Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Model *1 Port size A B D E300-03-A 3/8 31.8 30 30 E400-04-A 1/2 31.8 36 36 Port size B *1 in model numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. * Separate spacers are required for modular units.

FH34/44/54/64

With relief valve None 0 1 Port size Flange SSA 15 (1/2B) 20 (3/4B) 25 (1B) 32 (1 1/4B) 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 80 (3B) Threaded Rc 3/8 1/2 3/4 1 1 1/4 1 1/2 Symbol 03 04 06 08 10 12 16 20 24 Replacement Element Part No.

Body Ported Type Vacuum Ejector ZH Series

10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch One-touch One-touch 10 03 12 One-touch Screw-in One-touch 03 03 03 Screw-in Screw-in Screw-in ZH18DA11 13 13 One-touch One-touch One-touch 11 N03 13 One-touch

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

99

Specifications FGH200 FGH300 Model FGH100 Number of built-in elements (element length) (mm) 1(125) 1(250) 1(500) Operating pressure MAX. 1 MPa MAX. 80C (Not above the boiling point) Operating temperature Each kind of fluid (See the table of applicable fluids on pages 63 and 64) Applicable fluid Port size (Rc) 3/8, 1/2, 3/4, 1 Housing Stainless steel 316 (Electrolytic polishing) Material Seals

OMU0023

2 3 ExOR step 1 with step 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 4 1st shift, Fill in 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 5 2nd shift, ExOR A001h 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 1 Value of 1st 6 3rd shift 0 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 byte: 7 4th shift, ExOR A001h 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 1 "01h" 8 5th shift 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 9 6th shift, ExOR A001h 1 0 0 0 0 0 0 1 1

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Example: SS3YJ3-20-03 .1 pc. (Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

VR4151/4152

OUT IN P2 How to Order IN P1 VR 12 1 1 F 06 OUT IN P2 JIS Symbol Body size Applicable tubing diameter Metric size 1 1/8 standard Inch size 3.2 23 04 06 01 03 07 1/8" 4 5/32" AND valve 6 1/4" With One-touch fittings For 3.2, use 1/8" tubing. 5-7-7 Series VR1211F Example of Operating Circuit Output 3 If both A and B are turned ON, which are in different pressure conditions, both output 1



size P , A port R port Body size Port 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 8 1 1 4 1 4 1 3 8 3 Body ported Base mounted 2 1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

KB

mounting thread M6 x 1 x 8 l KBE2-06 KBV2-06 5 Bracket: KBX (P . 15-3-117) Component module KBP1 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1 1 KB X 6 KBR2-1 Applicable thread size KBH2-R2S KBV2-06 KBP1 Model Bracket: KBX KBV1-06 Component module Model KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP2 1 KBP1 1 KBX6 KBX12 KBX14 KBX16 KBX20 KBX22 KBP2 KBD2-1 KBH2-R2S 15-2-111 Series KB

VCA

OUT (2) Rc G NPT NPTF Nil F N T 1 IN (1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm) 3 4 5 7 10 Symbol 3 4 5 7 10 Class 3 Class 2 Class 4 Consult SMC regarding other voltages.

FGD-E

FGD-KT001 FGDC Each of (1)(2)(3) and (4) are provided as a kit. FGD-KT002 FGDE Nut kit FGD-KT003 FGDT FGD-KT004 FGDF FGD-CV005-03 FGDT,F-03 FGD-CV005-04 FGDT,F-04 FGD-CV005-06 FGDT,F-06 Replacement cover (5) FGD-CV006-03 FGDC,E-03 FGD-CV006-04 FGDC,E-04 FGD-CV006-06 FGDC,E-06 Joint FGD-OP001 FGDB (10) KT-FGDC FGDC Each of (2)(4)(6)(13) and (16) are provided as a kit.

KA

thread M 1 8 KAH06-U01 14.5 6 5 12 19.5 17 1 4 KAH06-U02 13 17 14 12 13.1 13.1 10 H 3 8 KAH06-U03 17.5 11.5 16 1 8 1 4 KAH08-U01 KAH08-U02 20.5 15.5 25 21.5 11 27 Applicable tubing 14 D 14 8 18.0 18.0 18.5 3 8 KAH08-U03 17 19.5 13.5 33 1 8 KAH10-U01 28 23 17 MS 1 4 3 8 KAH10-U02 KAH10-U03 22 18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection