Vacuum Pad Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7
Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7
Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7
Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.
PORT SIZE APPLICABLE ISO SIZE 02 1/4" 1 CODE A, B, PORT SIZE / LOCATION APPLICABLE ISO SIZE NOTES 03 3/8" 1, 2 02 1/4" SIDE ONLY 1 NO PORTS ON BOTTOM OF MANIFOLD 04 1/2" 1, 2, 3 03 3/8" SIDE ONLY 1, 2 06 3/4" 2, 3 10 1" 3 04 1/2" SIDE ONLY 1, 2, 3 02B 1/4" BOTTOM 2, 3 SIDE PORTS PLUGGED 03B 3/8" BOTTOM 1, 2 02S 1/4" SIDE 1 03S 3/8 SIDE 1, 2 BOTTOM PORTS PLUGGED HOW TO ORDER LATERAL PLUG-IN
5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/
1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.
0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !
(Refer to Table 1.) Table 1 Model Applicable tubing O.D.
(0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa) 02 06 10 Seat material Connections (Inletq, Outletw) Code Material PCTFE (Standard) Vespel 4) Material Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld Code No code VS FV4 MV4 TW4 FV6 MV6 TW6 Code
4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.
Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 SF SF NPT 1/
4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7
8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.
8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.
4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.
Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Bracket Stainless steel 304 -8- 2-3 Dimensions 1) SFB300-02: Rc1/4 2) SFB302-02: TSJ1/4 (Tube Swage Joint) 3) SFB305-02, SFB315-02: URJ (Union Ring Joint) Model A SFB305-02 79 SFB315-02 84 -9- 3.
How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30
Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.
Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !