CXS

9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u y i o Component Parts No.

EXW1-NT1_eng

Canada 02345-21-11041 IFETEL:xxx-xxx H 26043 IFETEL: RCPSMEX21-1677 Mexico Brazil Argentina UK Europe Ukraine TA-2021-0088 AGREE PAR L'ANRT MAROC Numro dagrment : MR00027841ANRT2021 Date dagrment : 19/03/2021 APPROVED South Africa Morocco HIDF18000274 Australia Singapore Malaysia B2100197 SMC Indonesia Vietnam CCAH21LP1360T1 Taiwan Authorized by the Ministry of International Affairs and Communications

Cylinder with Turntable Series MGT

No. 13 14 15 16 17 18 19 20 21 22 23 24 25 MGTM MGTL MGPM63 to 100Spring guide Parallel pin Parallel pin Flat cylinder w/turntable Guide plate Bearing guide A Bearing guide B Bearing guide C Bearing guide D Carbon steel 1 MGPL63 to 100White anodized White anodized White anodized Chromated Chromated Nickel plated High carbon chromium bearing steel 2 3 4 5 6 7 8 9 10 11 12 High carbon chromium

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

VQ

L size 20 260.5 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

XL

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)

asilltr

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

IIIIIII

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

RB/RBL/RBQ

Substitute 11.7 J for E and 0.3 for . 30.7 36.8 43.0 67.5 73.6 92.0 153 J 38.5 46.2 53.9 84.7 92.4 115 192 Substitute both absorbed energy E and collision speed for Data A in order to calculate the corresponding weight of the impacting object. 50.3 60.3 70.4 111 121 151 251 Me 260 kg D63.6 76.3 89.1 140 153 191 318 7.

45

fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18 323 19 335.5 20 348 21

Valve Single Unit

fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18 323 19 335.5 20 348 21

MLGP

Auto switches are shipped together, (but not assembled). 50 63 80 100 20 25 32 40 50 mm 63 mm 80 mm 100 mm 20 mm 25 mm 32 mm 40 mm Locking direction Extension locking Retraction locking F B Cylinder stroke (mm) Refer to Standard Stroke on page 9-11-21. Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

Lubricator Series AL10 to 60

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. P1 = 0.1 MPa 0.04 0.04 0.02 0.02 Selection Warning 0 0 15000 10 5000 0 2000 4000 6000 0 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Piping 1. Do not introduce air from the outlet side as this can damage the damper. 1.

IDX-OM-W010

330 IDF2E Rc3/8 51 232 138 24 327 IDF3E Rc3/8 473 67 304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF4E / IDF6E / IDF8E, IDF11E A B E D Q Switch with lamp thermometer Evaporation F G Ventilation Drain Drain check window Compressed air inlrt check window air outlet Port size C Ventilation direction Ventilation Compressed air outlet direction Port size (O.D.10 length Drain tube

IDX-OM-W038

()2 IDH Series 26 2.3 IDX-OM-W038 3. / / 3 3.1 ON 3.2 3.2 2 1 ON PV SV (3.3 ) 5, 10 PID ( 3.10.5 ) 2 1 IDH Series 31 3.1 IDX-OM-W038 3. / 21 ()0.15MPa ONOFF 0.15MPa 3.3 SV [] SV25.030.0 1.

End Lock Cylinder Series CBG1

130 40 204 100 10 26 M26 x 1.5 23 100 1/2 21 130 40 204 4 End Lock Cylinder Series CBG1 With front lock: CBG1BN Bore size Stroke R GB (mm) Bore size (mm) DL1 GB S TB ZZ 20 19.5 10 (12) 80 (88) 11 117 (125) 25 19.5 10 (12) 80 (88) 11 122 (130) 32 20 10 (12) 81 (89) 10 (11) 123 (131) 40 19 10 (13) 87 (96) 10 (12) 139 (148) 50 23.5 12 (14) 102 (114) 12 (13) 162 (174) DL1 63 23.5 12 (14)

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Allowable radial load Shaft load N 340 (76.4 lbf) Allowable thrust load Bearings Bearing Side ports, Top ports Port position Rc 1/8 Side ports Size Rc 1/8 Top ports Basic type, Foot type Mounting JIS symbol Internal volume cm (in ) Double vane (D) Single vane (S) Class Rotation 90 98 (5.0) 70 (4.3) 180 Standard 94 (5.7) 270 118 (7.2) 100 104 (6.3) 73 (4.4) 190 Optional 97 (5.9) 280 121

Mechanical Valves Series NVM, NVFM, NVZNI

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

Air Cylinder NCQ7 Series Compact Cylinder

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

High Vacuum Angle Valve, XL Series

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum