VFRA3000

B: 34.2 (1.9) A, BEA, EB: 45 (2.5) [A, BEA, EB: 27 (1.5)] VFRA3311-03 1 4 VFRA3411-02 3 position exhaust center 0.72 1 8 PA, B: 36 (2.0) A, BEA, EB: 50.4 (2.8) [A, BEA, EB: 28.8 (1.6)] 3 8 VFRA3411-03 1 4 39.6 (2.2) [PA, B: 16.2 (0.9)] VFRA3511-02 3 position pressure center 0.72 1 8 VFRA3511-03 3 8 41.4 (2.3) [PA, B: 16.2 (0.9)] JIS symbol 2 position single 3 position closed center ( ):

AC

20 30 40 Symbol Nil B* H* Symbol 02 03 04 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Series AC Epoxy Coated F.R.L.

20 30 40 Symbol Nil B* H* Symbol 02 03 04 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

HRX-OM-W002

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

Thermo-chiller

dimension) 20.4 [518] 1.97 [50] 24.3 [617] View A-A View B-B 1.97 [50] Accessory: Y-strainer mounting view Mount it by yourself on the circulating uid return port.

HRS100/150

View B-B 50 HRZ HRZD Accessory: Y-strainer mounting view HRW * Mount it by yourself on the circulating fluid return port.

Gun Type Ionizer

Contamination and wear of emitters b. Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

53

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

3 Port Solenoid Valve

OUT port Symbol SUP/EXH port (Applicable tubing) Applicable tubing B01 M3 female screw M5 female screw Station 3 2 1 D side U side Stations 02 03 2 stations 3 stations 20 20 stations Note) Maximum of 20 stations 3 1 Electrical entry 2 Grommet/Plug lead C How to Order Valve S070 B 5 B G Body type Electrical entry Body type Base mounted with screws G C Grommet Plug lead with light/surge

Manifold Specifications

.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

VXA21/22

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 4 The VX series will be revised shortly.

HRX-OM-X071

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Stations S42R Type Coil is located on same side as the A port. 2 stations 02 Coil is located on same side as the A port. S ... ...

Clean Gas Filter

2) SFA102SFA202SFA302 Connection Model (A) (B) SFA102-02 Tube 89 76 TSJ1/4 SFA202-02 Swage 93 96 SFA302-02 Joint 101 120 ()Reference dimensions 3) SFA103SFA203SFA303 Connection Model (A) (B) SFA103-02 Union 117 76 UOJ1/4 SFA203-02 O Ring 122 96 SFA303-02 Joint 130 120 ()Reference dimensions -8- 3.

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Valve mounting direction Stations P, R port thread type 02 2 stations Single solenoid coil is on opposite side as the A,B port. Nil : : Nil Rc Single solenoid coil is on same side as the A,B port.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Valve stations R Port NPTF -02 2 stations Single solenoid coil is located on the opposite side of the A, B port.