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VQZ100 / How to Order Valve Series VQZ 1 5 1 5 M 1 C3 CE compliant CE marked Nil Q 1 VQZ100 body width 10 mm Note) For CE compliant models, DC-type only. Type of actuation 1 N.C.

CM2

47 5.5 20 19.5 17 32 6 8 33.5 M10 x 1.25 15 30 M26 x 1.5 1/8 32 55 40 3.2 45 28 8 6.8 25 13 4 8 22 12 47 5.5 20 19.5 17 32 6 8 37.5 M10 x 1.25 15 34.5 M26 x 1.5 1/8 40 75 55 3.2 50 30 11 7 27 16 4 10 24 14 54 7 23 21 22 41 8 10 46.5 M14 x 1.5 21.5 42.5 M32 x 2 1/4 Dimensions by Stroke Built-in One-touch Fittings Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Q P

NCQ8

Q Z 4 places C-depth D-rod dia.

Lightweight and Compact

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

Rotary Clamp Cylinders

0.15 17 17 10 0.07 0.15 2 x 4 x M6 x 1.0 4.5 C A R Q Through-hole/Both Ends Tapped Common (Standard) (mm) Clamp stroke 20 mm Clamp stroke 10 mm Bore size A B C Q R S Q R S 20 25 136.5 130.5 69 36 47 25.5 116.5 110.5 59 139 133 69 40 52 28 119 113 59 23 Rotary Clamp Cylinder: Double Guide Type Series MK2T Dimensions: 32, 40, 50, 63 E 4 x F A B E B D 10 D C A F C G Head End Flange (mm) With

Compact

mm] L1 [mm] L1 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Horizontal/Bottom mounting 300 300 300 300 L2 200 200 200 200 L2 [mm] L2 [mm] L2 [mm] L2 [mm] m Y 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg

Stainless Steel 316 Fittings

Construction e q r q q Principal Parts Material Description No.

Electric Rotary Table

1 1 S K 6N q w e r t y u i o !

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-10 3 pcs.

ITV

0 10 NBR Seal 11 Stainless steel Bias spring !9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

Fieldbus system EtherCAT compatible SI Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V Selects the analogue input range. (AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

Free Mount Cylinder Series CU

10 11 8 8 8 8 10 12 9 12 17 20 22 29 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 15 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 DNN P Q QA R T Y S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40

VCL

(mm) 2 3 4 5 7 10 Class 4 v v v v v Symbol 2 3 4 5 7 10 VCW Refer to the below table for orifice and port size combinations.

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 10 or less 25 or less 30 or less 25 or less 30 or less 30 or less 18 or less 20 or less 10 or less 12 or less 28 or less 30 or less 28 or less 30 or less 28 or less 30 or less 21 or less 33 or less 10 or less 15 or less 33 or less 35 or less 33 or less 35 or less 33 or less 35 or less 12 or less 12 or less 10 or less 10 or less 20 or less 25 or less 20 or less 25 or less 25 or less

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

High Purity Chemical Valve

1/4, 3/8 LVC4m 10 10, 12 3/8, 1/2 LVC5m 16 12, 19 1/2, 3/4 LVC6m 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

Air Slide Table Series MXP

10 J 28 27 3 0 +0.030 , depth 1.5 4 6 10 9.5 Section AA 3 0 +0.030 , depth 1.5 Q QL Mounting datum level D B MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 DL 6 x M3 x 0.5, depth 4 2 x M3 x 0.5, depth 3.5 15 15 -X (mm) Individual -X G H J K L M N Q QL S V W Z Model MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20