -, Vacuum Pressure Sensor: -, Output Specification: -, Unit Specification: -, Lead Wire: -, Exhaust Type: -, EXH Thread: -

Nozzle Diameter: 2.0 mm, Vacuum Pressure: -53 kPa, Exhaust: Built-in Silencer, Valve: Double SOL + NC, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Lead Wire Length 0.3 m, Surge Suppressor: -, Manual Override: -, Switch/Filter: -, Output: -, Unit Specification: -, Lead Wire: -, Adjusting Needle/Bracket: -, CE Compliant: -

Nozzle Diameter: 2.0 mm, Vacuum Pressure: -84 kPa, Exhaust: Built-in Silencer, Valve: Double SOL + NC, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Lead Wire Length 0.3 m, Surge Suppressor: -, Manual Override: -, Switch/Filter: -, Output: -, Unit Specification: -, Lead Wire: -, Adjusting Needle/Bracket: -, CE Compliant: -

Nozzle Diameter: 1.0 mm, Vacuum Pressure: -84 kPa, Exhaust: Built-in Silencer, Valve: Double SOL + NC, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Lead Wire Length 0.3 m, Surge Suppressor: -, Manual Override: -, Switch/Filter: -, Output: -, Unit Specification: -, Lead Wire: -, Adjusting Needle/Bracket: -, CE Compliant: -

Nozzle Diameter: 1.3 mm, Vacuum Pressure: -84 kPa, Exhaust: Built-in Silencer, Valve: Double SOL + NC, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Lead Wire Length 0.3 m, Surge Suppressor: -, Manual Override: -, Switch/Filter: -, Output: -, Unit Specification: -, Lead Wire: -, Adjusting Needle/Bracket: -, CE Compliant: -

Vacuum ejector series ZA is compact and lightweight, making it ideal for pick and place operations, and suitable to all industries.  Due to the compact design of the ZA, it is possible to install on moving parts.  The shortened tube length to pad improves response time.  The ZA is available as a single unit or manifold type, with or without pressure sensors and suction filters.  Compact

K35-OMX0029

. *2 Ports FA and FB are plugged before shipment.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VS VQZ100 0.45 to 0.55 VQZ100-FB Series VQZ200 0.25 to 0.35 VQZ200-FB VFN 0 VQZ300 VQZ100 0.25 to 0.35 VQZ300-FB 1 VQZ200/300 Note) Tightening torque for mounting brackets on the valve.

CQ2

Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 130 155 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 55 60 65 70 75 80 85 90 95 130 155 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 130 155 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 55 60 65 70 75 80 85 90 95 130 155 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65

2

(C) Correction factor 1.21 1.10 1 0.87 0.76 0.74 0.72 0.70 IDG 5 to 30 35 40 45 50 55 60 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 5 to 45 50 55 60 65 70 75 80 Data B: Ambient Temperature Note) Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E IDU55E, 75E IDF100F to 150F IDF190D to 240D Ambient temp.

Table of Contents

41.5 55 72.5 L2 43 57 75 L1 41.5 55 72.5 L2 57 74 95 L3 43 57 75 L1 41.5 55 72.5 77.5 L2 57 74 95 102 AC20A AC30A AC40A AC40A-06 T S TV SV V Attachment Model L1 41.5 55 55 72.5 77.5 93 98 98 L1 28 41.5 55 55 72.5 77.5 93 98 98 L1 41.5 55 55 72.5 77.5 93 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 77.5 93 L2 57 74 74 95 102 124 L1 41.5 55 55 72.5 77.5 93 L2 61 76 76 99 104