Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

EX500

) Vibration resistance 98 m/s2 in each X, Y, Z direction, 3 times (De-energized) Impact resistance Standard CE marking, UL (CSA) Mass 120 g Accessory: Waterproof cap (for M12 connector socket) EX500-AWTS (1 pc.)

90

Note 8) For y (connector type) of the single unit, select L, L, or W.

Air Cylinder Series CS1

knuckle I-12 I-14 I-16 I-18, I-20 I-25 I-30 Y type double knuckle Y-12 Y-14 Y-16 Y-18, Y-20 Y-25 Y-30 Bore size (mm) 125 140 160 180, 200 250 300 65 125 110 50 100 156.5 3.5 D76 140 110 50 105 161.5 3.5 83 155 120 56 110 170.5 3.5 -X 88 160 135 63 125 193.5 3.5 106 195 160 71 160 245.5 3.5 Individual -X 115 210 175 80 175 266.5 3.5 Technical data 429 Air Cylinder: Double Rod Type Series

LEC-OM069xx

Install the program using the following procedure. 2-3 2 P a n e l D i s p l a y a n d SigmaWin+TM 1. Please download the install program from our home page. 2. "SETUP.EXE" of the file is double-clicked. A message will appear, welcoming you to the SigmaWin+ program. 3. Click Next to continue.s 2-4 2 P a n e l D i s p l a y a n d SigmaWin+TM 4.

LEC-OM071xx

Install the program using the following procedure. 2-3 2 P a n e l D i s p l a y a n d SigmaWin+TM 1. Please download the install program from our home page. 2. "SETUP.EXE" of the file is double-clicked. A message will appear, welcoming you to the SigmaWin+ program. 3. Click Next to continue.s 2-4 2 P a n e l D i s p l a y a n d SigmaWin+TM 4.

One-touch Fittings Series KQ2

2 2 8 / 3 S 3 0 7 0 Y 2 Q K 7 1 5 . 9 2 5 . 9 2 5 3 8 / 1 S 1 0 9 0 Y 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 Y 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 Y 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 Y 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 Y 2 Q K 5 . 1 3 4 3 8 3 2 / 1 S 4 0 1 1 Y 2 Q K 2 2 5 . 5 3 5 . 6 3

Pneumatic Transfer System Series MF

Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Integrated Controller

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Thermo-chiller

Applicable model HRL-BB002 HRLE050-m-m HRL-BB001 HRLE090-m-m y u t Parts List r i No. Description Material Applicable model Size Qty.

Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

Compact Manifold Regulator

Y X X Y X X Y Fitting size Fitting size Fitting size Fitting size 5 5 5.5 5 6 4, 5/32 4, 5/32 6 3 11.5 19 19 20 8, 5/16 6 6 8, 5/16 3 11.5 19.5 20 23 10, 3/8 10, 3/8 1/4 1/4 7 11.5 22 22 26 1/4 1/4 19 20.5 737 ARM11A/B Series End Block Pressure Gauge ARM11E L Part no.

Table of Contents

Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !

Digital Flow Switches

Z directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) K (High pressure) and Y (Low wattage) are not available. Electrical ently: L/ M plug connector only.

17

Center of Gravity x z z y x y z MY1H Center of gravity Mass m Work piece X-axis Y-axis Z-axis Refer to page 1230 for wall mounting, ceiling mounting and vertical mounting types.