HRX-OM-X027

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-S010

-5 5.4 Communication sequence . 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

HRX-OM-T004

5-5 5.4 Communication sequence. 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

HRX-OM-Q033

5-5 5.4 Communication sequence. 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

HRX-OM-M091

5-5 5.4 Communication sequence. 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

HRX-OM-R028

sequence .5-11 5.5 Message configuration.5-12 5.5.1 Message format .5-12 5.5.2 Message example.5-14 5.6 BCC .5-15 5.7 Command .5-15 5.8 Command explanation .5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature.5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R).5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W).5-18 5.8.4 Command:LOC Key-lock setting (R) .5-19

SL5200

Sub-atmospheric (A): 100 mm Hg absolute to 30 psig (-88kPa to 0.2 MPa) Code Bonnet Standard Panel installation 5) 02 FV4 MV4 TW4 FV6 MV6 TW6 No code P 06 10 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5) Panel mounting hole: dia. 1.56 inch (39.6 mm).

PF2A/PF2W

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Voltage output 1 to 5 V within the flow rate range Linearity: 5% F .S. or less; allowable load resistance: 100 k or more.

HRX-OM-S004

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main Display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check monitor menu . 5-9 5.5.1 Check monitor menu . 5-9 5.5.2

HRX-OM-T002

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main Display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check monitor menu . 5-9 5.5.1 Check monitor menu . 5-9 5.5.2

Pin Cylinders Series CJP2/CJP

Relay, PLC 24 V Yes Grommet 3-wire (NPN) IC circuit Diagnostic indication (2-color) 5 V, 12 V 3-wire (PNP) 12 V 2-wire A96V A96 IC circuit 5 V 3-wire (NPN equiv.)

HRX-OM-W058

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

VQ7-6/7-8

Rc Nil EVS NPTF T G F VFN By mounting an individual EXH spacer on a manifold block, individual exhaust is possible from both R1 and R2. {3 (R2) and (R1) are individual ports.} 1 1 2 4 5' 5 3 3' 5 3 Conversion adapter plate VV72-V-1 This conversion adapter plate allows a VQ7-6 (size 1) valve to be mounted on a VQ7-8 manifold base.

VQ7-6/7-8

Rc Nil EVS NPTF T G F VFN By mounting an individual EXH spacer on a manifold block, individual exhaust is possible from both R1 and R2. {3 (R2) and (R1) are individual ports.} 1 1 2 4 5' 5 3 3' 5 3 Conversion adapter plate VV72-V-1 This conversion adapter plate allows a VQ7-6 (size 1) valve to be mounted on a VQ7-8 manifold base.

3 Port Air Operated Valve

Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

products. 7 3-Screen Display RoHS High-Precision Digital Pressure Switch: For General Fluids ISE70G/75G/76G/77G Series How to Order ISE70G 02 M L2 Pressure range Piping specification Symbol Description ISE70G 0 to 1 MPa ISE75G 0 to 2 MPa ISE76G 0 to 5 MPa ISE77G 0 to 10 MPa Symbol Description 02 Rc1/4 N02 NPT1/4 F02 G1/4*1 Option 3 Symbol Description Nil Operation manual Y None *1 ISO 1179

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

For replacement parts, refer to page 2-5-47. Refer to pages 2-5-40 to 2-5-43 for control unit.