Stations: 20 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 6 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 3 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 14 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 11 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT)

Stations: 10 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: NPTF

Stations: 10 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: T (NPTF)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

10-, 21-) Vacuum port (11-, 22-) Effective thread length FL NA Width across flats B2 G H2 NN Width across flats KA G Width across flats B1 H1 MM NA 20, 25 Eh8 D Standard port 45 Relief port (10-, 21-) Vacuum port (11-, 22-) 1.5 A AL K ZZ + Stroke S + Stroke H F 32, 40 (mm) ZZ H H2 H1 S P I G E D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K AL F 8 13 0 1/8 138 109 107 103

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

MK

MI W S CEP1 Graph (2) CE1 3 MK250/63 CE2 Mounting bolt for MK2B 2 When arms moment of inertia is 5 x 103 kgm2, cylinder speed should be less than MK232/40: 66 mm/s MK250/63: 120 mm/s. For calculating moment of inertia, refer to page 10-7-21. Mounting method: Mounting bolt for through-hole type is available as an option. Ordering: Add the word MK2B in front of the bolts to be used.

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Refrigerated Air Dryer

AFF Select accessories sold separately. 6 Refer to page 103.

LEC-T1_C

.** .101 (9) TB .102 (9-1) TB . 102 (9-2) TB . 103 (9-3) TB . 103 (10) .104 3 - (10-1) . 104 6.4 .105 1.105 11. 105 2.106 21. 106 3.107 31. 107 7. /.109 8. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

CY1

fittings which exceed the above weights. 5 Series CY1B 6 Series CY1B Magnetic Rodless Cylinder Basic Type Dimensions Basic type CY1B6, 10, 15 (mm) MM x J M3 x 0.5 x 4.5 M3 x 0.5 x 4.5 M4 x 0.7 x 6 D 7.6 12 17 B 17 25 35 F 9 9 10 G 5 5 5.5 H 14 12.5 13 K 5 4 11 L 35 38 57 N 10 11 11 NA 14 14 17 NN M10 x 1.0 M10 x 1.0 M10 x 1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103

MK

C MK2B20-10 MK2B20-20 MK2B25-10 MK2B25-20 MK2B32-10 MK2B32-20 MK2B40-10 MK2B40-20 MK2B50-20 MK2B50-50 MK2B63-20 MK2B63-50 6 8.5 Moment of inertia (kgm2) 4 MK2l20/25 10.5 2 10 103 6 6 10.5 10.5 4 Operating range 2 9 104 50 100 200 66 120 Cylinder speed (mm/s) ITo attach and detach the arm to and from the piston rod, fix the arm with a wrench or vise and then tighten the bolt.

MXW

hexagon socket hole 2.5 J 12 6.5 MX MTS MY Width across flats 8 5H9 +0.030 depth 4.5 0 CY 6-M4 x 0.7 thread depth 6 (Helisert) 6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX 27 58 46 D-X (Y) 29 26 103 26 (Y) 20L 5H9 +0.030 depth 4.5 0 Data 10 15 15 K A 35

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

MXW Series Long Stroke Slide Table

only on B type(with shock absorber). 146 146 146 Long Stroke Slide Table MXW Series Dimensions MXW 12 Stroke: 100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole