LMU100/200 Series Mist Spray Unit

1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18 NBR 4 KA00087 1065 A LMU100/200 Series Related Products Mixing Valve: LMV Series Specifications Inlet air pressure Ambient and fluid temperature 0.3 MPa Max. 5 to 60C T0604

Soft Start-up Valve

Dimensions are completely the same as D type DIN connector. 14 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Series 12-REA Sine rodless cylinder

14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x 11.5 M12 x 1.25 x 7.5 192 180

EXxx-OMS0026CN

No.EX-OMS0026CN TMSI EtherNet/IP // EX600-SEN3/4 EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 17 LED 21 25 25 26 27 27 28 28 29 29 29 31 32 42 42 58 62 63 64 EDS 64 TM 64 Logix Designer Device Level Ring (DLR) 69 TM 69 QuickConnect TM 71 EtherNet/IP Web 77 86 -1No.EX-OMS0026CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating

EXxx-OMP0004CN

RXBFRXB0 16BH RYBFRYB0 RX1F RY1F 31 EX260-SMJ3/4 I/O (1 ) (RX) (RY) RX00 RY00 0 RY01 1 RY02 2 : : RY0E 14 RX0F RY0F 15 RX10 RY10 RX1F RY1F I/O 32 /32 0OFF 1ON -19No.EX-OMP0004CN-I 0OFF 1ON 16 32 A D SI B 0 SI ()A B B (a (b 01 ONOFF(0OFF1ON)0 a b -20No.EX-OMP0004CN-I SI SI SI PWR LED No.1 SI PWR(V) LED No.2 Yes No SI SI L ERR LED No.3 L RUN LED or SI No.4 L ERR

3M/SMseries

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

PS-OMH0005CN

DC12~24V DC12~24V DC(+) DC(-) 8 / / 9 () 10 / 5m / 11 20~30 20 "-M" (kPaMPa) SI kPa,MPa ( ) "-M" 12 13 -33No.PS-OMH0005CN-D No. 14 15 () () ( ) ( ) / 16 ON ON OFF PSE530 PSE530 OFF -34No.PS-OMH0005CN-D OUT1 OUT2 80mA 5 F.S.(2.5F.S.) 2 -35No.PS-OMH0005CN-D PSE20 1 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.11 MPa 10-101 kPa -10101 kPa -101101 kPa 0.1 kPa 0.1 kPa 0.1 kPa

Digital Flow Switch Series PFA For Air Series PFW For Water

Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Class 3 Class 2 Symbol 01 02 03 04 06 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Class 3 Class 4 Class 2 Orifice diameter 2mm 3mm 4mm 5mm 7mm 10mm Symbol 2 3 4 5 7 10 Electrical entry CConduit GGrommet Refer to the table below for orifice and port size combinations.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 7 regarding the maximum number of stations.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5

Information

(mm) ASG32F-01 4 ASG42F-02 6, 8 ASG52F-03 6 ASG62F-04 Sealant: Special FKM Seat ring: Stainless steel 303 8 12 4, 6 8, 10 10, 12 Flow rate (l/min (ANR)) 460 790 920 1580 100 180 230 390 Controlled (free) flow 7 12 14 24 1.5 2.7 3.5 6 Effective area (mm2) Applicable tubing materials Note) Flow rate is measured at 0.5 MPa and 20C.

VXZ

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

Shuttle Valve/AND Valve with One-Touch Fittings

Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...

NCA1

ME3 w/Head Square Mount 13 8 14 ME4 w/Cap Square Mount 14 8 14 MP1 w/Double Rear Clevis 14 8 14 MP2 w/Double Detachable Rear Clevis 15 8 14 MP3 w/Cap Fixed Eye 15 8 14 MP4 w/Single Detachable Rear Clevis 15 8 14 MS1 w/Foot Mount 16 8 14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion

Air Cylinder NCA1 Series

ME3 w/Head Square Mount 13 8 14 ME4 w/Cap Square Mount 14 8 14 MP1 w/Double Rear Clevis 14 8 14 MP2 w/Double Detachable Rear Clevis 15 8 14 MP3 w/Cap Fixed Eye 15 8 14 MP4 w/Single Detachable Rear Clevis 15 8 14 MS1 w/Foot Mount 16 8 14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion

Air Cylinder

14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14