Air Cylinder Series CM2

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

Fieldbus System

center 3-position exhaust center 3-position pressure center 4-position dual 3-port valve (N.C.

ITV

cores) Straight type 3 m 10 bit digital input INI-398-0-59 CC-Link PROFIBUS DP DeviceNetTM Straight type 3 m P398020-500-3 Power cable (4 cores) Right angle type 3 m P398020-501-3 Straight type 3 m P398020-500-3 Power cable (4 cores) Right angle type 3 m P398020-501-3 RS-232C Straight type 3 m P398020-502-3 Communication cables connector (5 cores) Right angle type 3 m P398020-503-3 Note

Vacuum Pad

4, 6, 8 Pad diameter Space-saving in the height direction How to Order ZP2 02 AU N Pad unit Pad diameter Pad material Symbol Symbol Pad diameter Blast type Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber N S U F GN GS 02 03 04 06 B08 2 3 4 6 8 Blast type: Work pieces can be removed easily.

Vacuum Pad

4, 6, 8 Pad diameter Space-saving in the height direction How to Order ZP2 02 AU N Pad unit Pad diameter Pad material Symbol Symbol Pad diameter Blast type Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber N S U F GN GS 02 03 04 06 B08 2 3 4 6 8 Blast type: Work pieces can be removed easily.

Vacuum Pad

4, 6, 8 Pad diameter Space-saving in the height direction How to Order ZP2 02 AU N Pad unit Pad diameter Pad material Symbol Symbol Pad diameter Blast type Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber N S U F GN GS 02 03 04 06 B08 2 3 4 6 8 Blast type: Work pieces can be removed easily.

Vacuum Pad

4, 6, 8 Pad diameter Space-saving in the height direction How to Order ZP2 02 AU N Pad unit Pad diameter Pad material Symbol Symbol Pad diameter Blast type Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber N S U F GN GS 02 03 04 06 B08 2 3 4 6 8 Blast type: Work pieces can be removed easily.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

Series VS

PORT SIZE APPLICABLE ISO SIZE 02 1/4" 1 CODE A, B, PORT SIZE / LOCATION APPLICABLE ISO SIZE NOTES 03 3/8" 1, 2 02 1/4" SIDE ONLY 1 NO PORTS ON BOTTOM OF MANIFOLD 04 1/2" 1, 2, 3 03 3/8" SIDE ONLY 1, 2 06 3/4" 2, 3 10 1" 3 04 1/2" SIDE ONLY 1, 2, 3 02B 1/4" BOTTOM 2, 3 SIDE PORTS PLUGGED 03B 3/8" BOTTOM 1, 2 02S 1/4" SIDE 1 03S 3/8 SIDE 1, 2 BOTTOM PORTS PLUGGED HOW TO ORDER LATERAL PLUG-IN

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Bracket Stainless steel 304 -8- 2-3 Dimensions 1) SFB300-02: Rc1/4 2) SFB302-02: TSJ1/4 (Tube Swage Joint) 3) SFB305-02, SFB315-02: URJ (Union Ring Joint) Model A SFB305-02 79 SFB315-02 84 -9- 3.

Thermo-chiller

3 w Parts List (170) No.

VCA

8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part no.

VCA

8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

SL5200

Code Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 02 06 10 Code Bonnet Standard Panel installation 3) Connections (Inletq, Outletw) No code P Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 2 Color 1 4 3 Bracket mount Connector pin assignments 44.5 9 34 Output -43 (Color: Gray) 1 Brown DC (+) MPa 2 White OUT1 (PNP) 3 Blue DC () 4 OUT1 Black OUT1 (NPN) U P DOWN Output -65 (Color: Black) SET 90 1 Brown DC (+) 2 White NC 15.4 2 x 6.5 3 Blue DC () PRESSURE SWITCH 2 4 Black OUT1 (PNP) 18.3 Output -27 and -67 9.9 (Color: Gray)

Soft Start-up Valve AV2000/3000/4000/5000 1

/Surge voltage suppressor Thread type Rc G NPT Nil F N None With surge voltage suppressor (Grommet type only) Nil S ITV With light/surge voltage suppressor (Not possible with grommet type) IC Z Port size VBA Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 VE G: Grommet Coil rated voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz

AS-FPQ/AS-FPG

(mm) ASD Release button color: Light gray 4 6 8 10 12 AS121FP-M5 AS221FP-01 AS221FP-02 AS321FP-03 AS421FP-04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 AS AS-FE KE Specifications AS-FG Air Class 3 (1) Fluid Cleanliness class (ISO class) Proof pressure (20C) Maximum operating pressure (20C) Minimum operating pressure Ambient and fluid temperature Oil AS-FP AS-FP 1.5 MPa (2) AS-FM 1 MPa (3) 0.1 MPa 5

AS-FPQ/AS-FPG

(mm) ASD Release button color: Light gray 4 6 8 10 12 AS121FP-M5 AS221FP-01 AS221FP-02 AS321FP-03 AS421FP-04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 AS AS-FE KE Specifications AS-FG Air Class 3 (1) Fluid Cleanliness class (ISO class) Proof pressure (20C) Maximum operating pressure (20C) Minimum operating pressure Ambient and fluid temperature Oil AS-FP AS-FP 1.5 MPa (2) AS-FM 1 MPa (3) 0.1 MPa 5