Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 07 (Ø1/4"), Sealant: None, Push-lock Type: A (Push-lock type)

Body Size: 3 (3/8), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread: N (NPT), Port Size: 02 (1/4), Applicable Tubing: 07 (ø1/4"), Seal Method: None

Size: 25 (Size 2500, Flow 750Nl/min), Stations: 7 Stations, Piping Specification: A (IN: Common), Thread: Rc(PT), Port Size: 02 (PT 1/4), Accessory: G2 (Pressure Gauge Vertical Face Thread)

Size: 30 (Size 3000, Flow 900Nl/min), Stations: 7 Stations, Piping Specification: A (IN: Common), Thread: N (NPT), Port Size: 03 (PT 3/8), Accessory: G1 (Pressure Gauge Back Face Thread)

Number of Ports: 3 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: 02 (R 1/4), Actuator Type: 07 (Cross Roller Plunger), Suffix: None

Size: 30 (Size 3000, Flow 900Nl/min), Stations: 7 Stations, Piping Specification: A (IN: Common), Thread: N (NPT), Port Size: 03 (PT 3/8), Accessory: G2 (Pressure Gauge Vertical Face Thread)

Size: 25 (Size 2500, Flow 750Nl/min), Stations: 7 Stations, Piping Specification: A (IN: Common), Thread: Rc(PT), Port Size: 02 (PT 1/4), Accessory: G1 (Pressure Gauge Back Face Thread)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread: R (or Metric), Port Size: 02 (1/4), Applicable Tubing O.D.: 07 (ø1/4"), Seal: w/o Sealant

Size: 25 (Size 2500, Flow 750Nl/min), Stations: 7 Stations, Piping Specification: A (IN: Common), Thread: N (NPT), Port Size: 02 (PT 1/4), Accessory: G2 (Pressure Gauge Vertical Face Thread)

Size: 25 (Size 2500, Flow 750Nl/min), Stations: 7 Stations, Piping Specification: A (IN: Common), Thread: N (NPT), Port Size: 02 (PT 1/4), Accessory: G1 (Pressure Gauge Back Face Thread)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 1 (Meter-in), Model: 1FS, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: without Sealant

Size: 30 (Size 3000, Flow 900Nl/min), Stations: 7 Stations, Piping Specification: A (IN: Common), Thread: Rc(PT), Port Size: 03 (PT 3/8)

Table of Contents

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Table of Contents

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

V100

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.