SMC Corporation of America
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Angle Adjustment of the Moving Direction of the Finger . 16 4-5. Piping . 17 4-6. Speed controller . 17 4-7. Finger open / close speed adjustment . 18 4-8. Connection of the auto switch and sensor harness. 19 5. Operating method or operation . 19 5-1. Precautions for Design . 19 5-2. Air supply . 19 5-3. Operating environment . 20 5-4. Lubrication . 20 6.

Switch Pressure range 0.1 MPa 0 2 MPa 10 MPa 1 MPa 5 MPa ISE70 For 1 MPa (For air and general fluids) 0 0.105 MPa 1 MPa 1.05 MPa ISE70G 0 0.105 MPa 1.6 MPa For 1.6 MPa (For air) ISE71 1.68 MPa 0 0.105 MPa 2 MPa For 2 MPa (For general fluids) ISE75G 2.1 MPa 0 0.25 MPa 5 MPa For 5 MPa (For general fluids) ISE76G 5.25 MPa 0 0.50 MPa 10 MPa For 10 MPa (For general fluids) ISE77G 10.5 MPa Rated

the workpiece is perpendicular to the cylinder's axial line (Fig. (4)). 5) Do not operate the cylinder in such a way that an external force causes the workpiece to move while being clamped (Fig. (5)). 6) Furthermore, do not operate the cylinder in an application in which a rotational force will be applied to the piston rod. 1) Do not operate the cylinder horizontally.

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

of particles captured every 5 minutes, by the laser dust monitor, is converted into the particle concentration in every 1 m3.

5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) (23 to 131F) Note 1) 5 to 50C 5 to 55C (23 to 131F) (23 to 131F) Note 1) 5 to 50 C 5 to 50C (23 to 122F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 15C (-5F) 56 (2.0) 111 (3.9) 222 (7.8) 335 (11.8) 560 (19.8) 830 (29.3) 1110 (39.2) 665 (23.5) 28 (1.0) Outlet air flow rate l

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

5!8#3 !7#2@1@2@8w!1#8%4%7$7tyo$9u$3!0 %3!9 %6@0 CL CL1 MLGC CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com %2@9#5#0 !3$2$1@6#6%0 @4@5!4$8#9#1#7$0e !2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

fl {rrrn 1m) o o t: 0 16" :Il o Co 10{) 25g004 33 IY-12 5 32:::5; 79.5 69.5 04 x40 1-12A 125 54 46 M30 x 1.5 27 125 4 8 25:t m 28 ~g[84 39 IY-14 5 1-14A 48 M30x1.S 30 140 .78.5 4 140 8 54 105 36 ::8: 1 8M ~4:x4Q 28 :Z~L 32 _ g' 39 IY-16 5 M36x1.5 94.5 94.5 04 x40 1-16A 160 8 60 55 110 40 :3:1 34 160 4 32 :::li1: ~ Spilt pin IS Included -

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

Confirm that the value is within the operating range of the point of application L = 60 mm. 10 10 RZQ 5 5 MI W S CEP1 1 1 kg 1 CE1 CE2 0.25 kg ML2B 10 20 40 5 10 20 30 C J G5-S 32.5 m/min Transfer speed (m/min) Transfer speed (m/min) 12 m/min CV Procedure 3: Confirmation of allowable lateral load MVGQ MIW12 MIS12 1.

) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

N.O. 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 4 position dual 3 port valve (A) 4 position dual 3 port valve (C) (A) 4 (B) 2 4 2 4 2 5 3 1 5 3 1 1 (P) 5 (R1) 3 (R2) N.C. N.O. N.C.

Nil Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.