High Vacuum L Type Valve

48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121

High Vacuum L Type Valve

48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.

High Vacuum L Type Valve

48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

CEx-OMQ0013

Err42 Err8 No.1ON ON ON LEDNo.10 Err9 3 P3 2 P2 Err9 Err9 ON ON ON ()5mm Err5 5mm 1 1 Err10 Err11 CPU Err12 ON 8P8 48 11-2 () 200 200 6P6 *L=1mm *200.0 1 PRG STEP P6 200 200 300mm/sec 50% 35% 49 12. 121 No. P1 No.

MRQB-OM0002

2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121

Fieldbus system (DeviceNet compliant)

Terminating resistor is 121 1%, 1/4 W (Refer to Fig. 2). Refer to Fig. 3 about how to connect to the unit. Tighten the connector fixing screws (M2.5 slotted head screws) firmly with a tightening torque of 0.2 to 0.3 Nm. -16No.EX-OMI0003-H 2. Power supply wiring Connect power supply wiring to the two power supply 2-pin connectors.

CXT

Long stroke (mm) Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke X Y Z Bore size (mm) Stroke range (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 SCXT Tube bore size A, #2(#2+#3) SCXT Tube bore size B, #2(#2+#3) 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150,

MXU

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimum Operating Pressure (MPa) Symbol Specifications Min. operating pressure (MPa) 6 0.12 10 0.06 16 CX Bore size (mm) -XB13 Low speed cylinder (5 to 50 mm/s) 0.06 DTheoretical Output (N) -X Operating pressure (MPa) Operating direction Bore size (mm) 0.7 0.5 0.3 2015 11 6 IN 6 20 14 8 OUT Data 46 33 20 IN 10 55 39 24 OUT 121

3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

VQ

Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17 2 41

IIIIIII

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

MXU

MG Minimum Operating Pressure (MPa) Symbol Specifications Min. operating pressure (MPa) 6 0.12 10 0.06 16 CX Bore size (mm) -XB13 Low speed cylinder (5 to 50 mm/s) 0.06 DTheoretical Output (N) -X Operating pressure (MPa) Operating direction Bore size (mm) 0.7 0.5 0.3 2015 11 6 IN 6 20 14 8 OUT Data 46 33 20 IN 10 55 39 24 OUT 121 86 52 IN 16 141 101 60 OUT Standard Stroke Bore size (mm) 6

Compact

0.022 16 2 0.038 20 3 0.055 25 5 0.09 Kinetic energy E [J] = 2 m1: Cylinders moving parts weight kg m2: Load weight kg V: Piston speed at the end m/s * The piston speed when the piston (rod) of a cylinder is reached at the stroke end is calculated by multiplying the average speed by 1.4 Moving Parts Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 34 36 38 41

45

L dimension 33 No. 510.5 34 523 35 535.5 36 548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension

3 Port Solenoid Valve Series VQ100

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-3Aq

3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

Fieldbus System

IP67 cannot be guaranteed if the screws are not tightened to the specified torque. 41 Series EX260 Specific Product Precautions 2 Be sure to read before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) and Operation Manual for 3/4/5 Port Solenoid Valve Precautions.

Low Profile Slide Table Series MXF

MXS MXQ +1 0 mm Stroke length tolerance Extension end 5 mm/Retraction end 5 mm Stroke adjustment range MXF MXW IN MXJ OUT Theoretical Output (N) MXP Operating pressure (MPa) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction 0.7 0.6 0.5 0.4 0.3 0.2 MXY OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 MTS 79 68 57 45 34 23 OUT 113 12 6 60 51 43 34 26 17 IN 85 OUT 201 141 121