Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

connector Note Note Stations Stations Symbol Symbol 02 02 2 stations 2 stations Double wiring Note 1) Connector mounting position Double wiring 10 11 10 stations 11 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to 22 solenoids possible) Specified layout Note 2) (Up to 21 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

JXCx-OMU0026

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, setting date and time, Alarm and error check . 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Setting date

Compact Rotary Actuator Series CRQ2

D: Shaft dimension S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU CA CB F H J JA JB Size Rotating angle 20 30 40 90, 180, 360 63 (11) 14 34 14.5 30.4 7 4.7 10 2.5 30 M 8 x 1.25 11 6.5 50 25 90, 180, 360 69 (11) 14 39 16.5 49 16 34.7 8.1 4.9 12 3 32 M10 x 1.5 14 8.5 68 30 90, 180, 360 78 (13) 16 47 18.5 55 16 40.4 8.3 5.2 15 3 36 M10

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

30

Plug: KQB2P Applicable fitting size d A Weight (g) D L L Model A KQB2P-01 KQB2P-03 KQB2P-07 KQB2P-09 KQB2P-11 KQB2P-13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2.8 4.3 9.4 16.3 22.2 40.7 5 6 8 10 11 14 28.9 29.6 30.3 33.7 34.1 36.4 16.9 17 16.8 17.6 17.5 17.9 D d Applicable fitting size d 14 Metal One-touch Fittings Applicable Tube: Metric Size, Connection Thread: G Series KQB2 RoHS Applicable Tube

Magnetically Coupled Rodless Cylinder

CY3RG25 CY3RG32 CY3RG40 16 Series CY3R Auto Switch Proper Mounting Position for Stroke End Detection Auto Switch Operation Range (Reference dimension) Bore size (mm) Auto switch model 15 20 25 32 40 D-A9 8 6 D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

CY3RG25 CY3RG32 CY3RG40 16 Series CY3R Auto Switch Proper Mounting Position for Stroke End Detection Auto Switch Operation Range (Reference dimension) Bore size (mm) Auto switch model 15 20 25 32 40 D-A9 8 6 D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Regulator

Product (15) Plug assembly -24- 11. Disassembly Drawing 11-1. AR20-D/ AR30-D/ AR40-D/ AR50-D/ AR60-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring (Protrusion on IN side) Washer (only for 50 and 60 sizes) Pressure regulating screw assembly (12) Valve guide assembly Pressure regulating spring Cover (11) Diaphragm assembly Cap OUT Body I N -25- 11-2.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Solid State Auto Switches

Weight (g) Model D-A90 6 30 D-A90V 6 30 D-A93 6 11 30 47 D-A93V 6 30 47 D-A96 8 41 D-A96V 8 41 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-A90/D-A93/D-A96 D-A90V/D-A93V/D-A96V 2 2.8 4.5 2.7 Slotted set screw M2.5 x 4 L 4 24.5 (22) 22 2 6 Slotted set screw M2.5 x 4 L D-A90 without indicator light Indicator light 2.7 D-A90V without indicator light Indicator

NCM

D-M9W D-A9 D-A9V D-H7C D-C73C D-C80C D-G5NTL D-B5 D-B59W D-B64 Auto switch model D-M9V D-M9WV D-H7 D-H7W D-H7BAL D-H7NF D-C7 D-C80 (in) D-M9 D-M9W D-A9 D-H7 D-H7W D-H7C D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-G5NTL D-B5 D-B64 D-B59W Auto switch model HS 0.96 1.02 1.12 1.22 1.34 1.59 HS 0.98 1.04 1.14 1.24 1.36 1.61 HS 0.85 0.91 0.96 1.06 1.18 1.44 HS 0.87 0.93 0.98 1.08 1.20 1.46 HS 0.98

Manifold Specifications

Fig. (1) Black White 1 station (11 stations) A side coil B side coil (b) Lever Black White 2 station (12 stations) A side coil D-sub connector Connector terminal no. Black B side coil Black White 3 station (13 stations) White A side coil (3) Remove the housing cover from the D-sub connector portion of the SUP/EXH block assembly. (Refer to Fig. (1).)

JA/JAH/JB/JS

5 7 8 7 10 13 17 22 27 14.4 19 24.8 29 38.4 49.2 17 23 29.9 33.5 38 47.5 80 210 JS20-8-125 JS32-10-125 M8 x 1.25 M10 x 1.25 43.9 49.5 1100 2500 6000 11000 JS40-14-150 JS63-18-150 M14 x 1.5 M18 x 1.5 60 74.5 11 13.5 Rod end nut (mm) d: Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10

JA/JAH/JB/JS

end nut (mm) d: Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10 x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

CQS

D-A9l D-A9lV D-F9N/D-F9B D-F9P/D-F9lW D-F9lV/D-F9lWV Symbol A B W A B W A B W A B HS Double acting: single rod, Single acting: single rod/spring return, spring extend 4.5 (3.5) 5.5 (6.5) 1.5 (2.5) 1.5[4] (2.5[5]) 2[4.5] 1.5[1] 3.5[-1] 1.5 (2.5) 12 19 5.5 4.5 5.5 17 0 0 Bore size (mm) 16 20 25 21 24.5 26.5 4 7.5 9.5 6 10 11 6 2.5 0.5 4 7.5 9.5 6 10 11 19 22.5 24.5 0 3.5 5.5 2 6 7 0 3.5 5.5

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.