3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

VQ

Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17 2 41

IIIIIII

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

MXU

MG Minimum Operating Pressure (MPa) Symbol Specifications Min. operating pressure (MPa) 6 0.12 10 0.06 16 CX Bore size (mm) -XB13 Low speed cylinder (5 to 50 mm/s) 0.06 DTheoretical Output (N) -X Operating pressure (MPa) Operating direction Bore size (mm) 0.7 0.5 0.3 2015 11 6 IN 6 20 14 8 OUT Data 46 33 20 IN 10 55 39 24 OUT 121 86 52 IN 16 141 101 60 OUT Standard Stroke Bore size (mm) 6

Compact

0.022 16 2 0.038 20 3 0.055 25 5 0.09 Kinetic energy E [J] = 2 m1: Cylinders moving parts weight kg m2: Load weight kg V: Piston speed at the end m/s * The piston speed when the piston (rod) of a cylinder is reached at the stroke end is calculated by multiplying the average speed by 1.4 Moving Parts Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 34 36 38 41

45

L dimension 33 No. 510.5 34 523 35 535.5 36 548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension

3 Port Solenoid Valve Series VQ100

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-3Aq

3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

Fieldbus System

IP67 cannot be guaranteed if the screws are not tightened to the specified torque. 41 Series EX260 Specific Product Precautions 2 Be sure to read before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) and Operation Manual for 3/4/5 Port Solenoid Valve Precautions.

Low Profile Slide Table Series MXF

MXS MXQ +1 0 mm Stroke length tolerance Extension end 5 mm/Retraction end 5 mm Stroke adjustment range MXF MXW IN MXJ OUT Theoretical Output (N) MXP Operating pressure (MPa) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction 0.7 0.6 0.5 0.4 0.3 0.2 MXY OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 MTS 79 68 57 45 34 23 OUT 113 12 6 60 51 43 34 26 17 IN 85 OUT 201 141 121

IDX-OM-W010

Model IDF4E/6E/8E/11E/15E1-10-R IDF15E1-20-R IDF4E/6E/8E/11E-20-R Item Rated current : (A) 10 5 Current sensitivity : (mA) 30 IDF Series 12-1 Safety instructions 121 IDX-OM-W010 Air Dryer 12 Specification for Option R 12-3 Power supply connection procedure 1) Take off the rear panel. 2) Insert the power cable prepared by the customer into the power code fixture and bring the power cable near

IDX-OM-O004E

Ground Fault Circuit Interrupter To the users machine Terminal connecting screw: M5 Connector width: 9.5mm or less Applicable electrical wire: 1.25mm2 or more L ,N: Power supply N L Ground fault display button (white) test button (gray) 121 12. Specification for Option R 3) Connect the power cable to the terminal of the GFCI. 4) Connect the ground line.

IDX-OM-W038

(2) 17. 18. 19. 20. () IDH Series 22 2.2 IDX-OM-W038 2. 2.2.2 6.2 IDF-AB500 1 2 600mm 600mm 600mm 600mm 600mm 600mm 600mm 600mm 1 2 IDH Series 23 2.2 IDX-OM-W038 2. 2.2.3 4040 3 2 121 2.2.4 10mm ( IDH Series 24 2.2 IDX-OM-W038 2. 2.2.5 ,(6-1 ) 1 2 3(0.61Nm) 4 5 (17) (17) 3 7 6 5 1 2 4 PE M3 6.5mm (N.O) 2 1.25mm (N.C) IDH Series 25 2.2 IDX-OM-W038 2. 2.3

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

End Lock Cylinder Series CBG1

32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200 63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

Mechanical Valves Series NVM, NVFM, NVZNI

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

Platform Cylinder Series CXT

Long Stroke (mm) X Y Z Bore size (mm) Stroke range (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 528 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4 x M8 x 1.25 4 x 8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4 x M10 x 1.5 depth 15 (N) T PA T

High Vacuum L Type Valve

48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0003 6.