Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 <M5 type> <M5 type> -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

Compact Guide Cylinder

GA GB GC H HA J K L MM ML NN OA OB OL P PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5 9.5 16.5 15 20 33 12.5 9.5 9.5 12.5 78 M5 16.5 16.5 23 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 15.5 8.5 25 18 25 38

CM2

1/2 (Applicable cable O.D. 6.8 to 9.6) Hs D-G39A/K39A MB1 Hs G 1/2 (Applicable cable O.D. 6.8 to 9.6) CA2 Auto switch CS1 Auto switch D-A44A C76 Auto switch Hs C85 D-H7C Auto switch Hs C95 G 1/2 (Applicable cable O.D. 6.8 to 11.5) CP95 D-C73C/C80C Auto switch Hs NCM NCA D-X Proper Auto Switch Mounting Position Auto Switch Mounting Height D-B5 D-B6 D-B59W D-G5NTL D-H7C Hs 25.5 28 31.5

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

3

In the case of liquid: P Q = 53Kv (9) G Q : Flow rate [L/min] Kv : Flow coefficient [m3/h] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 232Kv P(P2 + 0.1) (10) Q : Flow rate [kg/h] Kv : Flow coefficient [m3/h] P : Pressure difference [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 230 Solenoid Valve

5 Port Solenoid Valve SY Series

4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) DIN External Pilot (Note 2) External Pilot (Note 2) terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 Sub-plate External pilot External pilot DIN External pilot terminal M8 SY9 40 connector Note 1) All AC voltage models have built-in surge voltage suppressor.

CA2

4 51 186 43 11.2 59 1/4 stroke 194 40 202 C95 50 90 3/8 58 206 52 11.2 66 1/4 stroke 214 222 63 98 3/8 58 214 52 11.2 66 1/4 stroke 222 230 CP95 80 116 1/2 71 258 65 12.5 80 1/4 stroke 267 276 100 126 1/2 72 270 65 14.0 81 1/4 stroke 279 288 NCM Axial Foot Style: CA2WLH NCA S + Stroke H H + Stroke 2-P (Rc, NPT, G) K A G G F K A F B1 4-J AL AL Width across flats KA With rod boot (One side)

CM2

1 to 300 22 41 47.3 8 10 24 14 46.5 21 16 52 7 5 66 40 36 82 11 50 32 Built-in One-touch fitting With air cushion (mm) Bore Bore Bore S Z K ZZ MM N NA NN P 1/8 1/8 1/8 1/4 G N1 WA P WB Q 20 20 62 107 5 116 M8 X 1.25 15 20 24 M20 X 1.5 17.5 8 13 6 8.5 23 25 25 62 111 5.5 120 M10 X 1.25 15 25 30 M26 X 1.5 17.5 8 13 6 10.5 26 32 32 64 113 5.5 122 M10 X 1.25 15 32 34.5 M26 X 1.5 17.5 8 13 6 11.5

2/3 Port Solenoid Valve for Chemicals

Material Part list/LVM11 Body 1 PEEK Diaphragm assembly 2 EPDM/FKM/Kalrez t Spacer 3 PBT Armature assembly 4 Stainless steel/POM r Coil assembly 5 u y Sleeve 6 Iron Return spring 7 Stainless steel w e Board assembly 8 q !1 Casing 9 PBT Plug 10 NBR O-ring 11 NBR LVM11R LVM12R !2 !2 !0 !0 !1 !1 y y t t u u i i o o !3 !3 r r w w e e q q LVM112 !2 !0 Description No.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

Material Part list/LVM11 Body 1 PEEK Diaphragm assembly 2 EPDM/FKM/Kalrez t Spacer 3 PBT Armature assembly 4 Stainless steel/POM r Coil assembly 5 u y Sleeve 6 Iron Return spring 7 Stainless steel w e Board assembly 8 q !1 Casing 9 PBT Plug 10 NBR O-ring 11 NBR LVM11R LVM12R !2 !2 !0 !0 !1 !1 y y t t u u i i o o !3 !3 r r w w e e q q LVM112 !2 !0 Description No.

1

Mounting bracket Minimum order quantity Bore size [mm] Contents 20 25 32 40 Mounting nut (M5, Rc1/8, NPT1/8) *1 1 JSN-020B JSN-032B JSN-040B 1 mounting nut Rod end nut 1 NT-02 NT-03 NT-04 1 rod end nut * Refer to page 10 for dimensions. *1 Can be used for M and MZ only.

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 4) Note 3) 5 station weight (g) Port size Note 1) Applicable solenoid valve Connection type Applicable stations Base model A, B P, R Port size Port location C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) F kit: D-sub connector 420 20 1 to 12 stations Side 1 to 12 stations 26P P kit: Flat ribbon cable 420 20 20P 1 to 9 stations C8 (For 8) 10-SS5Q13-10-SQ131 J kit: Flat ribbon cable

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5

HRS100/150

Description Material Qty Note q Body PC, PP 1 w Element PP 1 e Extension piece Stainless steel 2 Conversion from NPT to Rc HRSH HRSE Replacement Element r Handle 1 When -H is selected HRS PF006 t Sealant tape PTFE 1 HRZ HRZD e Rc1 HRW HECR NPT1 NPT1 HEC (256) HEB e HED Rc1 w HEA q IDH (343) t r 117 HRS100/150 Series i Wired Remote Controller When the wired remote controller is connected

E-P HYREG ® Series VY1 1

Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1

ZPT/ZPX

M12 x 1.75 -B16 M16 x 1.5 ZPT80HB-B8 M8 x 1.25 -B10 M10 x 1.5 27.5 80 83 58.4 85.1 37 48.5 -B12 M12 x 1.75 -B16 M16 x 1.5 13-11-87 6 Series ZPT ZPT HB-A16 (Male thread) 100 125 100 125 ZPT HB-B (Female thread) M16 x 1.5 Hexagon width across flats 22 Rc 1/8 6 6 Hexagon width across flats 24 70 25 70 Width across flats 60 4-M5 x 0.8 G 4-M5 x 0.8 11 11 G Width across flats 60 F F E E Y Y Courtesy