ALB900 Mist generation pressure differential (MPa) IC EX: How to obtain the mist generating pressure differential if the flow rate obtaine in 1. above is 35 m3/min and the line pressure (inlet pressure P1) is 0.7 MPa: Extend horizontally from the point at which the flow rate is 35 m3/min to obtain the point that intersects with P1 = 0.7 MPa.
Step 20 Step 5 Analog output 4-20 mA 0-10 VDC P4 Set pressure P3 PPA P2 AL P1 0 1023 Digital input data Time Digital signal Digital signal Analog signal Analog signal Analog signal Analog signal Controller Actuator Electro-pneumatic regulator Actuator Electro-pneumatic regulator Controller PLC PWR PWR ERR ERR 1bit 2 bit . . . . 10 bit 010 VDC 420 mA 010 VDC 420 mA Series ITV Series ITV Series
Primary pressure normal Set value P1 P2 Time ON Switch output 1, 2 OFF Time [ ] Switch output response time when auto shift is input. 5 ms or more 10 ms or less Hi Auto shift input Lo 3 types of piping Different piping methods are possible to accommodate the installation location.
Vacuum pressure: P1 Conversely, the size of the ejector or the size of the switching valve of the vacuum pump system can be obtained from the adsorption response time.
Q=14.2Cv 10.2 P l/min G Formula based on effective area (Smm) Q=0.8S 10.2P l/min G Other : Flow rate (l/min) : Pressure differential (P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor : Fluid specific gravity (water = 1) Q P P1 P2 S Cv G 1. Materials FKM: Fluoro rubber Trade names: Viton, Dai-el, etc. 2.
(Including the mounted valves. ) 1.10-148 Manifold optionsSV5Q11OP, #1 to #3 VQ 1000/2000 Plug-in Unit Base Mounted EXH block base assembly VVQ1000-19A-(C3, C4, C6, M5) F P L Manifold block ass'y Electrical entry F1 F2 F3 P1 P2 P3 L0 For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12
Effective area (Cv) (1) SYJ 0.8MPa 0.15MPa 5 to 50C 2.7mm2 (0.15) 180 c.p.m SUP side pressure (P1) To CYL port SX Note 1) As per JISB8375-1981 (Supply pressure: 0.5MPa) VK Max. operating frequency VZ Dimensions 21.5 (5) Manifold 18 VF Valve 29 10.5 2n-C4, C6 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 VFR 2n-C4, C6 C6: One-touch fitting ass'y for 4 C8: One-touch fitting
Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).
(the condition of P1 and Q1) 3. If the suction port is opened completely, the suction flow rate increases to the maximum (Qmax), while the vacuum pressure then drops almost to 0 (atmospheric pressure). When adsorbing work pieces which are permeable or subject to leakage, etc., caution is required as the vacuum pressure will not be very high.
(condition P1 and Q1) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0 (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0.
Pmax P1 Vacuum pressure Qmax Q1 Suction flow rate 13-6-4
AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.
Allowable Kinetic Energy Bore size (mm) 20 0.29 0.18 25 0.46 0.29 32 0.84 0.52 40 1.4 0.91 50 2.38 1.54 63 4.13 2.71 80 6.93 4.54 100 1000 Male rod end Female rod end 0.2 0.11 Allowable lateral load at rod end (N) m1 : Mass of cylinder movable parts kg m2 : Load mass kg V : Piston speed at the end m/s Kinetic energy E (J) = (m1 + m2) V2 2 100 80 100 Table (2) Mass of Cylinder Movable Parts
7 11 11 15 15 17 40 40 52 52 59 59 59 70 86 102 116 145 161 182 18 18 22 26 31 31 36 43 43 43 27 27 32 41 9.0 11.5 13.5 13.5 19 19 19 88 105 124 140 145 160 180 20 23 28 29 14 20 20 120 140 164 180 190 212 236 58 64 84 100 100 112 118 144 170 198 220 230 255 275 17 17 21 21 16 16 18.5 17 17 21 21 16 16 18.5 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot M M1
E Double shaft/Port location: Side ported L MRQ 2 x Q4 K V1 B D S M1 T G1 H Y2 U N V2 C Body (B) Body (A) F 2 x R G2 J A E L Size: 10
7 11 11 15 15 17 40 40 52 52 59 59 59 70 86 102 116 145 161 182 18 18 22 26 31 31 36 43 43 43 27 27 32 41 9.0 11.5 13.5 13.5 19 19 19 88 105 124 140 145 160 180 20 23 28 29 14 20 20 120 140 164 180 190 212 236 58 64 84 100 100 112 118 144 170 198 220 230 255 275 17 17 21 21 16 16 18.5 17 17 21 21 16 16 18.5 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot M M1
adapter AC cord C G1 IZF21 AC adapter AC adapter Air suction side filter G1 AC adapter (with AC cord) F L 21 IZF Filter holder Filter G2 AC adapter (without AC cord) Model Air suction side filter L Filter U Filter + Filter holder 21 For IZF21 31 For IZF31 Adjustable louver IZF 21 HW Model 21 For IZF21 31 For IZF31 Accessories Sold Separately Cleaning kit Adjustment screwdriver M2 IZS30 M1
Allowable Kinetic Energy [J] Bore size [mm] 20 25 32 40 Male rod end 0.11 0.18 0.29 0.52 Female rod end 0.11 0.18 0.18 0.52 18 fR: Allowable lateral load at rod end [N] Kinetic energy E [J] = (m1 + m2) V2 16 m1: Mass of cylinder moving parts kg m2: Load mass kg V : Piston speed at the end m/s 2 14 JCM40 12 JCM32 10 Table (2) Mass of Cylinder Moving Parts Without Built-in Magnet/0 Stroke 8
+ m2) V 2 Without Magnet for Auto Switch Kinetic energy E [J] = 2 100.0 m1: Mass of cylinder moving parts kg m2: Load mass kg V: Piston speed m/s 100 Allowable lateral load at rod end [N] 80 Mass of Cylinder Moving Parts: Without Magnet for Auto Switch [g] 63 50 10.0 Bore size [mm] Cylinder stroke [mm] 40 32 5 10 15 20 25 30 35 40 45 50 12 5 6 7 8 9 10 25 16 5 6 7 9 10 11 20 9 11 13 15
+m2)V E(J= m1 kg m2 kg V m/s 4. 4-1 CE1 4-2 A A B B C COM(OV) D COM(OV) E 12 24V F 0V G CEU5 CEU5 3 +12V +12V 1k A 680 COM +12V +12V 1k B 680 COM +12V DC12V60mA GND F.G. 4-3 (1)CEU5 CE1-R** (2) (3) (4) (5) *(CEU5**-D)EMC CEU5) 5. 5-1 () CE1 14.5mT CE1 15000 18cm 5-2 0.1mm 0.0 0.2 0.1 A B (1)0.8mm (2) sin cos 2 0.8mm (3)1/8 90,0.1mm/ (4)0.1mm 5-