ZX

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.

Vacuum Module Series ZX

How to Order Manifold Specify the individual spacer when separating the supply and exhaust ports of the manifold ejector. 06 R ZZX1 Stations R1 1 ZX1 Supply port location 1) 01 1 02 2 R L B R1 Right side (PV port on the right side) Left side (PV port on the left side) Both sides (PV port on both sides) Arrangement (First station from the right end of the

AC Servo Motor Driver (SSCNET /H Type)

temperature of servo motor 1 SD (Note 1) (Note 1) (Note 1) 46.2 Abnormal temperature of servo motor 2 SD (Note 1) (Note 1) (Note 1) 46 Servo motor overheat 46.3 Thermistor disconnected SD (Note 1) (Note 1) (Note 1) (Note 1) 46.5 Abnormal temperature of servo motor 3 DB (Note 1) (Note 1) (Note 1) 46.6 Abnormal temperature of servo motor 4 DB (Note 1) (Note 1) (Note 1) 47 Cooling fan error

CA2

9 @0 @1 @2 @3 q w e r t y u i o !0 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts Note Description Material No.

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

E-P HYREG ® Series VY1

2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Lubrication Equipment

ALF400 ALF-3 12316 ALF400-06 ALF500 ALF600 ALF800 ALF900 ALF-3 12316 ALF-3 12316 ALF-3 12316 ALF-3 12316 ALF-3 12316 Auto feed Sight dome e r Polycarbonate 123122-3A ( ) 123122-2A ( ) 123122-1A ( ) Damper assembly 123122-3A 123210A 123310A 12356A 123417A(1 ) 123416A(1 ) 1 2 3 8 1 4 1 4 1 2 t 123128PA 123292A 12325A 124231 12318 123111 123213 113136 JISB2401G80 123128PA 123221A 123182 124230

VCC

Description C-w D-t C-t D-o F-e D-e D-r O-ring between manifold blocks VVCC12-OR-1 Special FKM O-ring 1 1 set unit VV2CC1 VV3CC1 VVMCC1 (common) 4 One-touch fitting One-touch fitting 1 VVCC12-50A-L1C4 1 set unit 6 One-touch fitting O-ring HNBR 1 VVCC12-50A-L1C6 O-ring O-ring Special FKM 1 1 set unit VVCC12-OR-3 O-ring Special FKM 2 O-ring assembly between port blocks VV3CC1 VVMCC1 1 set

SYJA300

3.5 21 25 X 21 14 R P 12 26 40 4 (3.6) (26) 54.2 40.5 48.8 (34) 54.5 54.3 1/8 (P, A, R port) 14.5 16 0.8 R P 18 1.8 (Breathing hole) 1.8 (Breathing hole) 20 12 23 15 1/8,1/4 (P , R port) 48 1797

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Description C-w D-t C-t D-o F-e D-e D-r O-ring between manifold blocks VVCC12-OR-1 Special FKM O-ring 1 1 set unit VV2CC1 VV3CC1 VVMCC1 (common) 4 One-touch fitting One-touch fitting 1 VVCC12-50A-L1C4 1 set unit 6 One-touch fitting O-ring HNBR 1 VVCC12-50A-L1C6 O-ring O-ring Special FKM 1 1 set unit VVCC12-OR-3 O-ring Special FKM 2 O-ring assembly between port blocks VV3CC1 VVMCC1 1 set

HRX-OM-W002

1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG BK C CM 2 Current Transformer S 14AWG G/Y G3 [ ] [ ] 14AWG BK S Condenser Circuit Protector R C1 E CT 1 14AWG G/Y G1 [ ] CP R 1 1 [ ] R [ ] 14AWG BK 14AWG BK N (CN4) N [ ] 14AWG BK 14AWG BK 2 2 22 21 L L L [ ] [ ] 14AWG BK 14AWG BK 1 1 12 11 (CN2) WH BK 3 12 12 3 3 BR

ZR

06 ZZR1 R 1 R1 ZR1 1 1 RV ZR1 Port location Stations R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.) Arrangement (Right valve station which is looked from valve side is first station.)

Magnetically Coupled Rodless Cylinder

0 i o q u y t r !2 w !1 CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 Parts list No. Description Material Note Hard anodized Aluminum alloy Body 1 Electroless Ni plated Aluminum alloy Head cover 2 Chromate (15 is not available.)

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

0 i o q u y t r !2 w !1 CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 Parts list No. Description Material Note Hard anodized Aluminum alloy Body 1 Electroless Ni plated Aluminum alloy Head cover 2 Chromate (15 is not available.)

CYV

1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Dynamic moment Me3 L2 We W Review Me3. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 Me1 = 1/3 We(L1 + B) 103 W We = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Dynamic moment Me3 L2 We W Review Me3. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 Me1 = 1/3 We(L1 + B) 103 W We = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

Large Size Vacuum Module: Series ZR

How to Order Manifold 06 ZZR1 R ZR1 1 R1 1 1 RV ZR1 Port location Stations R16 R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.)

Air Cylinder Series CA2

7 r !4 !8 !6 !2 t u !5 o !1 !