Air Cylinder

40.5 2 16 8.5 8.5 17 29 41 47 71 89 101 2.5 JMB 6 7.5 16.5 20.5 34.5 1 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 8.5 16 28 40 1.5 MB 16 8 16.5 28.5 40.5 46.5 70.5 88.5 100.5 2 6 8.5 17.5 21.5 35.5 2 D-C7l/C80 D-C73C D-C80C MB1 10 9.5 17 29 41 2.5 16 9 17.5 29.5 41.5 47.5 71.5 89.5 101.5 3 CA2 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 11.5 19 31 43 4.5 CS1 16 11 19.5 31.5 43.5 49.5 73.5 91.5 103.5

Vacuum Module Series ZX

ZH Operation Solenoid valve/Air operated valve ZU Power supply voltage 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) ZL Vacuum pressure switch unit Series ZS Adsorption confirmation switch Vacuum switch Adsorption confirmation switch Vacuum switch Series ZY Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa ZF 3% or less 0.5 kPa Hysteresis 2 to 25 0.3 to 1.2 2

Air Slide Table

41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than thrust Single sideported type (MXQC) When a lower height is required When two indicator LEDs need to be observed on one

CJ2

to 125 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 35.5 40.5 41 34.5 39.5 40 41 41.5 D-C7/C80 D-C73C D-C80C D-H7/H7C D-H7W/H7BAL D-H7NF 6 10 16 6 10 16 10 16 8.5 9 8.5 7.5 8 7.5 9.5 9 17.5 16.5 17 16.5 15.5 16 17 17.5 21.5 28.5 29 20.5 27.5 28 29 29.5 2 2.5 3 1 1.5 2 3 3.5 89 101 47 71 D-H7C D-A7 D-A80 88 100 46 70 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-A7/A80 17.5 10 89.5

MGP

to 250st 85 95 10 to 74st 0 0 75 to 100st 18.5 18.5 101 to 250st 43 49 40 to 100st 55 65 101 to 250st 85 95 10 to 39st 1 3 40 to 100st 13 19 101 to 250st 43 49 12 16 12 16 A E A E Bore size (mm) Bore size (mm) 20 to 74st 53 53.5 75 to 200st 84.5 85 201 to 400st 122 122 20 to 74st 0 0 75 to 200st 31.5 31.5 201 to 400st 69 68.5 40 to 124st 80 85.5 20 to 39st 63 69.5 125 to 200st 104 104.5

Environment

15.9 87 101 to 500 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 Note 1) Range within which the rod can move.

CV/MVGQ

8 57.5 18 13 M20 x 1.5 13 26 5 8 15 24 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 15.5 M10 x 1.25 5.5 33.5 45 10 63.5 22 13 M26 x 1.5 17 32 6 8 15 30 19.5 M10 x 1.25 5.5 37.5 45 12 68 22 13 M26 x 1.5 17 32 6 8 15 34.5 19.5 M14 x 1.5 7 46.5 50 14 76 24 16 M32 x 2 22 41 8 10 21.5 42.5 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to

24

200 300 0.5 10 30 31 50 100 101 200 300 Stroke [mm] Stroke [mm] MGPL32 to 63, MGPA32 to 63 MGPL32 to 63, MGPA32 to 63 50 50 50, 63 50, 63 Load mass m [kg] Load mass m [kg] 50, 63 50, 63 32, 40 50, 63 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100

MG

300 200 0.5 10 20 30 31 50 100 101 300 200 DStroke (mm) Stroke (mm) -X MGPL32 to 63 MGPL32 to 63 50 50 20Data Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

M A B C D E F G H P U Load [kN] Weight [g] Angle 32 JA30-10-125 M10 x 1.25 49.5 19.5 24 5 8 8 17 9 0.5 2.5 70 0.5 40 JA40-12-125 M12 x 1.25 60 20 31 6 11 11 22 13 0.75 4.4 160 50, 63 JA50-16-150 M16 x 1.5 71.5 22 41 7.5 14 13.5 27 15 1 11 300 80, 100 JAH50-20-150 M20 x 1.5 101 28 31 59.5 11.5 24 16 32 18 2 18 1080 * Black color Rod clevis: GKM (ISO 8140) l1 [mm] Bore size [mm] Part no.

LEY-OM007

41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

Compact Cylinder Series CQS

bumper 2 g Option mass: Double clevis style 92 g Mass/Without Auto Switch (g) Cylinder stroke (mm) Bore size (mm) 250 300 200 175 150 125 25 100 15 20 30 35 40 50 75 10 5 45 12 312 279 246 213 56 180 42 49 63 93 100 113 147 36 29 107 16 397 355 313 271 73 229 56 64 82 128 145 187 47 119 38 136 201 g 20 627 562 498 434 101 114 127 370 88 153 178 306 75 140 63 166 25 794 952 715 636 557

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA F H MM U FD FT FX FY ZX ZY Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 4 39 44 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 5 45 55 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 5 55 67 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA MM U FD FT FX FY ZX ZY F H Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 44 4 39 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 55 5 45 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 67 5 55 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

ZP

Form w 1 Material e Vacuum inlet r Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type Connection M5 x 0.8 thread B 10 B5 41 25 2.5 M5 x 0.8 5 16 42 26 25 48 30 3.5 10 N S U F GN GS N4 N6 U4 U6 41 25 2.5 M6 x 1 6 16 42 26 25 48 30 3.5 40 57 39 6 25 B8 48 30 3.5 M8 x 1.25 8 40 57 39 6 ZP Y D C2 B6 Construction p. 117 Adapter Assembly p. 123 Dimensions Per Vacuum

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

CQS

MU Theoretical Output (N) OUT IN DAllowable Kinetic Energy (J) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm 2) Bore size (mm) 12 16 20 25 Bore size (mm) 0.3 0.5 0.7 -X Standard 0.022 0.038 0.055 0.09 84.8 IN 25 42 59 12 6 With rubber bumper 0.043 0.075 0.11 0.18 20113 OUT 34 57 79 151 IN 45 75 106 16 8 Data Minimum Operating Pressure (MPa) 201 OUT 60 101 141

Step Motor Controller

Operating temperature range 41 to 122F (5 to 50C) Operating humidity range [%RH] 90 or less (No condensation) Weight [g] 350 (Except cable) Note) CE-compliance The EMC compliance of the teaching box was tested with the LECP6 series step motor controller (servo/24 VDC) and an applicable actuator.

Air Slide Table Series MXS

MTS With end lock (16) MXS16-R With buffer (16) MXS16-F 2 x M6 x 1 thread depth 10 Operating port 2 x M5 x 0.8 13 J 12 18 48 41 20 3 37.5 0.5 30 Other dimensions are the same as the basic style.